JP4797150B2 - 走査機構およびこれを用いた機械走査型顕微鏡 - Google Patents

走査機構およびこれを用いた機械走査型顕微鏡 Download PDF

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Publication number
JP4797150B2
JP4797150B2 JP2001034391A JP2001034391A JP4797150B2 JP 4797150 B2 JP4797150 B2 JP 4797150B2 JP 2001034391 A JP2001034391 A JP 2001034391A JP 2001034391 A JP2001034391 A JP 2001034391A JP 4797150 B2 JP4797150 B2 JP 4797150B2
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JP
Japan
Prior art keywords
actuator
scanning
axis
scanning mechanism
movable member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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JP2001034391A
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English (en)
Japanese (ja)
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JP2001330425A5 (enExample
JP2001330425A (ja
Inventor
明敏 戸田
敏夫 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanazawa University NUC
Olympus Corp
Original Assignee
Kanazawa University NUC
Olympus Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanazawa University NUC, Olympus Corp filed Critical Kanazawa University NUC
Priority to JP2001034391A priority Critical patent/JP4797150B2/ja
Priority to US09/803,448 priority patent/US6617761B2/en
Publication of JP2001330425A publication Critical patent/JP2001330425A/ja
Priority to US10/616,879 priority patent/US6809306B2/en
Publication of JP2001330425A5 publication Critical patent/JP2001330425A5/ja
Application granted granted Critical
Publication of JP4797150B2 publication Critical patent/JP4797150B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/02—Probe holders
    • G01Q70/04—Probe holders with compensation for temperature or vibration induced errors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G01Q10/04—Fine scanning or positioning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/202—Movement
    • H01J2237/20264—Piezoelectric devices

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Microscoopes, Condenser (AREA)
JP2001034391A 2000-03-14 2001-02-09 走査機構およびこれを用いた機械走査型顕微鏡 Expired - Lifetime JP4797150B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001034391A JP4797150B2 (ja) 2000-03-14 2001-02-09 走査機構およびこれを用いた機械走査型顕微鏡
US09/803,448 US6617761B2 (en) 2000-03-14 2001-03-09 Scanning unit and scanning microscope having the same
US10/616,879 US6809306B2 (en) 2000-03-14 2003-07-10 Scanning unit and scanning microscope having the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2000071128 2000-03-14
JP2000071128 2000-03-14
JP2000-71128 2000-03-14
JP2001034391A JP4797150B2 (ja) 2000-03-14 2001-02-09 走査機構およびこれを用いた機械走査型顕微鏡

Publications (3)

Publication Number Publication Date
JP2001330425A JP2001330425A (ja) 2001-11-30
JP2001330425A5 JP2001330425A5 (enExample) 2008-03-06
JP4797150B2 true JP4797150B2 (ja) 2011-10-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001034391A Expired - Lifetime JP4797150B2 (ja) 2000-03-14 2001-02-09 走査機構およびこれを用いた機械走査型顕微鏡

Country Status (2)

Country Link
US (2) US6617761B2 (enExample)
JP (1) JP4797150B2 (enExample)

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JP2005106790A (ja) 2003-01-09 2005-04-21 Univ Kanazawa 走査型プローブ顕微鏡および分子構造変化観測方法
EP1493530A1 (de) * 2003-07-04 2005-01-05 HESS, Peter Werkzeugkopf mit piezoelektrischen Aktuatoren
US7180662B2 (en) * 2004-04-12 2007-02-20 Applied Scientific Instrumentation Inc. Stage assembly and method for optical microscope including Z-axis stage and piezoelectric actuator for rectilinear translation of Z stage
JP2005334985A (ja) * 2004-05-24 2005-12-08 Sii Nanotechnology Inc 原子間力顕微鏡を用いた垂直断面加工方法
DE102004049371B4 (de) * 2004-10-09 2015-05-21 Forschungszentrum Jülich GmbH Nanomanipulator zum Analysieren oder Bearbeiten von Objekten
JP2006126145A (ja) 2004-11-01 2006-05-18 Olympus Corp 走査型プローブ顕微鏡用走査機構および走査型プローブ顕微鏡
US7278298B2 (en) * 2004-11-30 2007-10-09 The Regents Of The University Of California Scanner for probe microscopy
KR100687717B1 (ko) * 2004-12-16 2007-02-27 한국전자통신연구원 압전소자를 채용한 마이크로 스테이지
KR100628321B1 (ko) 2004-12-16 2006-09-27 한국전자통신연구원 마이크로 칼럼 전자빔 장치
JP2006308363A (ja) * 2005-04-27 2006-11-09 Olympus Corp 走査機構
US7586236B2 (en) * 2005-10-07 2009-09-08 The United States Of America As Represented By The Secretary Of The Navy Tri-axial hybrid vibration isolator
JP2007171022A (ja) 2005-12-22 2007-07-05 Canon Inc 走査プローブ装置
US20070144244A1 (en) * 2005-12-28 2007-06-28 Karma Technology, Inc. Probe module with integrated actuator for a probe microscope
JP4448099B2 (ja) * 2006-02-01 2010-04-07 キヤノン株式会社 走査型プローブ装置
US8302456B2 (en) 2006-02-23 2012-11-06 Asylum Research Corporation Active damping of high speed scanning probe microscope components
EP1963475A1 (en) * 2006-06-23 2008-09-03 Reckitt Benckiser Inc. Improvements in dispensing devices and compositions therefor
US8173965B2 (en) 2006-09-12 2012-05-08 International Business Machines Corporation Thermally excited near-field source
US7687975B2 (en) * 2007-03-27 2010-03-30 Panasonic Corporation Vibration assisted machining system with stacked actuators
US8001831B2 (en) 2007-05-31 2011-08-23 Sii Nano Technology Inc. Positioning apparatus and scanning probe microscope employing the same
JP4995767B2 (ja) * 2007-05-31 2012-08-08 エスアイアイ・ナノテクノロジー株式会社 位置決め装置及びこれを用いた走査型プローブ顕微鏡
GB0718420D0 (en) * 2007-09-21 2007-10-31 Reckitt Benckiser Inc Improvements in dispensing devices
WO2009147807A1 (ja) 2008-06-04 2009-12-10 国立大学法人 金沢大学 走査型プローブ顕微鏡用のスキャナ装置
US7994688B2 (en) * 2008-09-18 2011-08-09 Uchicago Argonne, Llc Mechanical design of laminar weak-link mechanisms with centimeter-level travel range and sub-nanometer positioning resolution
US8806995B2 (en) * 2009-09-08 2014-08-19 The Board Of Trustees Of The University Of Illinois High-precision micro/nano-scale machining system
CN101793911B (zh) * 2010-04-09 2012-09-05 北京工业大学 一种基于扫描电镜的纳米压痕系统
KR101850513B1 (ko) 2011-02-15 2018-05-31 나노트로닉스 이미징, 인코포레이티드 연속적으로 스캐닝하는 xy 병진 스테이지
BRPI1106471B1 (pt) 2011-10-17 2020-12-22 Companhia Hidro Elétrica Do São Francisco - Chesf método de regulação de tensão e paralelismo entre diferentes modelos de fontes de tensão e/ou vãos energizados de alta tensão
JP6040530B2 (ja) * 2012-01-17 2016-12-07 セイコーエプソン株式会社 ハンドラーおよび検査装置
JP5633853B2 (ja) * 2012-11-19 2014-12-03 Ｔｍｃシステム株式会社 精密微摺動試験機
KR101920723B1 (ko) * 2012-12-10 2019-02-14 삼성전자주식회사 압전 선형 액츄에이터
US9383388B2 (en) 2014-04-21 2016-07-05 Oxford Instruments Asylum Research, Inc Automated atomic force microscope and the operation thereof
EP3538941B1 (en) 2016-11-10 2025-04-23 The Trustees of Columbia University in the City of New York Rapid high-resolution imaging methods for large samples
EP3939246B1 (en) 2019-03-12 2025-02-12 Lumus Ltd. Image projector
WO2021214745A1 (en) 2020-04-20 2021-10-28 Lumus Ltd. Near-eye display with enhanced laser efficiency and eye safety
US11094499B1 (en) * 2020-10-04 2021-08-17 Borries Pte. Ltd. Apparatus of charged-particle beam such as electron microscope comprising sliding specimen table within objective lens
JP2024502701A (ja) 2020-12-20 2024-01-23 ルムス エルティーディー． 空間光変調器上のレーザ走査による画像プロジェクタ

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JP3596707B2 (ja) * 1996-09-02 2004-12-02 日本電信電話株式会社 変位鏡装置
JPH10142240A (ja) * 1996-11-14 1998-05-29 Hitachi Constr Mach Co Ltd 走査型プローブ顕微鏡とこの走査型プローブ顕微鏡を備えた加工装置
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JP3772005B2 (ja) * 1997-10-22 2006-05-10 オリンパス株式会社 移動装置及び移動装置を有する走査型プローブ顕微鏡
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Also Published As

Publication number Publication date
JP2001330425A (ja) 2001-11-30
US6617761B2 (en) 2003-09-09
US20040065819A1 (en) 2004-04-08
US6809306B2 (en) 2004-10-26
US20020017615A1 (en) 2002-02-14

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