JP4756744B2 - 気密式の圧力変換器 - Google Patents
気密式の圧力変換器 Download PDFInfo
- Publication number
- JP4756744B2 JP4756744B2 JP2001003231A JP2001003231A JP4756744B2 JP 4756744 B2 JP4756744 B2 JP 4756744B2 JP 2001003231 A JP2001003231 A JP 2001003231A JP 2001003231 A JP2001003231 A JP 2001003231A JP 4756744 B2 JP4756744 B2 JP 4756744B2
- Authority
- JP
- Japan
- Prior art keywords
- support member
- circuit assembly
- flexible circuit
- connecting portion
- pressure transducer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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- 230000008878 coupling Effects 0.000 claims description 17
- 238000005859 coupling reaction Methods 0.000 claims description 17
- 238000005476 soldering Methods 0.000 claims description 14
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- 229910052751 metal Inorganic materials 0.000 claims description 12
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- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0038—Fluidic connecting means being part of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0069—Electrical connection means from the sensor to its support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
- G01L19/0084—Electrical connection means to the outside of the housing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/142—Multiple part housings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/148—Details about the circuit board integration, e.g. integrated with the diaphragm surface or encapsulation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US175803 | 1988-03-31 | ||
| US17580300P | 2000-01-12 | 2000-01-12 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001242031A JP2001242031A (ja) | 2001-09-07 |
| JP2001242031A5 JP2001242031A5 (enExample) | 2007-07-05 |
| JP4756744B2 true JP4756744B2 (ja) | 2011-08-24 |
Family
ID=22641691
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001003231A Expired - Lifetime JP4756744B2 (ja) | 2000-01-12 | 2001-01-11 | 気密式の圧力変換器 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6453747B1 (enExample) |
| EP (1) | EP1116943B1 (enExample) |
| JP (1) | JP4756744B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011247889A (ja) * | 2010-05-27 | 2011-12-08 | Sensata Technologies Inc | 圧力センサ |
| KR20210068213A (ko) * | 2019-11-29 | 2021-06-09 | 만도헬라일렉트로닉스(주) | 압력 센서 어셈블리 |
Families Citing this family (61)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3494594B2 (ja) * | 1999-08-05 | 2004-02-09 | 忠弘 大見 | 圧力検出器の取付け構造 |
| US6584851B2 (en) * | 2000-11-30 | 2003-07-01 | Nagano Keiki Co., Ltd. | Fluid pressure sensor having a pressure port |
| WO2004001362A1 (de) * | 2002-06-22 | 2003-12-31 | Robert Bosch Gmbh | Einfaches hochdruck-sensor-gehaeuse durch verbindungsteil (auch emv) |
| US6672170B1 (en) | 2002-07-10 | 2004-01-06 | Texas Instruments Incorporated | Hermetic pressure transducer |
| JP2004101515A (ja) * | 2002-07-10 | 2004-04-02 | Texas Instruments Inc | 気密圧力変換器 |
| US6763724B2 (en) * | 2002-07-10 | 2004-07-20 | Texas Instruments Incorporated | Hermetic pressure transducer |
| US6715357B2 (en) | 2002-07-10 | 2004-04-06 | Texas Instruments Incorporated | Hermetic pressure transducer |
| US6782758B2 (en) * | 2002-07-10 | 2004-08-31 | Texas Instruments Incorporated | Hermetic pressure transducer |
| JP3880568B2 (ja) * | 2002-10-25 | 2007-02-14 | 鹿児島日本電気株式会社 | 液晶表示装置の製造方法 |
| JP2004198147A (ja) * | 2002-12-16 | 2004-07-15 | Toyoda Mach Works Ltd | 圧力センサ |
| US6742395B1 (en) * | 2002-12-20 | 2004-06-01 | Texas Instruments Incorporated | Hermetic pressure transducer |
| JP2004340891A (ja) | 2003-05-19 | 2004-12-02 | Mitsubishi Electric Corp | 圧力センサ装置 |
| US7255015B2 (en) * | 2003-07-31 | 2007-08-14 | Sensata Technologies, Inc. | Occupant weight sensor for vehicular seats, method for making and system therefor |
| JP4069874B2 (ja) * | 2004-01-30 | 2008-04-02 | 株式会社デンソー | センサ装置 |
| US7112749B2 (en) * | 2004-06-23 | 2006-09-26 | Sensata Technologies, Inc. | Sensor mounting apparatus for minimizing parasitic stress |
| US7047823B2 (en) * | 2004-06-23 | 2006-05-23 | Texas Instruments Incorporated | Apparatus for mounting electronic module assembly in sensor |
| US20070137942A1 (en) * | 2004-06-24 | 2007-06-21 | Weems R M | Battery powered grease gun with strain gauge based pressure transducer |
| JP4185478B2 (ja) | 2004-07-23 | 2008-11-26 | 長野計器株式会社 | 歪検出器およびその製造方法 |
| JP4185477B2 (ja) | 2004-07-23 | 2008-11-26 | 長野計器株式会社 | 圧力センサ |
| US7007552B2 (en) * | 2004-07-26 | 2006-03-07 | Texas Instruments Incorporated | Multi-channel pressure sensing apparatus |
| US7270010B2 (en) * | 2004-08-27 | 2007-09-18 | Ashcroft-Nagano, Inc. | System and method for pressure measurement |
| JP2006078417A (ja) | 2004-09-13 | 2006-03-23 | Toyoda Mach Works Ltd | 圧力センサ |
| US7197937B2 (en) | 2005-01-26 | 2007-04-03 | Sensata Technologies, Inc. | Hermetic pressure sensing device |
| JP4768281B2 (ja) * | 2005-02-08 | 2011-09-07 | 株式会社ジェイテクト | 圧力センサ及びその製造方法 |
| JP2007192773A (ja) * | 2006-01-23 | 2007-08-02 | Denso Corp | 圧力センサ素子の取付構造 |
| JP2008039760A (ja) * | 2006-07-14 | 2008-02-21 | Denso Corp | 圧力センサ |
| DE102007016475B4 (de) * | 2007-04-05 | 2017-03-23 | Robert Bosch Gmbh | Anschlusseinheit für einen Drucksensor |
| US7779701B2 (en) * | 2008-06-02 | 2010-08-24 | Sensata Technologies, Inc. | Pressure sensor apparatus |
| US7765872B2 (en) * | 2008-11-19 | 2010-08-03 | Honeywell International Inc. | Flow sensor apparatus and method with media isolated electrical connections |
| US9354132B2 (en) * | 2009-02-12 | 2016-05-31 | Continental Automotive Systems, Inc. | Jointless pressure sensor port |
| US8286496B2 (en) * | 2009-02-17 | 2012-10-16 | Nagano Keiki Co., Ltd. | Fluid pressure sensor incorporating flexible circuit board |
| DE102009002990A1 (de) * | 2009-05-11 | 2010-11-18 | Robert Bosch Gmbh | Hochdrucksensor |
| US7861595B2 (en) * | 2009-05-11 | 2011-01-04 | Honeywell International Inc. | Pressure sensing device for harsh environments |
| US7984652B2 (en) * | 2009-09-08 | 2011-07-26 | Rosemount Inc. | Clad industrial process transmitter housing with chassis |
| US8156816B2 (en) * | 2010-05-27 | 2012-04-17 | Sensata Technologies, Inc. | Pressure sensor |
| EP2395336B1 (en) * | 2010-06-08 | 2018-08-01 | Sensata Technologies, Inc. | Hermetically sealed pressure sensing device |
| US8817483B2 (en) * | 2011-08-01 | 2014-08-26 | Honeywell International Inc. | Connector assembly for a sensor |
| EP3489649B8 (en) | 2012-03-06 | 2021-06-23 | Rosemount Inc. | Remote seal pressure measurement system for subsea use |
| CA2894621C (en) | 2012-12-17 | 2019-04-30 | Evolution Engineering Inc. | Mud pulse telemetry apparatus with a pressure transducer and method of operating same |
| US10753201B2 (en) | 2012-12-17 | 2020-08-25 | Evolution Engineering Inc. | Mud pulse telemetry apparatus with a pressure transducer and method of operating same |
| DE102012025518B4 (de) | 2012-12-21 | 2022-08-18 | I2S Intelligente Sensorsysteme Dresden Gmbh | Drucksensorelement |
| US9442031B2 (en) * | 2013-06-28 | 2016-09-13 | Rosemount Inc. | High integrity process fluid pressure probe |
| US9234776B2 (en) | 2013-09-26 | 2016-01-12 | Rosemount Inc. | Multivariable process fluid transmitter for high pressure applications |
| US9459170B2 (en) | 2013-09-26 | 2016-10-04 | Rosemount Inc. | Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure |
| US9638600B2 (en) | 2014-09-30 | 2017-05-02 | Rosemount Inc. | Electrical interconnect for pressure sensor in a process variable transmitter |
| CN107290099B (zh) | 2016-04-11 | 2021-06-08 | 森萨塔科技公司 | 压力传感器、用于压力传感器的插塞件和制造插塞件的方法 |
| EP3236226B1 (en) | 2016-04-20 | 2019-07-24 | Sensata Technologies, Inc. | Method of manufacturing a pressure sensor |
| US10545064B2 (en) | 2017-05-04 | 2020-01-28 | Sensata Technologies, Inc. | Integrated pressure and temperature sensor |
| US10323998B2 (en) | 2017-06-30 | 2019-06-18 | Sensata Technologies, Inc. | Fluid pressure sensor |
| US10724907B2 (en) | 2017-07-12 | 2020-07-28 | Sensata Technologies, Inc. | Pressure sensor element with glass barrier material configured for increased capacitive response |
| US10557770B2 (en) | 2017-09-14 | 2020-02-11 | Sensata Technologies, Inc. | Pressure sensor with improved strain gauge |
| JP6793624B2 (ja) * | 2017-11-13 | 2020-12-02 | 株式会社鷺宮製作所 | 圧力センサ |
| CN209326840U (zh) | 2018-12-27 | 2019-08-30 | 热敏碟公司 | 压力传感器及压力变送器 |
| DE102019208867A1 (de) * | 2019-06-18 | 2020-12-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung zum Erfassen eines Drucks eines Fluids |
| US11598686B2 (en) | 2019-10-31 | 2023-03-07 | DJ Instruments | Temperature compensation of strain gauge output |
| WO2022137812A1 (ja) * | 2020-12-23 | 2022-06-30 | 株式会社フジキン | 圧力センサ |
| DE102021122032A1 (de) | 2021-08-25 | 2023-03-02 | Endress+Hauser SE+Co. KG | Druckmessaufnehmer |
| US20250102388A1 (en) * | 2022-01-29 | 2025-03-27 | Sensata Technologies, Inc. | Sensing Device Having Split Port Geometry |
| CN114858342B (zh) * | 2022-03-23 | 2024-05-10 | 浙江亚太机电股份有限公司 | 双层电路板的油压传感器 |
| CN115790918B (zh) * | 2022-12-13 | 2025-10-24 | 武汉飞恩微电子有限公司 | 一种压力传感器信号处理组件 |
| CN116771500B (zh) * | 2023-08-01 | 2024-01-30 | 威海中远海运重工科技有限公司 | 一种甲醇燃料供给系统的在线监测装置及其监测方法 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4683757A (en) * | 1986-03-24 | 1987-08-04 | Motorola, Inc. | Axial pressure sensor |
| US4875135A (en) * | 1988-12-02 | 1989-10-17 | Texas Instruments Incorporated | Pressure sensor |
| FR2669734B1 (fr) * | 1990-11-29 | 1994-09-23 | Schlumberger Cie Dowell | Capteur de pression a jauge de contrainte pour adaptation sur le collet extreme d'une canalisation ou d'un tubage et ensemble de montage en faisant application. |
| JPH0821775A (ja) * | 1994-07-08 | 1996-01-23 | Fuji Koki Seisakusho:Kk | 圧力センサ |
| JP2692619B2 (ja) * | 1994-11-24 | 1997-12-17 | 日本電気株式会社 | 無線送受信装置 |
| US5644285A (en) * | 1995-02-01 | 1997-07-01 | Honeywell Inc. | Pressure transducer with media isolation |
| US5483994A (en) * | 1995-02-01 | 1996-01-16 | Honeywell, Inc. | Pressure transducer with media isolation and negative pressure measuring capability |
| JP3445894B2 (ja) * | 1996-02-14 | 2003-09-08 | 長野計器株式会社 | 圧力変換器 |
| EP0852337A1 (en) * | 1996-12-24 | 1998-07-08 | STMicroelectronics S.r.l. | A hermetically sealed semiconductor inertial sensor |
| US6009757A (en) * | 1997-07-28 | 2000-01-04 | Texas Instruments Incorporated | Voltage regulated pressure transducer apparatus |
| DK0915326T3 (da) * | 1997-10-10 | 2002-03-25 | Wika Alexander Wiegand Gmbh | Fremgangsmåde til fremstilling af en trykmåletransducer samt trykmåletransducer |
| JPH11177278A (ja) * | 1997-12-09 | 1999-07-02 | Hitachi Cable Ltd | 論理機能付き光送受信モジュール |
| US6326682B1 (en) * | 1998-12-21 | 2001-12-04 | Kulite Semiconductor Products | Hermetically sealed transducer and methods for producing the same |
| US6223603B1 (en) * | 1999-05-18 | 2001-05-01 | Texas Instruments Incorporated | Capacitive pressure transducer having reduced output error |
| US6272927B1 (en) * | 1999-10-20 | 2001-08-14 | Texas Instruments Incorporated | Hermetically sealed pressure sensing device |
| US6316734B1 (en) * | 2000-03-07 | 2001-11-13 | 3M Innovative Properties Company | Flexible circuits with static discharge protection and process for manufacture |
| US6330829B1 (en) * | 2000-03-16 | 2001-12-18 | Kulite Semiconductor Products Inc. | Oil-filled pressure transducer |
-
2000
- 2000-11-27 US US09/723,139 patent/US6453747B1/en not_active Expired - Lifetime
-
2001
- 2001-01-11 JP JP2001003231A patent/JP4756744B2/ja not_active Expired - Lifetime
- 2001-01-11 EP EP01300215A patent/EP1116943B1/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011247889A (ja) * | 2010-05-27 | 2011-12-08 | Sensata Technologies Inc | 圧力センサ |
| KR20210068213A (ko) * | 2019-11-29 | 2021-06-09 | 만도헬라일렉트로닉스(주) | 압력 센서 어셈블리 |
| KR102267037B1 (ko) * | 2019-11-29 | 2021-06-21 | 만도헬라일렉트로닉스(주) | 압력 센서 어셈블리 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001242031A (ja) | 2001-09-07 |
| EP1116943B1 (en) | 2013-03-06 |
| EP1116943A3 (en) | 2003-07-09 |
| EP1116943A2 (en) | 2001-07-18 |
| US6453747B1 (en) | 2002-09-24 |
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