JP4790315B2 - 静電容量型超音波振動子 - Google Patents

静電容量型超音波振動子 Download PDF

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Publication number
JP4790315B2
JP4790315B2 JP2005159582A JP2005159582A JP4790315B2 JP 4790315 B2 JP4790315 B2 JP 4790315B2 JP 2005159582 A JP2005159582 A JP 2005159582A JP 2005159582 A JP2005159582 A JP 2005159582A JP 4790315 B2 JP4790315 B2 JP 4790315B2
Authority
JP
Japan
Prior art keywords
electrode pad
electrode
transducer
ultrasonic
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005159582A
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English (en)
Japanese (ja)
Other versions
JP2006333952A (ja
JP2006333952A5 (https=
Inventor
日出夫 安達
勝裕 若林
一哉 松本
亮 太田
正明 網倉
寛 伊藤
守 長谷川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Olympus Medical Systems Corp
Original Assignee
Olympus Corp
Olympus Medical Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Corp, Olympus Medical Systems Corp filed Critical Olympus Corp
Priority to JP2005159582A priority Critical patent/JP4790315B2/ja
Priority to EP20060746754 priority patent/EP1897498B1/en
Priority to PCT/JP2006/310270 priority patent/WO2006129525A1/ja
Publication of JP2006333952A publication Critical patent/JP2006333952A/ja
Priority to US11/942,364 priority patent/US7589455B2/en
Publication of JP2006333952A5 publication Critical patent/JP2006333952A5/ja
Application granted granted Critical
Publication of JP4790315B2 publication Critical patent/JP4790315B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/12—Diagnosis using ultrasonic, sonic or infrasonic waves in body cavities or body tracts, e.g. by using catheters
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4444—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device related to the probe
    • A61B8/445—Details of catheter construction

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Pathology (AREA)
  • Radiology & Medical Imaging (AREA)
  • Biomedical Technology (AREA)
  • Veterinary Medicine (AREA)
  • Medical Informatics (AREA)
  • Physics & Mathematics (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Mechanical Engineering (AREA)
  • Gynecology & Obstetrics (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Endoscopes (AREA)
JP2005159582A 2005-05-31 2005-05-31 静電容量型超音波振動子 Expired - Fee Related JP4790315B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005159582A JP4790315B2 (ja) 2005-05-31 2005-05-31 静電容量型超音波振動子
EP20060746754 EP1897498B1 (en) 2005-05-31 2006-05-23 Capacitive micromachined ultrasonic transducer and method for manufacturing the same
PCT/JP2006/310270 WO2006129525A1 (ja) 2005-05-31 2006-05-23 静電容量型超音波振動子とその製造方法
US11/942,364 US7589455B2 (en) 2005-05-31 2007-11-19 Capacitive micromachined ultrasonic transducer and production method of same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005159582A JP4790315B2 (ja) 2005-05-31 2005-05-31 静電容量型超音波振動子

Publications (3)

Publication Number Publication Date
JP2006333952A JP2006333952A (ja) 2006-12-14
JP2006333952A5 JP2006333952A5 (https=) 2008-05-15
JP4790315B2 true JP4790315B2 (ja) 2011-10-12

Family

ID=37481454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005159582A Expired - Fee Related JP4790315B2 (ja) 2005-05-31 2005-05-31 静電容量型超音波振動子

Country Status (4)

Country Link
US (1) US7589455B2 (https=)
EP (1) EP1897498B1 (https=)
JP (1) JP4790315B2 (https=)
WO (1) WO2006129525A1 (https=)

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US7489593B2 (en) * 2004-11-30 2009-02-10 Vermon Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor
JP4880275B2 (ja) * 2005-10-03 2012-02-22 オリンパスメディカルシステムズ株式会社 静電容量型超音波振動子装置
JP4294678B2 (ja) * 2006-10-30 2009-07-15 オリンパスメディカルシステムズ株式会社 超音波トランスデューサ、超音波トランスデューサの製造方法、及び超音波内視鏡
JP5226231B2 (ja) * 2007-03-13 2013-07-03 株式会社東芝 超音波診断装置
EP2152024A4 (en) * 2007-04-27 2017-01-04 Hitachi, Ltd. Ultrasonic transducer and ultrasonic imaging apparatus
EP2223654A4 (en) * 2007-12-13 2017-09-06 Hitachi, Ltd. Ultrasonic diagnostic equipment and ultrasonic probe
US20090182229A1 (en) * 2008-01-10 2009-07-16 Robert Gideon Wodnicki UltraSound System With Highly Integrated ASIC Architecture
WO2009154091A1 (ja) * 2008-06-17 2009-12-23 株式会社日立製作所 半導体装置の製造方法
JP5578836B2 (ja) 2008-12-25 2014-08-27 キヤノン株式会社 電気機械変換装置及びその作製方法
US8431420B2 (en) 2009-01-16 2013-04-30 Hitachi Medical Corporation Manufacturing method of ultrasonic probe and ultrasonic probe
US8251483B2 (en) * 2009-02-13 2012-08-28 Fujifilm Corporation Mitigation of shorted fluid ejector units
JP5851238B6 (ja) * 2009-03-05 2023-12-15 株式会社日立メディコ 超音波トランスデューサ、その製造方法、および、それを用いた超音波探触子
JP5377066B2 (ja) * 2009-05-08 2013-12-25 キヤノン株式会社 静電容量型機械電気変換素子及びその製法
JP5409138B2 (ja) 2009-06-19 2014-02-05 キヤノン株式会社 電気機械変換装置、電気機械変換装置の感度ばらつき検出方法、及び補正方法
JP2012005789A (ja) * 2010-06-28 2012-01-12 Toshiba Corp 超音波診断装置
US8498178B2 (en) * 2010-12-23 2013-07-30 Analog Devices, Inc. Acoustic transducer chip
US9642596B2 (en) 2011-04-20 2017-05-09 Hitachi, Ltd. Ultrasound imaging apparatus
JP5780857B2 (ja) * 2011-07-04 2015-09-16 オリンパス株式会社 超音波ユニットおよび超音波内視鏡
JP5855373B2 (ja) 2011-07-11 2016-02-09 オリンパス株式会社 超音波エレメントおよび超音波内視鏡
JP5924971B2 (ja) * 2012-02-16 2016-05-25 日立アロカメディカル株式会社 超音波診断装置
JP5978648B2 (ja) * 2012-02-24 2016-08-24 セイコーエプソン株式会社 超音波装置、プローブ、電子機器、診断装置及び処理装置
US20140058263A1 (en) * 2012-08-24 2014-02-27 Elwha LLC, a limited liability company of the State of Delaware Adaptive Ultrasonic Array
KR20140033992A (ko) 2012-09-11 2014-03-19 삼성전자주식회사 초음파 변환기
JP6011235B2 (ja) * 2012-10-17 2016-10-19 セイコーエプソン株式会社 超音波測定装置、プローブヘッド、超音波プローブ、電子機器及び超音波診断装置
WO2014123922A1 (en) * 2013-02-05 2014-08-14 Butterfly Network, Inc. Cmos ultrasonic transducers and related apparatus and methods
CA2903479C (en) 2013-03-15 2023-10-10 Butterfly Network, Inc. Monolithic ultrasonic imaging devices, systems and methods
EP3079837B1 (en) 2013-12-12 2023-02-08 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device
US9618561B2 (en) 2014-03-05 2017-04-11 Infineon Technologies Ag Semiconductor device and method for detecting damaging of a semiconductor device
JP2016039512A (ja) 2014-08-08 2016-03-22 キヤノン株式会社 電極が貫通配線と繋がったデバイス、及びその製造方法
KR20160090102A (ko) * 2015-01-21 2016-07-29 삼성전자주식회사 초음파 촬영 장치, 초음파 프로브 장치, 신호 처리 장치 및 초음파 촬영 장치의 제어 방법
JP2018523414A (ja) 2015-08-11 2018-08-16 コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． 過電流保護付き容量性微細加工超音波トランスデューサ
GB2558008B (en) * 2016-12-20 2020-03-25 Cirrus Logic Int Semiconductor Ltd MEMS device
US10284963B2 (en) * 2017-03-28 2019-05-07 Nanofone Ltd. High performance sealed-gap capacitive microphone
GB2565375A (en) * 2017-08-11 2019-02-13 Cirrus Logic Int Semiconductor Ltd MEMS devices and processes
KR102019845B1 (ko) * 2017-10-30 2019-09-09 현대오트론 주식회사 초음파 처리 장치 및 방법
FR3077163B1 (fr) * 2018-01-22 2021-08-27 Soitec Silicon On Insulator Procedes de conception et de fabrication d'un dispositif comprenant un reseau d'elements micro-usines, dispositif obtenu a l'issu de tels procedes
JP7141868B2 (ja) 2018-06-29 2022-09-26 富士フイルム株式会社 超音波診断装置、及び超音波診断装置の作動方法
WO2020082256A1 (zh) * 2018-10-24 2020-04-30 深圳市汇顶科技股份有限公司 超声换能器及其制造方法
DE102021107559A1 (de) * 2021-03-25 2022-09-29 Endress+Hauser Conducta Gmbh+Co. Kg Verfahren zur Qualitätsprüfung von Ultraschallwandlern
WO2022271169A1 (en) * 2021-06-23 2022-12-29 Exo Imaging, Inc. Systems and methods for testing mems arrays and associated asics
CN117066083B (zh) * 2023-07-24 2025-08-26 西南交通大学 一种可穿戴柔性近红外透明超声换能器及其制备方法

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US6246158B1 (en) * 1999-06-24 2001-06-12 Sensant Corporation Microfabricated transducers formed over other circuit components on an integrated circuit chip and methods for making the same
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JP4220723B2 (ja) * 2002-05-14 2009-02-04 アロカ株式会社 超音波探触子
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JP4370120B2 (ja) * 2003-05-26 2009-11-25 オリンパス株式会社 超音波内視鏡および超音波内視鏡装置
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JP4733988B2 (ja) * 2005-01-21 2011-07-27 オリンパス株式会社 体腔内超音波診断システム
JP4624763B2 (ja) * 2004-10-27 2011-02-02 オリンパス株式会社 静電容量型超音波振動子、及びその製造方法
US20070299345A1 (en) * 2004-10-27 2007-12-27 Hideo Adachi Capacitive Ultrasonic Transducer and Endo Cavity Ultrasonic Diagnosis System Using the Same
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Also Published As

Publication number Publication date
EP1897498A1 (en) 2008-03-12
US20080067895A1 (en) 2008-03-20
EP1897498B1 (en) 2015-03-25
JP2006333952A (ja) 2006-12-14
US7589455B2 (en) 2009-09-15
EP1897498A4 (en) 2013-04-24
WO2006129525A1 (ja) 2006-12-07

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