JP2007036384A5 - - Google Patents

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Publication number
JP2007036384A5
JP2007036384A5 JP2005213141A JP2005213141A JP2007036384A5 JP 2007036384 A5 JP2007036384 A5 JP 2007036384A5 JP 2005213141 A JP2005213141 A JP 2005213141A JP 2005213141 A JP2005213141 A JP 2005213141A JP 2007036384 A5 JP2007036384 A5 JP 2007036384A5
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JP
Japan
Prior art keywords
metal layer
piezoelectric
temperature sensor
temperature
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005213141A
Other languages
English (en)
Japanese (ja)
Other versions
JP4864370B2 (ja
JP2007036384A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005213141A priority Critical patent/JP4864370B2/ja
Priority claimed from JP2005213141A external-priority patent/JP4864370B2/ja
Priority to US11/989,127 priority patent/US20090268776A1/en
Priority to PCT/JP2006/314940 priority patent/WO2007011070A1/ja
Publication of JP2007036384A publication Critical patent/JP2007036384A/ja
Publication of JP2007036384A5 publication Critical patent/JP2007036384A5/ja
Application granted granted Critical
Publication of JP4864370B2 publication Critical patent/JP4864370B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005213141A 2005-07-22 2005-07-22 温度センサ Expired - Fee Related JP4864370B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005213141A JP4864370B2 (ja) 2005-07-22 2005-07-22 温度センサ
US11/989,127 US20090268776A1 (en) 2005-07-22 2006-07-21 Piezoelectric Resonator and Temperature Sensor
PCT/JP2006/314940 WO2007011070A1 (ja) 2005-07-22 2006-07-21 圧電振動子及び温度センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005213141A JP4864370B2 (ja) 2005-07-22 2005-07-22 温度センサ

Publications (3)

Publication Number Publication Date
JP2007036384A JP2007036384A (ja) 2007-02-08
JP2007036384A5 true JP2007036384A5 (enExample) 2010-05-06
JP4864370B2 JP4864370B2 (ja) 2012-02-01

Family

ID=37668937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005213141A Expired - Fee Related JP4864370B2 (ja) 2005-07-22 2005-07-22 温度センサ

Country Status (3)

Country Link
US (1) US20090268776A1 (enExample)
JP (1) JP4864370B2 (enExample)
WO (1) WO2007011070A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010074422A (ja) * 2008-09-17 2010-04-02 Nippon Dempa Kogyo Co Ltd 水晶振動子素子の製造方法、水晶振動子素子、水晶振動子及び水晶発振器
KR101240759B1 (ko) * 2011-04-14 2013-03-11 삼성전기주식회사 수정 진동자 및 수정 진동자의 전극 구조
KR100956244B1 (ko) 2008-09-26 2010-05-06 삼성전기주식회사 압전 진동자 및 압전 진동자의 전극 구조
US10634566B2 (en) 2016-06-30 2020-04-28 Intel Corporation Piezoelectric package-integrated temperature sensing devices
KR101890176B1 (ko) 2017-11-01 2018-09-28 주식회사 유라테크 온도 센서 모듈
CN110995190A (zh) * 2019-11-14 2020-04-10 常州微泰格电子科技有限公司 零温漂谐振器的结构及制成方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS539108B2 (enExample) * 1971-11-01 1978-04-03
FR2545669B1 (fr) * 1983-05-03 1985-08-09 France Etat Armement Oscillateur a quartz compense en temperature
US4592663A (en) * 1984-05-10 1986-06-03 Quartex, Inc. Resonator temperature transducer
JPH0622310B2 (ja) * 1986-02-21 1994-03-23 セイコ−電子部品株式会社 輪郭すべり水晶振動子
US5607236A (en) * 1987-02-27 1997-03-04 Seiko Epson Corporation Quartz oscillator temperature sensor
JP3010922B2 (ja) * 1992-08-28 2000-02-21 セイコーエプソン株式会社 温度検出用水晶振動子及びその製造方法
US5325574A (en) * 1987-02-27 1994-07-05 Seiko Epson Corporation Method of forming a quartz oscillator temperature sensor
JPS63284439A (ja) * 1987-05-15 1988-11-21 Sumitomo Metal Ind Ltd 水晶温度センサ
JPS6429722A (en) * 1987-07-24 1989-01-31 Toyo Communication Equip Temperature sensor
DE3744239C1 (de) * 1987-12-24 1989-06-01 Heraeus Gmbh W C Elektronisches Thermometer
GB9013056D0 (en) * 1990-06-12 1990-08-01 Stc Plc Temperature sensor
GB2251143B (en) * 1990-09-28 1994-10-12 Nec Corp A temperature detector and a temperature compensated oscillator using the temperature detector
JPH04276914A (ja) * 1991-03-05 1992-10-02 Seiko Epson Corp 厚み辷り水晶振動子
AT401837B (de) * 1993-03-04 1996-12-27 Avl Verbrennungskraft Messtech Piezoelektrisches kristallelement
JP3468373B2 (ja) * 1993-08-06 2003-11-17 日本電波工業株式会社 水晶振動子
JP3420090B2 (ja) * 1998-11-06 2003-06-23 日本電波工業株式会社 水晶振動子の電極構造及び表面実装用水晶振動子
JP3823647B2 (ja) * 1999-12-15 2006-09-20 セイコーエプソン株式会社 圧電振動子と圧電振動片の周波数調整方法及び周波数調整用の加工装置
JP4066614B2 (ja) * 2001-05-18 2008-03-26 セイコーエプソン株式会社 圧電デバイス、及び圧電振動片の製造方法
JP2003078383A (ja) * 2001-08-30 2003-03-14 Kyocera Corp 水晶振動子
JP2003149058A (ja) * 2001-11-14 2003-05-21 Toshiba Corp 温度センサ及びプラント温度計測装置
EP1644717A2 (en) * 2003-03-21 2006-04-12 Symyx Technologies, Inc. Mechanical resonator

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