JP4815445B2 - 照明光学装置及び光学装置 - Google Patents

照明光学装置及び光学装置 Download PDF

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Publication number
JP4815445B2
JP4815445B2 JP2007533804A JP2007533804A JP4815445B2 JP 4815445 B2 JP4815445 B2 JP 4815445B2 JP 2007533804 A JP2007533804 A JP 2007533804A JP 2007533804 A JP2007533804 A JP 2007533804A JP 4815445 B2 JP4815445 B2 JP 4815445B2
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Japan
Prior art keywords
lens
light
light emitting
illumination
optical system
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Japanese (ja)
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JP2008529037A5 (enExample
JP2008529037A (ja
Inventor
聖幸 水澤
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Olympus Corp
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Olympus Corp
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/7005—Production of exposure light, i.e. light sources by multiple sources, e.g. light-emitting diodes [LED] or light source arrays
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Non-Portable Lighting Devices Or Systems Thereof (AREA)
  • Projection Apparatus (AREA)
JP2007533804A 2005-01-31 2006-01-25 照明光学装置及び光学装置 Expired - Fee Related JP4815445B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007533804A JP4815445B2 (ja) 2005-01-31 2006-01-25 照明光学装置及び光学装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2005023680 2005-01-31
JP2005023680 2005-01-31
PCT/JP2006/301593 WO2006080534A2 (en) 2005-01-31 2006-01-25 Illumination optical apparatus and optical apparatus
JP2007533804A JP4815445B2 (ja) 2005-01-31 2006-01-25 照明光学装置及び光学装置

Publications (3)

Publication Number Publication Date
JP2008529037A JP2008529037A (ja) 2008-07-31
JP2008529037A5 JP2008529037A5 (enExample) 2009-03-12
JP4815445B2 true JP4815445B2 (ja) 2011-11-16

Family

ID=36587293

Family Applications (1)

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JP2007533804A Expired - Fee Related JP4815445B2 (ja) 2005-01-31 2006-01-25 照明光学装置及び光学装置

Country Status (6)

Country Link
US (1) US7733574B2 (enExample)
EP (1) EP1844366B1 (enExample)
JP (1) JP4815445B2 (enExample)
CN (1) CN100517079C (enExample)
DE (1) DE602006003865D1 (enExample)
WO (1) WO2006080534A2 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100097802A1 (en) * 2008-10-20 2010-04-22 Robe Lighting S.R.O. Light collection system for an led luminaire
CN101988631A (zh) 2009-07-31 2011-03-23 深圳市光峰光电技术有限公司 Led舞台灯光照明设备及其改善颜色均匀性的方法
JP5429478B2 (ja) * 2009-11-20 2014-02-26 スタンレー電気株式会社 灯具
US9386286B2 (en) * 2010-06-07 2016-07-05 Texas Instruments Incorporated Sparse source array for display pixel array illumination with rotated far field plane
CN101963747A (zh) * 2010-09-19 2011-02-02 天津爱安特科技股份有限公司 采用三片led灯板的lcd投影机光源系统
CN102865467A (zh) * 2011-07-08 2013-01-09 扬升照明股份有限公司 照明系统及图案投射灯
JP5495334B2 (ja) 2011-09-22 2014-05-21 Ｎｅｃエンジニアリング株式会社 光記録ヘッドおよび画像形成装置
JP6089616B2 (ja) 2012-11-20 2017-03-08 セイコーエプソン株式会社 光源装置及びプロジェクター
CN103076677A (zh) * 2013-02-01 2013-05-01 桂林电子科技大学 一种双远心柯勒照明光路
JP6308523B2 (ja) * 2014-03-11 2018-04-11 株式会社ブイ・テクノロジー ビーム露光装置
JP6529809B2 (ja) * 2015-04-14 2019-06-12 株式会社サーマプレシジョン 光照射装置及び露光装置
CN105158887B (zh) * 2015-09-29 2017-09-22 南京理工大学 基于可编程led阵列照明的多模式显微成像方法
JP6315720B2 (ja) * 2016-08-10 2018-04-25 横浜リーディングデザイン合資会社 露光照明装置
CN107976794B (zh) * 2018-01-12 2021-01-26 苏州大学 一种可变光片厚度和长度的光片照明显微镜的照明系统
CN110146973A (zh) * 2019-05-05 2019-08-20 宁波永新光学股份有限公司 一种前置显微镜的照明装置
CN113835288B (zh) * 2019-07-15 2022-07-29 青岛海信激光显示股份有限公司 激光投影系统及光源装置
CN110989138B (zh) * 2019-12-23 2021-03-19 中国科学院长春光学精密机械与物理研究所 一种大视场宽光谱无焦光学系统

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63159837A (ja) * 1986-12-24 1988-07-02 Nikon Corp 照明装置
JPH06349710A (ja) * 1993-06-11 1994-12-22 Nikon Corp 照明光学装置
JP2003090959A (ja) * 2001-09-17 2003-03-28 Ricoh Co Ltd レーザ照明光学系、該光学系を用いた露光装置、レーザ加工機、及び投射装置
JP2004056103A (ja) * 2002-05-27 2004-02-19 Nikon Corp 照明光学装置、露光装置および露光方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5815248A (en) * 1993-04-22 1998-09-29 Nikon Corporation Illumination optical apparatus and method having a wavefront splitter and an optical integrator
JP2002006225A (ja) * 2000-06-23 2002-01-09 Nikon Corp 顕微鏡照明装置
JP3987350B2 (ja) 2001-11-16 2007-10-10 株式会社リコー レーザ照明光学系及びそれを用いた露光装置、レーザ加工装置、投射装置
CN2535182Y (zh) * 2002-01-22 2003-02-12 北京工业大学 准分子激光微加工用的均束器
JP2004253750A (ja) 2002-12-27 2004-09-09 Nikon Corp 照明光源、露光装置及び露光方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63159837A (ja) * 1986-12-24 1988-07-02 Nikon Corp 照明装置
JPH06349710A (ja) * 1993-06-11 1994-12-22 Nikon Corp 照明光学装置
JP2003090959A (ja) * 2001-09-17 2003-03-28 Ricoh Co Ltd レーザ照明光学系、該光学系を用いた露光装置、レーザ加工機、及び投射装置
JP2004056103A (ja) * 2002-05-27 2004-02-19 Nikon Corp 照明光学装置、露光装置および露光方法

Also Published As

Publication number Publication date
CN100517079C (zh) 2009-07-22
DE602006003865D1 (de) 2009-01-08
EP1844366B1 (en) 2008-11-26
CN101107572A (zh) 2008-01-16
EP1844366A2 (en) 2007-10-17
JP2008529037A (ja) 2008-07-31
US7733574B2 (en) 2010-06-08
WO2006080534A2 (en) 2006-08-03
WO2006080534A3 (en) 2006-09-21
US20080212173A1 (en) 2008-09-04
WO2006080534B1 (en) 2006-11-09

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