JP4818977B2 - 高速原子線源および高速原子線放出方法ならびに表面改質装置 - Google Patents

高速原子線源および高速原子線放出方法ならびに表面改質装置 Download PDF

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Publication number
JP4818977B2
JP4818977B2 JP2007102845A JP2007102845A JP4818977B2 JP 4818977 B2 JP4818977 B2 JP 4818977B2 JP 2007102845 A JP2007102845 A JP 2007102845A JP 2007102845 A JP2007102845 A JP 2007102845A JP 4818977 B2 JP4818977 B2 JP 4818977B2
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Japan
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anode
emission
atoms
atomic beam
cylindrical body
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JP2007102845A
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Japanese (ja)
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JP2007317650A (ja
JP2007317650A5 (https=
Inventor
貴志 大村
伸治 石谷
直樹 鈴木
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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  • Plasma Technology (AREA)
  • Particle Accelerators (AREA)
  • Drying Of Semiconductors (AREA)
JP2007102845A 2006-04-27 2007-04-10 高速原子線源および高速原子線放出方法ならびに表面改質装置 Expired - Fee Related JP4818977B2 (ja)

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JP2007102845A JP4818977B2 (ja) 2006-04-27 2007-04-10 高速原子線源および高速原子線放出方法ならびに表面改質装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006123166 2006-04-27
JP2006123166 2006-04-27
JP2007102845A JP4818977B2 (ja) 2006-04-27 2007-04-10 高速原子線源および高速原子線放出方法ならびに表面改質装置

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JP2007317650A JP2007317650A (ja) 2007-12-06
JP2007317650A5 JP2007317650A5 (https=) 2010-01-07
JP4818977B2 true JP4818977B2 (ja) 2011-11-16

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4810497B2 (ja) * 2007-05-08 2011-11-09 パナソニック株式会社 原子線源および表面改質装置
JP2014086400A (ja) * 2012-10-26 2014-05-12 Mitsubishi Heavy Ind Ltd 高速原子ビーム源およびそれを用いた常温接合装置
WO2017038476A1 (ja) 2015-08-28 2017-03-09 日本碍子株式会社 原子線源

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116822A (ja) * 1984-07-11 1986-06-04 Hitachi Micro Comput Eng Ltd プラズマ処理装置
JPH0665200B2 (ja) * 1985-03-14 1994-08-22 日本電信電話株式会社 高速原子線源装置
JPH0668961B2 (ja) * 1986-02-03 1994-08-31 日本電信電話株式会社 高速原子線源
JPH0695452B2 (ja) * 1986-02-05 1994-11-24 日本電信電話株式会社 マイクロ高速原子線源装置
JP2636848B2 (ja) * 1987-05-12 1997-07-30 日本電信電話株式会社 高速原子線源
JP3624990B2 (ja) * 1995-03-17 2005-03-02 株式会社荏原製作所 微小物の接合方法
JP3064201B2 (ja) * 1995-03-17 2000-07-12 株式会社荏原製作所 高速原子線源及びこれを用いた加工装置
JP2791429B2 (ja) * 1996-09-18 1998-08-27 工業技術院長 シリコンウェハーの常温接合法

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