JP4758338B2 - 単結晶半導体の製造方法 - Google Patents
単結晶半導体の製造方法 Download PDFInfo
- Publication number
- JP4758338B2 JP4758338B2 JP2006510253A JP2006510253A JP4758338B2 JP 4758338 B2 JP4758338 B2 JP 4758338B2 JP 2006510253 A JP2006510253 A JP 2006510253A JP 2006510253 A JP2006510253 A JP 2006510253A JP 4758338 B2 JP4758338 B2 JP 4758338B2
- Authority
- JP
- Japan
- Prior art keywords
- single crystal
- pulling
- melt
- crystal semiconductor
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000013078 crystal Substances 0.000 title claims description 71
- 239000004065 semiconductor Substances 0.000 title claims description 40
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000012535 impurity Substances 0.000 claims description 66
- 239000000155 melt Substances 0.000 claims description 54
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical group [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 10
- 229910052796 boron Inorganic materials 0.000 claims description 10
- 230000007423 decrease Effects 0.000 claims description 8
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims description 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical group [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052787 antimony Inorganic materials 0.000 claims description 5
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052785 arsenic Inorganic materials 0.000 claims description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims description 5
- 229910052733 gallium Inorganic materials 0.000 claims description 5
- 229910052698 phosphorus Inorganic materials 0.000 claims description 5
- 239000011574 phosphorus Substances 0.000 claims description 5
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 52
- 229910052710 silicon Inorganic materials 0.000 description 28
- 239000010703 silicon Substances 0.000 description 28
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 27
- 238000000034 method Methods 0.000 description 26
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 24
- 239000010453 quartz Substances 0.000 description 23
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 230000000694 effects Effects 0.000 description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 239000007788 liquid Substances 0.000 description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000005530 etching Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 2
- 238000004033 diameter control Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1056—Seed pulling including details of precursor replenishment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1068—Seed pulling including heating or cooling details [e.g., shield configuration]
Description
種結晶をるつぼ内の融液に着液させ、前記種結晶を引き上げることにより、不純物が添加された単結晶半導体を製造する単結晶半導体の製造方法において、
単結晶半導体を引き上げる過程で、引上げ速度の変動を抑制することにより、単結晶半導体内の不純物の濃度ムラを小さくすること
を特徴とする。
単結晶半導体を引き上げる過程で、引上げ速度の10秒間の速度変動幅を0.025mm/min未満に調整すること
を特徴とする。
単結晶半導体の直径が所望の直径となるように引上げ速度を調整する制御を行うに際して、融液に1500ガウス以上の強度の磁場を印加すること
を特徴とする。
単結晶半導体の直径が所望の直径となるように引上げ速度を調整する制御を行うに際して、融液に1500ガウス以上の強度の磁場を印加すること
を特徴とする。
単結晶半導体に添加される不純物は、ボロンBまたはガリウムGaであり、不純物濃度は、8.0e17atoms/cc以上であること
を特徴とする。
単結晶半導体に添加される不純物は、リンPまたはアンチモンSbまたは砒素Asであり、不純物濃度は、5.0e17atoms/cc以上であること
を特徴とする。
Claims (4)
- 種結晶をるつぼの融液に着液させ、引上げ指令に応じた引上げ速度で前記種結晶を引上げることにより、不純物が添加された単結晶半導体を製造する単結晶半導体の製造方法において、
結晶直径の目標値と結晶直径の現在値との偏差を演算するステップと、
前記結晶直径の偏差を零にするための引上げ指令値として、現在の引上げ速度に対する速度増減量を、引上げ速度の10秒間の速度変動幅が0.025mm/min未満になる範囲に規制して演算するステップと、
現在の引上げ速度に対して演算された速度増減量だけ引上げ速度を増減する引上げ指令を出力して単結晶半導体を引上げるステップと
を含む単結晶半導体の製造方法。 - 融液に1500ガウス以上の強度の磁場を印加して単結晶半導体を引上げることを特徴とする請求項1記載の単結晶半導体の製造方法。
- 単結晶半導体に添加される不純物は、ボロンBまたはガリウムGaであり、不純物濃度は、8.0e17atoms/cc以上であることを特徴とする請求項1または2に記載の単結晶半導体の製造方法。
- 単結晶半導体に添加される不純物は、リンPまたはアンチモンSbまたは砒素Asであり、不純物濃度は、5.0e17atoms/cc以上であることを特徴とする請求項1または2に記載の単結晶半導体の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006510253A JP4758338B2 (ja) | 2004-02-19 | 2005-02-18 | 単結晶半導体の製造方法 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004043218 | 2004-02-19 | ||
JP2004043218 | 2004-02-19 | ||
PCT/JP2005/002628 WO2005080647A1 (ja) | 2004-02-19 | 2005-02-18 | 単結晶半導体の製造方法 |
JP2006510253A JP4758338B2 (ja) | 2004-02-19 | 2005-02-18 | 単結晶半導体の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005080647A1 JPWO2005080647A1 (ja) | 2007-10-25 |
JP4758338B2 true JP4758338B2 (ja) | 2011-08-24 |
Family
ID=34879289
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006510253A Active JP4758338B2 (ja) | 2004-02-19 | 2005-02-18 | 単結晶半導体の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7767020B2 (ja) |
JP (1) | JP4758338B2 (ja) |
DE (1) | DE112005000397T5 (ja) |
TW (1) | TW200528592A (ja) |
WO (1) | WO2005080647A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4785764B2 (ja) * | 2007-02-06 | 2011-10-05 | コバレントマテリアル株式会社 | 単結晶の製造方法 |
JP2009292663A (ja) * | 2008-06-03 | 2009-12-17 | Sumco Corp | シリコン単結晶の育成方法 |
JP2009292662A (ja) * | 2008-06-03 | 2009-12-17 | Sumco Corp | シリコン単結晶育成における肩形成方法 |
JP2011184208A (ja) * | 2010-03-04 | 2011-09-22 | Bridgestone Corp | 炭化ケイ素単結晶の製造装置及び炭化ケイ素単結晶の製造方法 |
WO2014190165A2 (en) | 2013-05-24 | 2014-11-27 | Sunedison Semiconductor Limited | Methods for producing low oxygen silicon ingots |
KR101574611B1 (ko) * | 2014-05-14 | 2015-12-04 | (주)에스테크 | 잉곳 성장 장치 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04164889A (ja) * | 1990-10-26 | 1992-06-10 | Mitsubishi Materials Corp | 単結晶の製造方法 |
JPH101388A (ja) * | 1996-06-18 | 1998-01-06 | Super Silicon Kenkyusho:Kk | 磁場印加機能を備えた単結晶引上げ装置及び引上げ方法 |
JP2000351690A (ja) * | 1999-06-08 | 2000-12-19 | Nippon Steel Corp | シリコン単結晶ウエーハおよびその製造方法 |
JP2002160995A (ja) * | 2000-11-27 | 2002-06-04 | Shin Etsu Handotai Co Ltd | Gaドープシリコン単結晶ウエーハおよびその製造方法 |
JP2003246695A (ja) * | 2002-02-21 | 2003-09-02 | Wacker Siltronic Ag | 高濃度にドーピングされたシリコン単結晶の製造方法 |
JP2004292309A (ja) * | 2003-03-27 | 2004-10-21 | Siltronic Ag | シリコン単結晶を製造するための方法及び装置、シリコン単結晶及びこれから切り出された半導体ウェーハ |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0633221B2 (ja) * | 1985-03-28 | 1994-05-02 | 株式会社東芝 | 単結晶の製造装置 |
JPH01192795A (ja) * | 1988-01-27 | 1989-08-02 | Toshiba Ceramics Co Ltd | シリコン単結晶とその製造方法 |
EP0476389A3 (en) * | 1990-08-30 | 1993-06-09 | The Furukawa Electric Co., Ltd. | Method of growing single crystal of compound semiconductors |
JP2834558B2 (ja) * | 1990-08-30 | 1998-12-09 | 古河電気工業株式会社 | 化合物半導体単結晶の成長方法 |
JP3402012B2 (ja) * | 1995-04-21 | 2003-04-28 | 信越半導体株式会社 | 単結晶の成長方法及び装置 |
JPH11116390A (ja) | 1997-10-08 | 1999-04-27 | Toshiba Ceramics Co Ltd | Cz法シリコン単結晶引上炉及びそのヒータ |
JP2000247788A (ja) * | 1999-02-26 | 2000-09-12 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
JP3528758B2 (ja) * | 2000-05-31 | 2004-05-24 | 三菱住友シリコン株式会社 | 単結晶引き上げ装置 |
JP2002047788A (ja) | 2000-08-01 | 2002-02-15 | Eidai Co Ltd | 二重床構造 |
-
2004
- 2004-12-14 TW TW093138741A patent/TW200528592A/zh unknown
-
2005
- 2005-02-18 JP JP2006510253A patent/JP4758338B2/ja active Active
- 2005-02-18 US US10/589,587 patent/US7767020B2/en active Active
- 2005-02-18 DE DE112005000397T patent/DE112005000397T5/de not_active Ceased
- 2005-02-18 WO PCT/JP2005/002628 patent/WO2005080647A1/ja active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04164889A (ja) * | 1990-10-26 | 1992-06-10 | Mitsubishi Materials Corp | 単結晶の製造方法 |
JPH101388A (ja) * | 1996-06-18 | 1998-01-06 | Super Silicon Kenkyusho:Kk | 磁場印加機能を備えた単結晶引上げ装置及び引上げ方法 |
JP2000351690A (ja) * | 1999-06-08 | 2000-12-19 | Nippon Steel Corp | シリコン単結晶ウエーハおよびその製造方法 |
JP2002160995A (ja) * | 2000-11-27 | 2002-06-04 | Shin Etsu Handotai Co Ltd | Gaドープシリコン単結晶ウエーハおよびその製造方法 |
JP2003246695A (ja) * | 2002-02-21 | 2003-09-02 | Wacker Siltronic Ag | 高濃度にドーピングされたシリコン単結晶の製造方法 |
JP2004292309A (ja) * | 2003-03-27 | 2004-10-21 | Siltronic Ag | シリコン単結晶を製造するための方法及び装置、シリコン単結晶及びこれから切り出された半導体ウェーハ |
Also Published As
Publication number | Publication date |
---|---|
DE112005000397T5 (de) | 2007-02-08 |
JPWO2005080647A1 (ja) | 2007-10-25 |
US20070193500A1 (en) | 2007-08-23 |
US7767020B2 (en) | 2010-08-03 |
TW200528592A (en) | 2005-09-01 |
TWI310058B (ja) | 2009-05-21 |
WO2005080647A1 (ja) | 2005-09-01 |
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