DE602005027290D1 - Thermischer Durchflusssensor mit einer asymetrichen Ausführung - Google Patents

Thermischer Durchflusssensor mit einer asymetrichen Ausführung

Info

Publication number
DE602005027290D1
DE602005027290D1 DE602005027290T DE602005027290T DE602005027290D1 DE 602005027290 D1 DE602005027290 D1 DE 602005027290D1 DE 602005027290 T DE602005027290 T DE 602005027290T DE 602005027290 T DE602005027290 T DE 602005027290T DE 602005027290 D1 DE602005027290 D1 DE 602005027290D1
Authority
DE
Germany
Prior art keywords
substrate
conduit
flow sensor
thermal flow
asymmetrical design
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602005027290T
Other languages
English (en)
Inventor
Beat Neuenschwander
Hansueli Schwarzenback
Juergen Burger
Frank Zumkehr
Rocco Crivelli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Codman and Shurtleff Inc
Original Assignee
Codman and Shurtleff Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Codman and Shurtleff Inc filed Critical Codman and Shurtleff Inc
Publication of DE602005027290D1 publication Critical patent/DE602005027290D1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6845—Micromachined devices

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)
DE602005027290T 2004-06-30 2005-06-29 Thermischer Durchflusssensor mit einer asymetrichen Ausführung Active DE602005027290D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/881,538 US20060000272A1 (en) 2004-06-30 2004-06-30 Thermal flow sensor having an asymmetric design

Publications (1)

Publication Number Publication Date
DE602005027290D1 true DE602005027290D1 (de) 2011-05-19

Family

ID=35276347

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602005027290T Active DE602005027290D1 (de) 2004-06-30 2005-06-29 Thermischer Durchflusssensor mit einer asymetrichen Ausführung

Country Status (6)

Country Link
US (1) US20060000272A1 (de)
EP (2) EP1837308B1 (de)
JP (1) JP5242005B2 (de)
AT (1) ATE504809T1 (de)
DE (1) DE602005027290D1 (de)
ES (2) ES2364055T3 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9694166B2 (en) 2002-03-26 2017-07-04 Medtronics Ps Medical, Inc. Method of draining cerebrospinal fluid
US20030216710A1 (en) * 2002-03-26 2003-11-20 Hurt Robert F. Catheter
EP2040045B1 (de) 2007-09-20 2016-11-30 Azbil Corporation Durchflusssensor
JP4997039B2 (ja) * 2007-09-20 2012-08-08 アズビル株式会社 フローセンサ
WO2011075568A1 (en) * 2009-12-18 2011-06-23 Waters Technologies Corporation Thermal-based flow sensing apparatus and method for high-performance liquid chromatography
JP5556850B2 (ja) * 2012-05-31 2014-07-23 横河電機株式会社 微小流量センサ
US9207109B2 (en) 2013-04-09 2015-12-08 Honeywell International Inc. Flow sensor with improved linear output
CN111337187A (zh) * 2020-03-31 2020-06-26 苏州敏芯微电子技术股份有限公司 一种微差压模组的封装结构

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5618750A (en) * 1979-07-25 1981-02-21 Ricoh Co Ltd Gas detector
DE3485381D1 (de) * 1983-05-18 1992-02-06 Bronkhorst High Tech Bv Durchflussmessgeraet.
US4542650A (en) * 1983-08-26 1985-09-24 Innovus Thermal mass flow meter
US4555490A (en) * 1984-06-08 1985-11-26 The United States Of America As Represented By The Department Of Health And Human Services Rapid visualization system for gel electrophoresis
JPH0612493Y2 (ja) * 1988-10-18 1994-03-30 山武ハネウエル株式会社 マイクロブリッジフローセンサ
DE4205207A1 (de) * 1992-02-20 1993-08-26 Siemens Ag Vorrichtung zur messung einer gas- oder fluessigkeitsstroemung
JP3324855B2 (ja) * 1993-12-04 2002-09-17 株式会社エステック 質量流量センサ
JP3312227B2 (ja) * 1994-02-23 2002-08-05 本田技研工業株式会社 ガス式角速度センサ
DE4439222C2 (de) * 1994-11-03 1998-05-28 Bosch Gmbh Robert Massenflußsensor mit Druckkompensation
DE29505351U1 (de) * 1995-03-30 1995-06-08 CMS Mikrosysteme GmbH Chemnitz, 09577 Niederwiesa Durchflußmengenaufnehmer
JP2000206134A (ja) * 1999-01-11 2000-07-28 Tokyo Gas Co Ltd 熱線式流速センサ
JP3470881B2 (ja) * 1999-04-19 2003-11-25 矢崎総業株式会社 マイクロフローセンサ
JP2001264139A (ja) * 2000-03-22 2001-09-26 Seiko Instruments Inc 容積式流量計および流量検出用プローブ
JP2002062306A (ja) * 2000-08-23 2002-02-28 Tokyo Gas Co Ltd 流速検出装置
JP3825242B2 (ja) * 2000-10-17 2006-09-27 株式会社山武 フローセンサ
CH694974A5 (de) * 2001-04-23 2005-10-14 Sensirion Ag Flusssensor mit Substrat.
JP4955159B2 (ja) * 2001-07-18 2012-06-20 日機装株式会社 流量測定方法および装置
US6527835B1 (en) * 2001-12-21 2003-03-04 Sandia Corporation Chemical preconcentrator with integral thermal flow sensor
JP3969167B2 (ja) * 2002-04-22 2007-09-05 三菱電機株式会社 流体流量測定装置
EP1365216B1 (de) * 2002-05-10 2018-01-17 Azbil Corporation Durchflusssensor und Verfahren zu dessen Herstellung
JP3683868B2 (ja) * 2002-05-10 2005-08-17 株式会社山武 熱式フローセンサ

Also Published As

Publication number Publication date
US20060000272A1 (en) 2006-01-05
ES2364055T3 (es) 2011-08-23
EP1837308A3 (de) 2009-08-26
EP1617185B1 (de) 2011-04-06
EP1837308B1 (de) 2017-11-08
JP5242005B2 (ja) 2013-07-24
EP1837308A2 (de) 2007-09-26
ATE504809T1 (de) 2011-04-15
JP2006017724A (ja) 2006-01-19
EP1617185A1 (de) 2006-01-18
ES2648165T3 (es) 2017-12-28

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