JP4809933B1 - 減圧ポンプ用保護フィルター装置 - Google Patents
減圧ポンプ用保護フィルター装置 Download PDFInfo
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- JP4809933B1 JP4809933B1 JP2011060999A JP2011060999A JP4809933B1 JP 4809933 B1 JP4809933 B1 JP 4809933B1 JP 2011060999 A JP2011060999 A JP 2011060999A JP 2011060999 A JP2011060999 A JP 2011060999A JP 4809933 B1 JP4809933 B1 JP 4809933B1
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- JP
- Japan
- Prior art keywords
- liquid
- vacuum pump
- fixed casing
- filler
- filter device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0052—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with filtering elements moving during filtering operation
- B01D46/0056—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with filtering elements moving during filtering operation with rotational movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/30—Particle separators, e.g. dust precipitators, using loose filtering material
- B01D46/32—Particle separators, e.g. dust precipitators, using loose filtering material the material moving during filtering
- B01D46/36—Particle separators, e.g. dust precipitators, using loose filtering material the material moving during filtering as a substantially horizontal layer, e.g. on rotary tables, drums, conveyor belts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
- B01D53/77—Liquid phase processes
- B01D53/78—Liquid phase processes with gas-liquid contact
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
- B01D2273/28—Making use of vacuum or underpressure
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Analytical Chemistry (AREA)
- Biomedical Technology (AREA)
- Health & Medical Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Separation Of Particles Using Liquids (AREA)
- Chemical Vapour Deposition (AREA)
- Compressor (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
【課題を解決するための手段】
微粒子を含む排出気体(H)を導入する排気管(3)が接続され、内部に前記微粒子捕集液(4)が貯留された固定ケーシング(1)と、
内部に微粒子捕集用充填材(5)が充填され、固定ケーシング(1)内にて微粒子捕集液(4)に前記微粒子捕集用充填材(5)の一部が浸漬されつつ回転し、固定ケーシング(1)内に導入された排出気体(H)が前記微粒子捕集用充填材(5)の表面の微粒子捕集液(4)に接触しつつ流入し、回転中心部(CL)に設けられた開口部(6)から流入気体(h)が排出される回転ドラム(2)と、
回転ドラム(2)の開口部(6)に対面して開口し、固定ケーシング(1)に取り付けられ、減圧ポンプ(C)に接続される接続管(7)とで構成されたことを特徴とする。
【選択図】図2
Description
微粒子を含む排出気体(H)を導入する排気管(3)が接続され、内部に前記微粒子捕集液(4)が貯留された固定ケーシング(1)と、
固定ケーシング(1)内に収容され、回転円筒部(16)および回転円筒部(16)の回りに設けられた籠部(19)を有しており、内部に微粒子捕集用充填材(5)が充填され、固定ケーシング(1)内にて微粒子捕集液(4)に前記微粒子捕集用充填材(5)の一部が浸漬されつつ回転し、固定ケーシング(1)内に導入された排出気体(H)が前記微粒子捕集用充填材(5)の表面の微粒子捕集液(4)に接触しつつ回転円筒部(16)の内側に流入し、回転円筒部(16)の一端に設けられた開口部(6)から流入気体(h)が排出される回転ドラム(2)と、
籠部(19)を回転させるローラ(40)と、
回転円筒部(16)の開口部(6)に対面して開口し、固定ケーシング(1)に取り付けられ、減
圧ポンプ(C)に接続される接続管(7)とで構成されたことを特徴とする。
微粒子捕集液(4)は使用に連れて次第に捕集微粒子量が増加するため、次第に粘度が上昇するが、その一部は常時新しい微粒子捕集液(4)に交換され、安定した状態で微粒子捕集が行われる。
(CL) 転中心部
(1) 固定ケーシング
(2) 回転ドラム
(3) 排気管
(4) 微粒子捕集液
(5) 微粒子捕集用充填材
(6) 開口部
(7) 接続管
Claims (4)
- 微粒子を含む排出気体を導入する排気管が接続され、内部に前記微粒子捕集液が貯留された固定ケーシングと、
前記固定ケーシング内に収容され、回転円筒部および前記回転円筒部の回りに設けられた籠部を有しており、内部に微粒子捕集用充填材が充填され、前記固定ケーシング内にて微粒子捕集液に前記微粒子捕集用充填材の一部が浸漬されつつ回転し、前記固定ケーシング内に導入された排出気体が前記微粒子捕集用充填材の表面の微粒子捕集液に接触しつつ前記回転円筒部の内側に流入し、前記回転円筒部の一端に設けられた開口部から流入気体が排出される回転ドラムと、
前記籠部を回転させるローラと、
前記回転円筒部の前記開口部に対面して開口し、前記固定ケーシングに取り付けられ、減圧ポンプに接続される接続管とで構成されたことを特徴とする減圧ポンプ用保護フィルター装置。 - 微粒子捕集液が高粘性低蒸気圧特性を有する液体である事を特徴とする請求項1に記載の減圧ポンプ用保護フィルター装置。
- 高粘性低蒸気圧性液体がグリセリンである事を特徴とする請求項2に記載の減圧ポンプ用保護フィルター装置。
- 高粘性低蒸気圧性液体が高粘性低蒸気圧性油である事を特徴とする請求項2に記載の減圧ポンプ用保護フィルター装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011060999A JP4809933B1 (ja) | 2011-03-18 | 2011-03-18 | 減圧ポンプ用保護フィルター装置 |
US13/275,579 US20120234178A1 (en) | 2011-03-18 | 2011-10-18 | Protective filter for vacuum pump |
TW100138307A TW201239201A (en) | 2011-03-18 | 2011-10-21 | Protective filter for vacuum pump |
EP11186112.6A EP2500080A3 (en) | 2011-03-18 | 2011-10-21 | Protective filter for vacuum pump |
KR1020110111881A KR20120106535A (ko) | 2011-03-18 | 2011-10-31 | 감압 펌프용 보호 필터 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011060999A JP4809933B1 (ja) | 2011-03-18 | 2011-03-18 | 減圧ポンプ用保護フィルター装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP4809933B1 true JP4809933B1 (ja) | 2011-11-09 |
JP2012197191A JP2012197191A (ja) | 2012-10-18 |
Family
ID=45044168
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011060999A Expired - Fee Related JP4809933B1 (ja) | 2011-03-18 | 2011-03-18 | 減圧ポンプ用保護フィルター装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20120234178A1 (ja) |
EP (1) | EP2500080A3 (ja) |
JP (1) | JP4809933B1 (ja) |
KR (1) | KR20120106535A (ja) |
TW (1) | TW201239201A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108176159A (zh) * | 2018-01-12 | 2018-06-19 | 南阳师范学院 | 感应熔炼炉真空机组用粉尘过滤器 |
WO2022111429A1 (zh) * | 2020-11-30 | 2022-06-02 | 湖南省虹宇碳素新材料有限公司 | 一种碳素生产过程中用的填充料装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5645739B2 (ja) * | 2011-04-11 | 2014-12-24 | 長州産業株式会社 | 保護フィルター装置 |
US8943883B2 (en) * | 2012-09-14 | 2015-02-03 | HGST Netherlands B.V. | Apparatus for counting microparticles using a gas reservoir to increase stability of air pressure |
JP6195753B2 (ja) * | 2013-07-19 | 2017-09-13 | 信越半導体株式会社 | 不活性ガスの回収前処理設備 |
CN105664595A (zh) * | 2016-01-11 | 2016-06-15 | 上海安赐环保科技股份有限公司 | 一种中小燃煤锅炉湿法脱硫尾气强化除雾除尘装置及其工艺 |
CN113058342B (zh) * | 2021-04-13 | 2022-10-28 | 西安航空制动科技有限公司 | 一种便于在线实时清理的cvd炉过滤装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB184060A (en) * | 1921-08-09 | 1922-08-10 | Albert Florin | Improvements in gas washers |
GB325724A (en) * | 1929-03-21 | 1930-02-27 | Thomas Piggott And Company Ltd | New or improved apparatus for bringing liquids and gases into intimate contact |
US3712031A (en) * | 1971-03-19 | 1973-01-23 | Cruz L Santa | Anti-smog and exhaust device |
JPS53110179A (en) * | 1977-03-08 | 1978-09-26 | Kokusai Electric Co Ltd | Means for trapping powdery material in gaseous flow |
JP3402039B2 (ja) | 1995-12-25 | 2003-04-28 | 信越半導体株式会社 | 単結晶製造装置 |
US6843835B2 (en) * | 2001-03-27 | 2005-01-18 | The Procter & Gamble Company | Air cleaning apparatus and method for cleaning air |
JP2011060999A (ja) | 2009-09-10 | 2011-03-24 | Panasonic Corp | 半導体装置及びその製造方法 |
-
2011
- 2011-03-18 JP JP2011060999A patent/JP4809933B1/ja not_active Expired - Fee Related
- 2011-10-18 US US13/275,579 patent/US20120234178A1/en not_active Abandoned
- 2011-10-21 TW TW100138307A patent/TW201239201A/zh unknown
- 2011-10-21 EP EP11186112.6A patent/EP2500080A3/en not_active Withdrawn
- 2011-10-31 KR KR1020110111881A patent/KR20120106535A/ko not_active Application Discontinuation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108176159A (zh) * | 2018-01-12 | 2018-06-19 | 南阳师范学院 | 感应熔炼炉真空机组用粉尘过滤器 |
WO2022111429A1 (zh) * | 2020-11-30 | 2022-06-02 | 湖南省虹宇碳素新材料有限公司 | 一种碳素生产过程中用的填充料装置 |
Also Published As
Publication number | Publication date |
---|---|
US20120234178A1 (en) | 2012-09-20 |
KR20120106535A (ko) | 2012-09-26 |
EP2500080A3 (en) | 2015-12-30 |
TW201239201A (en) | 2012-10-01 |
EP2500080A2 (en) | 2012-09-19 |
JP2012197191A (ja) | 2012-10-18 |
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