JP4782622B2 - 無機配向膜の形成方法 - Google Patents
無機配向膜の形成方法 Download PDFInfo
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- JP4782622B2 JP4782622B2 JP2006176446A JP2006176446A JP4782622B2 JP 4782622 B2 JP4782622 B2 JP 4782622B2 JP 2006176446 A JP2006176446 A JP 2006176446A JP 2006176446 A JP2006176446 A JP 2006176446A JP 4782622 B2 JP4782622 B2 JP 4782622B2
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- sio
- substrate
- evaporation
- alignment film
- inorganic alignment
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Description
λ≒10-2/P …(1)
本実施形態の蒸着装置1においては、蒸発源5と基板W間の距離が3mであることから、平均自由行程λ=3mを得るためには、(1)式から、
3≒10-2/P
従って、
P≒3×10-3(3E−03)[Pa]
となる。
・ベース圧力:5×10-4Pa
・成膜圧力:3×10-3Pa
・電子銃出力:7kV×220〜240mA
・成膜レート:2〜5Å/sec
・基板加熱温度:100℃
・膜厚:500Å
2 蒸発室
3 成膜室
4 真空チャンバ
5 蒸発源
6 基板ホルダ
7 膜厚モニタ
M 蒸発材料
Claims (3)
- 真空チャンバ内において、蒸発源で蒸発させたシリコン酸化物を基板上に蒸着させ、前記基板上にSiO2からなる無機配向膜を形成する方法であって、
蒸発材料として、SiO 2 に対するSiOの添加量が25wt%以上50wt%以下であるSiO2とSiOの混合材料を用いることを特徴とする無機配向膜の形成方法。 - 蒸着時における前記真空チャンバ内の圧力を3.0×10-3Pa以下とすることを特徴とする請求項1に記載の無機配向膜の形成方法。
- 前記基板に対して前記蒸発材料を斜めに蒸着させることを特徴とする請求項1に記載の無機配向膜の形成方法。
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JP2006176446A JP4782622B2 (ja) | 2006-06-27 | 2006-06-27 | 無機配向膜の形成方法 |
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JP2006176446A JP4782622B2 (ja) | 2006-06-27 | 2006-06-27 | 無機配向膜の形成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008008948A JP2008008948A (ja) | 2008-01-17 |
JP4782622B2 true JP4782622B2 (ja) | 2011-09-28 |
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JP2006176446A Expired - Fee Related JP4782622B2 (ja) | 2006-06-27 | 2006-06-27 | 無機配向膜の形成方法 |
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JP (1) | JP4782622B2 (ja) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04345126A (ja) * | 1991-05-22 | 1992-12-01 | Fuji Photo Film Co Ltd | 液晶表示素子 |
JP2004176135A (ja) * | 2002-11-27 | 2004-06-24 | Sumitomo Titanium Corp | スパッタリングターゲット用材料およびその焼結体 |
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2006
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