JP4849881B2 - プラズマエッチング方法 - Google Patents
プラズマエッチング方法 Download PDFInfo
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- JP4849881B2 JP4849881B2 JP2005355092A JP2005355092A JP4849881B2 JP 4849881 B2 JP4849881 B2 JP 4849881B2 JP 2005355092 A JP2005355092 A JP 2005355092A JP 2005355092 A JP2005355092 A JP 2005355092A JP 4849881 B2 JP4849881 B2 JP 4849881B2
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- 238000000034 method Methods 0.000 title claims description 35
- 238000001020 plasma etching Methods 0.000 title claims description 8
- 238000005530 etching Methods 0.000 claims description 112
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 102
- 239000007772 electrode material Substances 0.000 claims description 26
- 229910004200 TaSiN Inorganic materials 0.000 claims description 13
- 229910052715 tantalum Inorganic materials 0.000 claims description 8
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910052735 hafnium Inorganic materials 0.000 claims description 4
- 229910052707 ruthenium Inorganic materials 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 75
- 239000000463 material Substances 0.000 description 49
- 239000000460 chlorine Substances 0.000 description 27
- 229910004298 SiO 2 Inorganic materials 0.000 description 17
- 239000000758 substrate Substances 0.000 description 17
- 229910052751 metal Inorganic materials 0.000 description 16
- 239000002184 metal Substances 0.000 description 16
- 230000003746 surface roughness Effects 0.000 description 16
- 230000008569 process Effects 0.000 description 15
- 229910052723 transition metal Inorganic materials 0.000 description 15
- 150000002500 ions Chemical class 0.000 description 14
- 238000010586 diagram Methods 0.000 description 12
- 230000007246 mechanism Effects 0.000 description 12
- 230000000694 effects Effects 0.000 description 10
- 238000009826 distribution Methods 0.000 description 9
- 230000004907 flux Effects 0.000 description 9
- 239000011810 insulating material Substances 0.000 description 8
- 150000003624 transition metals Chemical class 0.000 description 8
- 229910004129 HfSiO Inorganic materials 0.000 description 7
- 239000007769 metal material Substances 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 238000002955 isolation Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 238000000277 atomic layer chemical vapour deposition Methods 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 230000007423 decrease Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 230000010354 integration Effects 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- 229910003077 Ti−O Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000007790 scraping Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910003855 HfAlO Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910052774 Proactinium Inorganic materials 0.000 description 1
- 229910011208 Ti—N Inorganic materials 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 125000001309 chloro group Chemical group Cl* 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Classifications
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/3065—Plasma etching; Reactive-ion etching
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
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- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
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- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
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- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28123—Lithography-related aspects, e.g. sub-lithography lengths; Isolation-related aspects, e.g. to solve problems arising at the crossing with the side of the device isolation; Planarisation aspects
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
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- H01L21/8232—Field-effect technology
- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66409—Unipolar field-effect transistors
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- H01L29/66795—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a gate at the side of the channel with a horizontal current flow in a vertical sidewall of a semiconductor body, e.g. FinFET, MuGFET
Description
また、メタルゲートCMOSを作成する場合、図2(b)に示す加工の後、高誘電率材料膜を除去する必要がある。この方法として、ウエット洗浄、またはエッチングおよびウエット洗浄の組み合わせという方法がある。しかし、一つのエッチング装置におけるマルチステップ処理の一環として行うことも可能である。この際、下地Si基板110に対する選択性が十分確保できることが必要である。この場合のエッチング条件は、BCl3ガスを用い、UHF電源701の出力を300〜600W、処理圧力を0.1〜0.4Pa、RFバイアス電源713の出力を0〜10W、下部電極温度を0〜80度に設定し、3段の電磁石704の磁束は適当な分布になるよう設定した。
図5、6は、図1に示すエッチング処理装置により処理することのできる被エッチング材料の例(サンプル3)を説明する図である。この例では、サンプル3はFin型FET(Fin Field Effect Transistor)に代表される3次元構造のTiNメタルゲートを備える。
102 PMOS部分断面
103 ライン寸法
104 ArFレジスト
105 反射防止膜
106 PolySi層
107 TiN層
108 HfSiON層
109 STI
110 Si基板
111 STI段差
112 NMOSゲート電極
113 NMOS用配線断面
114 PMOSゲート電極
115 PMOS用配線断面
201 Cap絶縁膜
202 ゲート電極
203 サイドウォールスペーサ
204 イクステンション
205 ゲート絶縁膜
206 低抵抗層
207 Si基板
208 STI
209 チャネル層
210 ゲート電極の寸法
301 TiNエッチング前の下地HfSiON膜の境界面
302 NMOS部ゲート電極部分
303 NMOS部STI上の配線部分
304 PMOS部ゲート電極部分
305 ピンホール状の下地抜け
306 PMOS部STI上の配線部分
307 STI面荒れ
308 角部に残るTiN
309 HfSiON膜
401 エッチング前のTiN表面
402 TiN
403 SiO2
404 Si基板
405 Cl2/HBrガスで処理したTiN表面
406 針状残渣
407 TiN針状残渣の上面
408 TiN残渣部分の下端境界
409 HCl/HBrガスでエッチングした後のTiN表面
501 残渣上部の面
502 残渣下部の面
503 TiNエッチングレートのHCl比依存性
701 UHF電源
702 UHF整合器
703 アンテナ
704 電磁石
705 石英板
706 シャワープレート
707 エッチングチャンバ
708 高真空ポンプ
709 可変バルブ
710 下部電極
711 サセプタ
712 サーキュレータ
713 RFバイアス電源
714 RF整合機
715 直流電源
716 処理ウエハ
717 発光分光器
718 膜厚干渉計
801 FiN部分
802 ライン寸法
803 Si層
804 SiO2層
805 Si層
901 レジスト
902 有機系反射防止膜
903 TiN層
904 高誘電率材料絶縁膜
905 FiN部分の高さ
906 ゲート電極
1001 TaSiN層
1101 TiN残渣
1201 TiNエッチングレート
1202 下地選択比
1203 下地選択比15のライン
Claims (1)
- Ti,Ta,Ru,Moの何れかを含む電極材料層を有するゲート電極材料層と、前記電極材料層の下層であり、HfまたはHf及びSiを含む高誘電率ゲート絶縁層とを具備するMOSトランジスタを備えた試料を真空処理容器内に設置した下部電極上に配置し、前記真空処理容器内に処理ガスを導入し、前記真空処理容器内に高周波電力を供給して前記導入した処理ガスをプラズマ化して前記試料表面にエッチング処理を施すプラズマエッチング方法において、
前記ゲート電極材料層はTaSiN層とTiN層を有し、前記TaSiN層を、HClガスとHBrガスの混合ガスによりエッチングし、前記TiN層を、HClガスによりエッチングすること特徴とするプラズマエッチング方法。
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JP2005355092A JP4849881B2 (ja) | 2005-12-08 | 2005-12-08 | プラズマエッチング方法 |
TW095104920A TWI323487B (en) | 2005-12-08 | 2006-02-14 | Plasma etching method |
US11/354,919 US7442651B2 (en) | 2005-12-08 | 2006-02-16 | Plasma etching method |
KR1020060015666A KR100792018B1 (ko) | 2005-12-08 | 2006-02-17 | 플라즈마에칭방법 |
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JP2005355092A JP4849881B2 (ja) | 2005-12-08 | 2005-12-08 | プラズマエッチング方法 |
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JP2007158250A5 JP2007158250A5 (ja) | 2009-01-08 |
JP4849881B2 true JP4849881B2 (ja) | 2012-01-11 |
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JP5377993B2 (ja) * | 2009-01-30 | 2013-12-25 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
JP5250476B2 (ja) * | 2009-05-11 | 2013-07-31 | 株式会社日立ハイテクノロジーズ | ドライエッチング方法 |
JP5730521B2 (ja) * | 2010-09-08 | 2015-06-10 | 株式会社日立ハイテクノロジーズ | 熱処理装置 |
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US10535566B2 (en) * | 2016-04-28 | 2020-01-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of manufacture |
JP6667400B2 (ja) * | 2016-08-12 | 2020-03-18 | 東京エレクトロン株式会社 | プラズマエッチング方法およびプラズマエッチングシステム |
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US7442651B2 (en) | 2008-10-28 |
KR20070060963A (ko) | 2007-06-13 |
US20070134922A1 (en) | 2007-06-14 |
TWI323487B (en) | 2010-04-11 |
TW200723393A (en) | 2007-06-16 |
KR100792018B1 (ko) | 2008-01-04 |
JP2007158250A (ja) | 2007-06-21 |
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