JP2007071687A5 - - Google Patents

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Publication number
JP2007071687A5
JP2007071687A5 JP2005258828A JP2005258828A JP2007071687A5 JP 2007071687 A5 JP2007071687 A5 JP 2007071687A5 JP 2005258828 A JP2005258828 A JP 2005258828A JP 2005258828 A JP2005258828 A JP 2005258828A JP 2007071687 A5 JP2007071687 A5 JP 2007071687A5
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JP
Japan
Prior art keywords
flow
flow path
sensor
forming member
path forming
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Application number
JP2005258828A
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English (en)
Japanese (ja)
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JP2007071687A (ja
JP4854238B2 (ja
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Priority to JP2005258828A priority Critical patent/JP4854238B2/ja
Priority claimed from JP2005258828A external-priority patent/JP4854238B2/ja
Publication of JP2007071687A publication Critical patent/JP2007071687A/ja
Publication of JP2007071687A5 publication Critical patent/JP2007071687A5/ja
Application granted granted Critical
Publication of JP4854238B2 publication Critical patent/JP4854238B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005258828A 2005-09-07 2005-09-07 フローセンサ Expired - Fee Related JP4854238B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005258828A JP4854238B2 (ja) 2005-09-07 2005-09-07 フローセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005258828A JP4854238B2 (ja) 2005-09-07 2005-09-07 フローセンサ

Publications (3)

Publication Number Publication Date
JP2007071687A JP2007071687A (ja) 2007-03-22
JP2007071687A5 true JP2007071687A5 (enExample) 2008-08-28
JP4854238B2 JP4854238B2 (ja) 2012-01-18

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ID=37933248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005258828A Expired - Fee Related JP4854238B2 (ja) 2005-09-07 2005-09-07 フローセンサ

Country Status (1)

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JP (1) JP4854238B2 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4838181B2 (ja) 2007-03-19 2011-12-14 株式会社エヌ・ティ・ティ・ドコモ ハンドオーバ方法及び無線基地局
JP2009025098A (ja) * 2007-07-18 2009-02-05 Star Micronics Co Ltd 熱式流量センサ
EP2282180A1 (en) 2007-09-20 2011-02-09 Yamatake Corporation Flow sensor and manufacturing method therefor
JP4997039B2 (ja) * 2007-09-20 2012-08-08 アズビル株式会社 フローセンサ
JP5079435B2 (ja) * 2007-09-26 2012-11-21 アズビル株式会社 フローセンサ及びその製造方法
US20110252882A1 (en) * 2010-04-19 2011-10-20 Honeywell International Inc. Robust sensor with top cap
CN102445246A (zh) * 2010-09-30 2012-05-09 美新半导体（无锡）有限公司 热式质量流量传感器封装件及其制造方法
US8356514B2 (en) 2011-01-13 2013-01-22 Honeywell International Inc. Sensor with improved thermal stability
US8640552B2 (en) 2011-09-06 2014-02-04 Honeywell International Inc. MEMS airflow sensor die incorporating additional circuitry on the die
JP2016142709A (ja) * 2015-02-05 2016-08-08 株式会社鷺宮製作所 熱式フローセンサ用チップ、熱式フローセンサ用チップの製造方法、および、熱式フローセンサ用チップを備えるフローメータ
US20160298991A1 (en) * 2015-04-13 2016-10-13 Funai Electric Co., Ltd. Flowmeter and method of forming the same
JP2021148603A (ja) 2020-03-19 2021-09-27 ローム株式会社 熱式フローセンサ
US11262224B2 (en) 2020-06-19 2022-03-01 Honeywell International Inc. Flow sensing device
US12044561B2 (en) 2020-11-06 2024-07-23 Honeywell International Inc. Flow sensing device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4548078A (en) * 1982-09-30 1985-10-22 Honeywell Inc. Integral flow sensor and channel assembly
JPH0666612A (ja) * 1991-07-18 1994-03-11 Ricoh Seiki Co Ltd 流量センサー
JPH0599942A (ja) * 1991-10-11 1993-04-23 Nippon Steel Corp シリコンを用いた流速測定装置
JP3379736B2 (ja) * 1994-06-13 2003-02-24 矢崎総業株式会社 熱伝播時間計測型フローセンサとその製造方法
US6378365B1 (en) * 1997-08-22 2002-04-30 Eulite Laboratories Inc. Micromachined thermal flowmeter having heating element disposed in a silicon island
JPH11325999A (ja) * 1998-05-15 1999-11-26 Ricoh Co Ltd 熱式フローセンサ、流体測定方法
US7258003B2 (en) * 1998-12-07 2007-08-21 Honeywell International Inc. Flow sensor with self-aligned flow channel
JP2002005708A (ja) * 2000-06-16 2002-01-09 Sunx Ltd 熱式流量センサ
US20030002994A1 (en) * 2001-03-07 2003-01-02 Johnson A. David Thin film shape memory alloy actuated flow controller
JP2003344133A (ja) * 2002-05-31 2003-12-03 Yamatake Corp 流量計

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