JP4854238B2 - フローセンサ - Google Patents

フローセンサ Download PDF

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Publication number
JP4854238B2
JP4854238B2 JP2005258828A JP2005258828A JP4854238B2 JP 4854238 B2 JP4854238 B2 JP 4854238B2 JP 2005258828 A JP2005258828 A JP 2005258828A JP 2005258828 A JP2005258828 A JP 2005258828A JP 4854238 B2 JP4854238 B2 JP 4854238B2
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JP
Japan
Prior art keywords
flow
flow path
sensor
flow rate
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005258828A
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English (en)
Japanese (ja)
Other versions
JP2007071687A5 (enExample
JP2007071687A (ja
Inventor
信一 池
昭司 上運天
淳司 熊佐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP2005258828A priority Critical patent/JP4854238B2/ja
Publication of JP2007071687A publication Critical patent/JP2007071687A/ja
Publication of JP2007071687A5 publication Critical patent/JP2007071687A5/ja
Application granted granted Critical
Publication of JP4854238B2 publication Critical patent/JP4854238B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G01F1/69—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element of resistive type
    • G01F1/692—Thin-film arrangements

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
JP2005258828A 2005-09-07 2005-09-07 フローセンサ Expired - Fee Related JP4854238B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005258828A JP4854238B2 (ja) 2005-09-07 2005-09-07 フローセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005258828A JP4854238B2 (ja) 2005-09-07 2005-09-07 フローセンサ

Publications (3)

Publication Number Publication Date
JP2007071687A JP2007071687A (ja) 2007-03-22
JP2007071687A5 JP2007071687A5 (enExample) 2008-08-28
JP4854238B2 true JP4854238B2 (ja) 2012-01-18

Family

ID=37933248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005258828A Expired - Fee Related JP4854238B2 (ja) 2005-09-07 2005-09-07 フローセンサ

Country Status (1)

Country Link
JP (1) JP4854238B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4838181B2 (ja) 2007-03-19 2011-12-14 株式会社エヌ・ティ・ティ・ドコモ ハンドオーバ方法及び無線基地局
JP2009025098A (ja) * 2007-07-18 2009-02-05 Star Micronics Co Ltd 熱式流量センサ
EP2040045B1 (en) 2007-09-20 2016-11-30 Azbil Corporation Flow sensor
JP5079435B2 (ja) * 2007-09-26 2012-11-21 アズビル株式会社 フローセンサ及びその製造方法
JP4997039B2 (ja) * 2007-09-20 2012-08-08 アズビル株式会社 フローセンサ
US20110252882A1 (en) * 2010-04-19 2011-10-20 Honeywell International Inc. Robust sensor with top cap
CN102445246A (zh) * 2010-09-30 2012-05-09 美新半导体（无锡）有限公司 热式质量流量传感器封装件及其制造方法
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
US8640552B2 (en) 2011-09-06 2014-02-04 Honeywell International Inc. MEMS airflow sensor die incorporating additional circuitry on the die
JP2016142709A (ja) * 2015-02-05 2016-08-08 株式会社鷺宮製作所 熱式フローセンサ用チップ、熱式フローセンサ用チップの製造方法、および、熱式フローセンサ用チップを備えるフローメータ
US20160298991A1 (en) * 2015-04-13 2016-10-13 Funai Electric Co., Ltd. Flowmeter and method of forming the same
JP2021148603A (ja) 2020-03-19 2021-09-27 ローム株式会社 熱式フローセンサ
US11262224B2 (en) * 2020-06-19 2022-03-01 Honeywell International Inc. Flow sensing device
US12044561B2 (en) 2020-11-06 2024-07-23 Honeywell International Inc. Flow sensing device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548078A (en) * 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
JPH0666612A (ja) * 1991-07-18 1994-03-11 Ricoh Seiki Co Ltd 流量センサー
JPH0599942A (ja) * 1991-10-11 1993-04-23 Nippon Steel Corp シリコンを用いた流速測定装置
JP3379736B2 (ja) * 1994-06-13 2003-02-24 矢崎総業株式会社 熱伝播時間計測型フローセンサとその製造方法
US6378365B1 (en) * 1997-08-22 2002-04-30 Eulite Laboratories Inc. Micromachined thermal flowmeter having heating element disposed in a silicon island
JPH11325999A (ja) * 1998-05-15 1999-11-26 Ricoh Co Ltd 熱式フローセンサ、流体測定方法
US7258003B2 (en) * 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
JP2002005708A (ja) * 2000-06-16 2002-01-09 Sunx Ltd 熱式流量センサ
US20030002994A1 (en) * 2001-03-07 2003-01-02 Johnson A. David Thin film shape memory alloy actuated flow controller
JP2003344133A (ja) * 2002-05-31 2003-12-03 Yamatake Corp 流量計

Also Published As

Publication number Publication date
JP2007071687A (ja) 2007-03-22

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