JP4785389B2 - 反射ミラー、露光装置及びデバイス製造方法 - Google Patents

反射ミラー、露光装置及びデバイス製造方法 Download PDF

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Publication number
JP4785389B2
JP4785389B2 JP2005034108A JP2005034108A JP4785389B2 JP 4785389 B2 JP4785389 B2 JP 4785389B2 JP 2005034108 A JP2005034108 A JP 2005034108A JP 2005034108 A JP2005034108 A JP 2005034108A JP 4785389 B2 JP4785389 B2 JP 4785389B2
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layer
optical
thickness
film
light
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Expired - Fee Related
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JP2005034108A
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Japanese (ja)
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JP2006220903A5 (https=
JP2006220903A (ja
Inventor
世治 桑原
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Canon Inc
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Canon Inc
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Priority to JP2005034108A priority Critical patent/JP4785389B2/ja
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  • Polarising Elements (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Liquid Crystal (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Elements Other Than Lenses (AREA)
JP2005034108A 2005-02-10 2005-02-10 反射ミラー、露光装置及びデバイス製造方法 Expired - Fee Related JP4785389B2 (ja)

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JP2005034108A JP4785389B2 (ja) 2005-02-10 2005-02-10 反射ミラー、露光装置及びデバイス製造方法

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JP2005034108A JP4785389B2 (ja) 2005-02-10 2005-02-10 反射ミラー、露光装置及びデバイス製造方法

Publications (3)

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JP2006220903A JP2006220903A (ja) 2006-08-24
JP2006220903A5 JP2006220903A5 (https=) 2008-03-27
JP4785389B2 true JP4785389B2 (ja) 2011-10-05

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Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5311757B2 (ja) * 2007-03-29 2013-10-09 キヤノン株式会社 反射光学素子、露光装置およびデバイス製造方法
JP2008257777A (ja) * 2007-04-03 2008-10-23 Topcon Corp 光学部品
US10067265B2 (en) 2010-10-12 2018-09-04 Toyota Motor Engineering & Manufacturing North America, Inc. Semi-transparent reflectors
JP2014086579A (ja) * 2012-10-19 2014-05-12 Applied Materials Inc 真空チャンバ用反射部材
JP6236987B2 (ja) 2013-08-23 2017-11-29 ミツミ電機株式会社 光走査装置及び光走査ユニット
CN112505815A (zh) * 2020-09-15 2021-03-16 中国科学院上海技术物理研究所 一种偏振调控分光镜
JP2024104628A (ja) 2023-01-24 2024-08-05 キヤノン株式会社 投影光学系、露光装置、および物品製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2629693B2 (ja) * 1987-02-26 1997-07-09 松下電器産業株式会社 エキシマレーザ用ミラー
JPH1031106A (ja) * 1996-07-18 1998-02-03 Nikon Corp 多波長用レーザーミラー
JP3976919B2 (ja) * 1998-12-28 2007-09-19 日東光器株式会社 反射ミラー
JP2001337462A (ja) * 2000-05-26 2001-12-07 Nikon Corp 露光装置、露光装置の製造方法、およびマイクロデバイスの製造方法
JP2001338867A (ja) * 2000-05-30 2001-12-07 Nikon Corp 照明装置、位置計測装置、並びに露光装置及び露光方法

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JP2006220903A (ja) 2006-08-24

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