JP4748444B2 - Surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials - Google Patents
Surface-coated cermet cutting tool that exhibits excellent chipping resistance with a hard coating layer in high-speed cutting of difficult-to-cut materials Download PDFInfo
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この発明は、硬質被覆層がすぐれた潤滑性を有し、したがって特に軟鋼やステンレス鋼、さらに高マンガン鋼などの粘性の高い難削材の高い発熱を伴う高速切削加工に用いた場合にも、切削時に切粉が切刃部に溶着することなく、すぐれた耐チッピング性を長期に亘って発揮する表面被覆サーメット製切削工具（以下、被覆サーメット工具という）に関するものである。 This invention has excellent lubricity of the hard coating layer, and therefore, even when used for high-speed cutting with high heat generation of difficult-to-cut materials with high viscosity such as mild steel, stainless steel, and even high manganese steel, The present invention relates to a surface-coated cermet cutting tool (hereinafter referred to as a coated cermet tool) that exhibits excellent chipping resistance over a long period of time without cutting chips adhering to the cutting edge during cutting.
従来、一般に、炭化タングステン（以下、ＷＣで示す）基超硬合金または炭窒化チタン（以下、ＴｉＣＮで示す）基サーメットで構成された基体（以下、これらを総称して工具基体という）の表面に、
（ａ）下部層として、炭化チタン（以下、ＴｉＣで示す）層、窒化チタン（以下、同じくＴｉＮで示す）層、炭窒化チタン（以下、ＴｉＣＮで示す）層、炭酸化チタン（以下、ＴｉＣＯで示す）層、および炭窒酸化チタン（以下、ＴｉＣＮＯで示す）層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、１〜１５μｍの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム（以下、α型Ａｌ2Ｏ3層という）層、
以上（ａ）および（ｂ）で構成された硬質被覆層を、化学蒸着装置で蒸着形成してなる被覆サーメット工具が知られており、この被覆サーメット工具が、例えば各種の鋼や鋳鉄などの連続切削や断続切削に用いられることは良く知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) As a lower layer, a titanium carbide (hereinafter referred to as TiC) layer, a titanium nitride (hereinafter also referred to as TiN) layer, a titanium carbonitride (hereinafter referred to as TiCN) layer, a titanium carbonate (hereinafter referred to as TiCO) A Ti compound layer consisting of one or two or more of the layers shown below and a titanium carbonitride oxide (hereinafter referred to as TiCNO) layer and having an overall average layer thickness of 3 to 20 μm,
(B) As an upper layer, an aluminum oxide (hereinafter referred to as α-type Al 2 O 3 layer) layer having an average layer thickness of 1 to 15 μm and having an α-type crystal structure in a chemical vapor deposited state;
There is known a coated cermet tool formed by vapor-depositing the hard coating layer constituted by the above (a) and (b) with a chemical vapor deposition apparatus, and this coated cermet tool is a continuous material such as various steels and cast irons. It is well known that it is used for cutting and intermittent cutting.
また、上記の被覆サーメット工具において、これの硬質被覆層の構成層は、一般に粒状結晶組織を有し、さらに、下部層であるＴｉ化合物層を構成するＴｉＣＮ層を、層自身の強度向上を目的として、通常の化学蒸着装置にて、反応ガスとして有機炭窒化物を含む混合ガスを使用し、７００〜９５０℃の中温温度域で化学蒸着することにより形成して縦長成長結晶組織をもつようにすることも知られている。
近年の切削加工装置の高性能化はめざましく、一方で切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は高速化の傾向にあるが、上記の従来被覆サーメット工具においては、これを炭素鋼や低合金鋼、さらに普通鋳鉄などの切削を高速切削加工条件で行うのに用いた場合には、通常の切削性能を示し問題はないが、特に軟鋼やステンレス鋼、さらに高マンガン鋼などの粘性の高い難削材などの切削加工を、高熱発生を伴なう高速切削加工条件で行うのに用いた場合には、特に硬質被覆層の潤滑性不足が原因で、切粉が切刃部に溶着し易くなり、これが原因でチッピング（微少欠け）が発生し、この結果比較的短時間で使用寿命に至るのが現状である In recent years, the performance of cutting devices has been dramatically improved, while on the other hand, there is a strong demand for labor saving, energy saving, and cost reduction for cutting, and with this, cutting tends to be faster. For coated cermet tools, when used for cutting carbon steel, low alloy steel, and ordinary cast iron under high-speed cutting conditions, there is no problem with normal cutting performance. Especially when cutting high viscosity difficult-to-cut materials such as stainless steel and high manganese steel under high-speed cutting conditions with high heat generation, the lubricity of the hard coating layer is insufficient. This makes it easier for chips to be welded to the cutting edge, which causes chipping (small chipping), resulting in a relatively short service life.
そこで、本発明者等は、上述のような観点から、特に上記粘性の高い難削材の高速切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具を開発すべく、上記の従来被覆サーメット工具の硬質被覆層に着目し、研究を行った結果、
（ａ）従来、一般に、酸化クロム（以下、Ｃｒ２Ｏ３で示す）層（以下、従来Ｃｒ２Ｏ３層という）は、通常の化学蒸着装置で、
反応ガス組成：容量％で、ＣｒＣｌ３：２〜４％、ＣＯ２：４．５〜７％、ＨＣｌ：２．５〜５％、Ｈ２：残り、
反応雰囲気温度：９５０〜１０２０℃、
反応雰囲気圧力：６〜１０ｋＰａ、
の条件（通常条件という）で形成され、かつ、格子点にＣｒおよび酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造、すなわち図１にＣｒ２Ｏ３の単位格子の原子配列が模式図［（ａ）は斜視図、（ｂ）は横断面１〜９の平面図］で示される結晶構造を有する結晶粒で構成されるが、黒鉛質材料と同等に潤滑性を有するものの、脆い材料であるために、被覆サーメット工具の硬質被覆層の表面層として適用し、高速切削加工に用いた場合、摩耗進行がきわめて速く、実用に供し得ないこと。
In view of the above, the present inventors have developed the above-described coated cermet tool that exhibits excellent chipping resistance with a hard coating layer excellent in high-speed cutting of highly viscous difficult-to-cut materials. As a result of conducting research by focusing on the hard coating layer of conventional coated cermet tools,
(A) Conventionally, in general, a chromium oxide (hereinafter referred to as Cr 2 O 3 ) layer (hereinafter referred to as a conventional Cr 2 O 3 layer) is a normal chemical vapor deposition apparatus.
Reaction gas composition: volume%, CrCl 3 : 2 to 4%, CO 2 : 4.5 to 7%, HCl: 2.5 to 5%, H 2 : remaining,
Reaction atmosphere temperature: 950-1020 ° C.
Reaction atmosphere pressure: 6 to 10 kPa,
And a crystal structure of a corundum hexagonal close-packed crystal in which constituent atoms composed of Cr and oxygen are present at lattice points, that is, atoms of a unit cell of Cr 2 O 3 in FIG. The arrangement is composed of crystal grains having a crystal structure shown in a schematic diagram [(a) is a perspective view, (b) is a plan view of a cross section 1 to 9], but has lubricity equivalent to that of a graphite material. However, since it is a brittle material, when it is applied as a surface layer of a hard coating layer of a coated cermet tool and used for high-speed cutting, the wear progress is extremely fast and cannot be put to practical use.
（ｂ）一方、同じく通常の化学蒸着装置を用い、
反応ガス組成：容量％で、ＣｒＣｌ３：２〜４％、ＺｒＣｌ４：０．１５〜０．３５％、ＣＯ２：４．５〜７％、ＨＣｌ：２．５〜５％、Ｈ２：残り、
反応雰囲気温度：９５０〜１０２０℃、
反応雰囲気圧力：６〜１０ｋＰａ、
の条件、すなわち上記（ａ）の通常条件において、上記の反応ガスにＺｒＣｌ４を０．１５〜０．３５容量％の割合で添加し、これ以外は同一の条件で層の蒸着形成を行なうと、この結果形成された層［以下、Ｚｒ含有改質Ｃｒ系酸化物層と云い、改質（Ｃｒ，Ｚｒ）2Ｏ3層で示す］は、ＺｒをＣｒとの合量に占める割合で１〜１０原子％の割合で置換含有し、上記の従来Ｃｒ2Ｏ3層のもつ結晶構造と同じコランダム型六方最密晶の結晶構造、すなわちＣｒの一部が１〜５原子％の割合でＺｒで置換されたコランダム型六方最密晶の結晶構造を有すると共に、これの具備する潤滑性と同等のすぐれた潤滑性を有し、さらに、一段と高温強度の向上したものになっており、したがって、これを上記の硬質被覆層の表面層として２〜１０μｍの平均層厚で蒸着形成してなる被覆サーメット工具は、上記の粘性の高い難削材の高い高熱発生を伴う高速切削加工でも、切刃部に切粉が溶着することがなく、この結果チッピングの発生なく、さらに具備するすぐれた高温強度によって摩耗進行が著しく抑制された状態を維持するので、すぐれた耐摩耗性を長期に亘って発揮するようになること。
(B) On the other hand, using a normal chemical vapor deposition apparatus,
Reaction gas composition:% by volume, CrCl 3 : 2 to 4%, ZrCl 4 : 0.15 to 0.35%, CO 2 : 4.5 to 7%, HCl: 2.5 to 5%, H 2 : remaining,
Reaction atmosphere temperature: 950-1020 ° C.
Reaction atmosphere pressure: 6 to 10 kPa,
Under the above conditions, that is, under the normal conditions of (a) above, ZrCl 4 is added to the above reaction gas at a ratio of 0.15 to 0.35% by volume, and the other layers are formed under the same conditions. The resulting layer [hereinafter referred to as a Zr-containing modified Cr-based oxide layer, which is indicated by a modified (Cr, Zr) 2 O 3 layer] is 1 in the proportion of Zr to the total amount of Cr. The crystal structure of the corundum hexagonal close-packed crystal is the same as the crystal structure of the conventional Cr 2 O 3 layer, that is, a part of Cr is 1 to 5 atomic%. And a corundum type hexagonal close-packed crystal structure substituted with the above, having excellent lubricity equivalent to the lubricity provided by this, and further improving the high-temperature strength. As a surface layer of the hard coating layer, 2-10 μm The coated cermet tool formed by vapor deposition with an average layer thickness does not cause chips to adhere to the cutting edge even in high-speed cutting with high heat generation of the above-mentioned highly viscous difficult-to-cut materials. No wear is generated, and the high temperature strength provided further maintains the state in which the progress of wear is remarkably suppressed, so that excellent wear resistance can be exhibited over a long period of time.
（ｃ）上記（ａ）の従来Ｃｒ２Ｏ３層と上記（ｂ）の改質（Ｃｒ，Ｚｒ）2Ｏ3層について、
電界放出型走査電子顕微鏡を用い、図２（ａ），（ｂ）に概略説明図で例示される通り、表面研磨面の測定範囲内に存在する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角［図２(ａ)には前記結晶面の傾斜角が０度の場合、同（ｂ）には傾斜角が４５度の場合を示しているが、これらの角度を含めて前記結晶粒個々のすべての傾斜角］を測定し、この場合前記結晶粒は、上記の通り格子点にＣｒとＺｒと酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現し、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を示す構成原子共有格子点分布グラフを作成した場合（この場合前記の結果から、Σ５、Σ９、Σ１５、Σ２５、およびΣ２７の構成原子共有格子点形態は存在しないことになる）、上記従来Ｃｒ2Ｏ3層は、図５に例示される通り、Σ３の分布割合が３０％以下の相対的に低い構成原子共有格子点分布グラフを示すのに対して、前記改質（Ｃｒ，Ｚｒ）2Ｏ3層は、図４に例示される通り、Σ３の分布割合が６０％以上のきわめて高い構成原子共有格子点分布グラフを示し、この高いΣ３の分布割合は、前記（Ｃｒ，Ｚｒ）2Ｏ3層の形成条件を変化させることにより変化すること。
なお、上記の改質（Ｃｒ，Ｚｒ）2Ｏ3層および従来Ｃｒ2Ｏ3層において、相互に隣接する結晶粒の界面における構成原子共有格子点形態のうちのΣ３、Σ７、およびΣ１１の単位形態を模式図で例示すると図３（ａ）〜（ｃ）に示される通りとなる。
以上（ａ）〜（ｃ）に示される研究結果を得たのである。
(C) For the conventional Cr 2 O 3 layer of (a) and the modified (Cr, Zr) 2 O 3 layer of (b),
Using a field emission scanning electron microscope, as illustrated in the schematic explanatory diagrams in FIGS. 2A and 2B, each crystal grain existing within the measurement range of the surface polished surface is irradiated with an electron beam, The tilt angle formed by the normal lines of the (0001) plane and the (10-10) plane, which are the crystal planes of the crystal grains, with respect to the normal line of the polished surface [FIG. 2 (a) shows the tilt angle of the crystal plane. (B) shows the case where the inclination angle is 45 degrees, all the inclination angles of the individual crystal grains including these angles are measured. In this case, the crystal grains Has a crystal structure of a corundum type hexagonal close-packed crystal in which constituent atoms composed of Cr, Zr, and oxygen are present at lattice points as described above, and are adjacent to each other based on the measured tilt angle obtained as a result. At each grain interface, each of the constituent atoms shares one constituent atom between the grains. The distribution of lattice points (constituent atom shared lattice points) is calculated, and N lattice points that do not share constituent atoms between the constituent atom shared lattice points (where N is 2 or more on the crystal structure of the corundum hexagonal close-packed crystal) Even if the upper limit of N is 28 from the point of distribution frequency, the even number of 4, 8, 14, 24, and 26 does not exist), and the existing constituent atomic shared lattice point form is expressed as ΣN + 1, When a constituent atom shared lattice point distribution graph showing the distribution ratio of each ΣN + 1 to the entire ΣN + 1 is created (in this case, there are constituent atomic shared lattice point forms of Σ5, Σ9, Σ15, Σ25, and Σ27) In contrast to the conventional Cr 2 O 3 layer, as shown in FIG. 5, the distribution ratio of Σ3 shows a relatively low constituent atom shared lattice point distribution graph of 30% or less, Modification (Cr, Zr) As shown in FIG. 4, the 2 O 3 layer shows a very high constituent atom shared lattice point distribution graph in which the distribution ratio of Σ3 is 60% or more, and this high Σ3 distribution ratio is the above (Cr, Zr) 2. Changing by changing the formation conditions of the O 3 layer.
In the modified (Cr, Zr) 2 O 3 layer and the conventional Cr 2 O 3 layer, units of Σ3, Σ7, and Σ11 among constituent atomic shared lattice point forms at the interface between adjacent crystal grains When the form is illustrated by a schematic diagram, it is as shown in FIGS.
The research results shown in (a) to (c) above were obtained.
この発明は、上記の研究結果に基づいてなされたものであって、ＷＣ基超硬合金またはＴｉＣＮ基サーメットで構成された工具基体の表面に、
（ａ）下部層として、ＴｉＣ層、ＴｉＮ層、ＴｉＣＮ層、ＴｉＣＯ層、およびＴｉＣＮＯ層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、１〜１５μｍの平均層厚を有するα型Ａｌ2Ｏ3層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる、被覆サーメット工具において、
上記硬質被覆層の表面層として、２〜１０μｍの平均層厚を有し、かつＣｒの一部をＣｒとの合量に占める割合で１〜５原子％のＺｒで置換含有してなると共に、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角を測定し、この場合前記結晶粒は、格子点にＣｒとＺｒと酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現した場合、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を示す構成原子共有格子点分布グラフにおいて、Σ３に最高ピークが存在し、かつ前記Σ３のΣＮ＋１全体に占める分布割合が６０％以上である構成原子共有格子点分布グラフを示す改質（Ｃｒ，Ｚｒ）2Ｏ3層、
を蒸着形成してなる、難削材の高速切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する被覆サーメット工具に特徴を有するものである。
The present invention has been made based on the above research results, and on the surface of a tool base composed of a WC-based cemented carbide or TiCN-based cermet,
(A) As a lower layer, a Ti compound layer composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer and having an overall average layer thickness of 3 to 20 μm,
(B) an α-type Al 2 O 3 layer having an average layer thickness of 1 to 15 μm as an upper layer;
In a coated cermet tool formed by vapor-depositing a hard coating layer composed of (a) and (b) above,
As the surface layer of the hard coating layer, it has an average layer thickness of 2 to 10 μm, and a part of Cr is substituted with 1 to 5 atomic% of Zr in a proportion of the total amount with Cr, Using a field emission scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the crystal grain is compared with the normal line of the surface polishing surface. The tilt angles formed by the normal lines of the (0001) plane and the (10-10) plane, which are crystal planes of the above, are measured. In this case, the crystal grains have constituent atoms composed of Cr, Zr, and oxygen at lattice points, respectively. Corundum-type hexagonal close-packed crystal structure, and based on the measured tilt angle obtained as a result, each of the constituent atoms forms one structure between the crystal grains at the interface between adjacent crystal grains. Distribution of lattice points that share atoms (constituent atom shared lattice points) The number of lattice points that do not share constituent atoms between the constituent atomic shared lattice points is calculated (where N is an even number of 2 or more on the crystal structure of the corundum hexagonal close-packed crystal, but N When the upper limit of 28 is 28, the even number of 4, 8, 14, 24, and 26 does not exist.) When the existing constituent atom shared lattice point form is expressed as ΣN + 1, the distribution ratio of each ΣN + 1 to the entire ΣN + 1 Is a modified (Cr, Zr) showing a constituent atom sharing lattice distribution graph in which the highest peak exists in Σ3 and the distribution ratio of Σ3 to the entire ΣN + 1 is 60% or more. ) 2 O 3 layer,
It is characterized by a coated cermet tool that exhibits excellent chipping resistance with a hard coating layer by high-speed cutting of difficult-to-cut materials.
以下に、この発明の被覆サーメット工具の硬質被覆層の構成層において、上記の通りに数値限定した理由を説明する。
（ａ）下部層のＴｉ化合物層
Ｔｉ化合物層は、α型Ａｌ2Ｏ3層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層の高温強度向上に寄与するほか、工具基体とα型Ａｌ2Ｏ3層のいずれにも強固に密着し、よって硬質被覆層の工具基体に対する密着性を向上させる作用を有するが、その平均層厚が３μｍ未満では、前記作用を十分に発揮させることができず、一方その平均層厚が２０μｍを越えると、特に高熱発生を伴なう高速切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、その平均層厚を３〜２０μｍと定めた。
Hereinafter, the reason why the constituent layers of the hard coating layer of the coated cermet tool of the present invention are numerically limited as described above will be described.
(A) Ti compound layer of the lower layer The Ti compound layer exists as a lower layer of the α-type Al 2 O 3 layer, and contributes to improving the high temperature strength of the hard coating layer by its excellent high temperature strength. The substrate and the α-type Al 2 O 3 layer are firmly adhered to each other, thereby improving the adhesion of the hard coating layer to the tool substrate. However, when the average layer thickness is less than 3 μm, the above-described operation is sufficiently achieved. On the other hand, if the average layer thickness exceeds 20 μm, it becomes easy to cause thermoplastic deformation especially in high-speed cutting with high heat generation, which causes uneven wear. Was determined to be 3 to 20 μm.
（ｂ）上部層のα型Ａｌ2Ｏ3層
α型Ａｌ2Ｏ3層は、Ａｌ2Ｏ3自体のもつすぐれた高温硬さと耐熱性によって、硬質被覆層の耐摩耗性向上に寄与するが、その平均層厚が１μｍ未満では、所望のすぐれた耐摩耗性を十分に発揮させることができず、一方その平均層厚が１５μｍを越えて厚くなりすぎると、チッピングが発生し易くなることから、その平均層厚を１〜１５μｍと定めた。
(B) an upper layer α type the Al 2 O 3 layer α type the Al 2 O 3 layer of, by Al 2 O 3 hot hardness excellent with itself and heat resistance and contributes to improvement in wear resistance of the hard coating layer If the average layer thickness is less than 1 μm, the desired excellent wear resistance cannot be fully exhibited. On the other hand, if the average layer thickness exceeds 15 μm, chipping is likely to occur. The average layer thickness was determined to be 1 to 15 μm.
（ｃ）表面層の改質（Ｃｒ，Ｚｒ）2Ｏ3層
改質（Ｃｒ，Ｚｒ）2Ｏ3層は、上記の通り、その形成条件の反応ガスにおけるＺｒＣｌ４の配合割合を０．１５〜０．３５容量％に調整することによりＺｒの置換含有割合を１〜５原子％とし、このようにＺｒを１〜５原子％の割合で置換含有した場合に、構成原子共有格子点分布グラフにおけるΣ３の分布割合が６０％以上となるものである。したがって、Ｚｒの置換含有割合が１原子％未満でも、また５原子％を越えてもΣ３の分布割合が６０％未満となってしまい、特に粘性の高い難削材の高速切削加工で、摩耗進行を抑制し、長期に亘って潤滑性を保持するに十分な高温強度を確保することができず、この結果比較的早期に摩滅し、硬質被覆層にチッピングが発生し、これが原因で使用寿命に至るようになることから、Ｚｒの置換含有割合を１〜５原子％と定めて、Σ３の分布割合が６０％以上となるようにしたものである。また、その平均層厚が２μｍ未満では、所望のすぐれた潤滑性を十分に発揮させることができず、一方その平均層厚が１０μｍを越えて厚くなりすぎると、チッピング発生の原因となることから、その平均層厚を２〜１０μｍと定めた。
(C) Surface layer modification (Cr, Zr) 2 O 3 layer As described above, the modification (Cr, Zr) 2 O 3 layer has a ZrCl 4 content ratio of 0.15 in the reaction gas under the formation conditions. When the Zr substitution content is adjusted to 1 to 5 atom% by adjusting to 0.35% by volume, and Zr is substituted and contained at a rate of 1 to 5 atom% in this way, the constituent atom shared lattice point distribution graph In this case, the distribution ratio of Σ3 is 60% or more. Therefore, even if the substitutional content of Zr is less than 1 atomic% or exceeds 5 atomic%, the distribution ratio of Σ3 becomes less than 60%, and wear progresses particularly in high-speed cutting of highly difficult-to-cut materials. It is not possible to secure sufficient high-temperature strength to maintain lubricity over a long period of time, and as a result, it wears out relatively early and chipping occurs in the hard coating layer, which results in a service life. Therefore, the substitution content ratio of Zr is set to 1 to 5 atomic%, and the distribution ratio of Σ3 is set to 60% or more. Further, if the average layer thickness is less than 2 μm, the desired excellent lubricity cannot be sufficiently exhibited. On the other hand, if the average layer thickness exceeds 10 μm, it may cause chipping. The average layer thickness was determined to be 2 to 10 μm.
なお、切削工具の使用前後の識別を目的として、黄金色の色調を有するＴｉＮ層を、必要に応じて硬質被覆層の最表面層として蒸着形成してもよいが、この場合の平均層厚は０．１〜１μｍでよく、これは０．１μｍ未満では、十分な識別効果が得られず、一方前記ＴｉＮ層による前記識別効果は１μｍまでの平均層厚で十分であるという理由からである。 In addition, for the purpose of identification before and after the use of the cutting tool, a TiN layer having a golden color tone may be vapor-deposited as the outermost surface layer of the hard coating layer as necessary, but the average layer thickness in this case is It may be 0.1 to 1 μm, and if the thickness is less than 0.1 μm, a sufficient discrimination effect cannot be obtained, while the discrimination effect by the TiN layer is sufficient for an average layer thickness of up to 1 μm.
この発明被覆サーメット工具は、特に軟鋼やステンレス鋼、さらに高マンガン鋼などの粘性の高い難削材の高い発熱を伴う高速切削加工に用いた場合にも、硬質被覆層の表面層を構成する改質（Ｃｒ，Ｚｒ）2Ｏ3層が従来Ｃｒ2Ｏ3層と同等のすぐれた潤滑性に加えて、一段とすぐれた高温強度を具備することから、長期に亘ってすぐれた潤滑性を保持し、硬質被覆層の耐チッピング性向上に寄与し、使用寿命の一層の延命化を可能とするものである。 The coated cermet tool of the present invention is a modified material that constitutes the surface layer of a hard coating layer even when used for high-speed cutting with high heat generation of difficult-to-cut materials with high viscosity such as mild steel, stainless steel, and high manganese steel. The quality (Cr, Zr) 2 O 3 layer has excellent lubricity equivalent to that of the conventional Cr 2 O 3 layer, as well as excellent high-temperature strength. This contributes to the improvement of chipping resistance of the hard coating layer, and can further extend the service life.
つぎに、この発明の被覆サーメット工具を実施例により具体的に説明する。 Next, the coated cermet tool of the present invention will be specifically described with reference to examples.
原料粉末として、いずれも１〜３μｍの平均粒径を有するＷＣ粉末、ＴｉＣ粉末、ＺｒＣ粉末、ＶＣ粉末、ＴａＣ粉末、ＮｂＣ粉末、Ｃｒ3Ｃ2粉末、ＴｉＮ粉末、ＴａＮ粉末、およびＣｏ粉末を用意し、これら原料粉末を、表１に示される配合組成に配合し、さらにワックスを加えてアセトン中で３２時間ボールミル混合し、減圧乾燥した後、９８ＭＰａの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を５Ｐａの真空中、１３７０〜１４７０℃の範囲内の所定の温度に１時間保持の条件で真空焼結し、焼結後、切刃部にＲ：０．０３ｍｍのホーニング加工を施すことによりＩＳＯ・ＣＮＭＧ１２０４１２に規定するスローアウエイチップ形状をもったＷＣ基超硬合金製の工具基体Ａ〜Ｆをそれぞれ製造した。 WC powder, TiC powder, ZrC powder, VC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder, TaN powder, and Co powder all having an average particle diameter of 1 to 3 μm are prepared as raw material powders. These raw material powders are blended into the blending composition shown in Table 1, added with wax, ball milled in acetone for 32 hours, dried under reduced pressure, and pressed into a green compact of a predetermined shape at a pressure of 98 MPa. Then, this green compact was vacuum sintered in a vacuum of 5 Pa at a predetermined temperature within a range of 1370 to 1470 ° C. for 1 hour, and after sintering, the cutting edge portion was R: 0.03 mm honing By performing the processing, tool bases A to F made of a WC-base cemented carbide having a throwaway tip shape defined in ISO · CNMG12041 were manufactured.
また、原料粉末として、いずれも０．５〜２μｍの平均粒径を有するＴｉＣＮ（質量比で、ＴｉＣ／ＴｉＮ＝５０／５０）粉末、Ｍｏ2Ｃ粉末、ＺｒＣ粉末、ＮｂＣ粉末、ＴａＣ粉末、ＷＣ粉末、Ｃｏ粉末、およびＮｉ粉末を用意し、これら原料粉末を、表２に示される配合組成に配合し、ボールミルで３２時間湿式混合し、乾燥した後、９８ＭＰａの圧力で圧粉体にプレス成形し、この圧粉体を１．３ｋＰａの窒素雰囲気中、温度：１５４０℃に１時間保持の条件で焼結し、焼結後、切刃部分にＲ：０．０３ｍｍのホーニング加工を施すことによりＩＳＯ規格・ＣＮＭＧ１２０４１２のチップ形状をもったＴｉＣＮ基サーメット製の工具基体ａ〜ｆを形成した。 Further, as raw material powders, TiCN (mass ratio, TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC, all having an average particle diameter of 0.5 to 2 μm. Prepare powder, Co powder, and Ni powder, blend these raw material powders into the composition shown in Table 2, wet mix for 32 hours with a ball mill, dry, and press-mold into green compact at 98 MPa pressure The green compact is sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after the sintering, the cutting edge portion is subjected to a honing process of R: 0.03 mm. Tool bases a to f made of TiCN-based cermet having a chip shape conforming to ISO standards / CNMG 120212 were formed.
ついで、これらの工具基体Ａ〜Ｆおよび工具基体ａ〜ｆのそれぞれを、通常の化学蒸着装置に装入し、まず、表３（表３中のｌ−ＴｉＣＮは特開平６−８０１０号公報に記載される縦長成長結晶組織をもつＴｉＣＮ層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである）に示される条件にて、それぞれ表６に示される目標層厚のＴｉ化合物層とα型Ａｌ2Ｏ3層を、同じく表６に示される組み合わせで、硬質被覆層の下部層および上部層として蒸着形成し、ついで、表４に示される条件で、表６に示される目標層厚の改質（Ｃｒ，Ｚｒ）2Ｏ3層を同じく表６に示される組み合わせで、硬質被覆層の表面層として蒸着形成することにより本発明被覆サーメット工具１〜１３をそれぞれ製造した。 Next, each of the tool bases A to F and the tool bases a to f was charged into a normal chemical vapor deposition apparatus. First, Table 3 (l-TiCN in Table 3 is disclosed in JP-A-6-8010). Table 6 shows the conditions for forming a TiCN layer having a vertically elongated crystal structure, and the other conditions for forming a normal granular crystal structure. A Ti compound layer having a target layer thickness and an α-type Al 2 O 3 layer are formed by vapor deposition as the lower layer and the upper layer of the hard coating layer in the same combination shown in Table 6, and then, under the conditions shown in Table 4, The coated cermet tools 1 to 13 of the present invention are formed by vapor-depositing the target layer thickness modification (Cr, Zr) 2 O 3 layer shown in Table 6 as the surface layer of the hard coating layer in the same combination shown in Table 6. Were manufactured respectively.
また、比較の目的で、改質（Ｃｒ，Ｚｒ）2Ｏ3層に代って、表５に示される条件で、表７に示される目標層厚の従来Ｃｒ2Ｏ3層を同じく表７に示される組み合わせで、硬質被覆層の表面層として蒸着形成する以外は同一の条件で比較被覆サーメット工具１〜１３をそれぞれ製造した。 For the purpose of comparison, instead of the modified (Cr, Zr) 2 O 3 layer, the conventional Cr 2 O 3 layer having the target layer thickness shown in Table 7 under the conditions shown in Table 5 is also used. Comparative coating cermet tools 1 to 13 were produced under the same conditions except that the surface layer of the hard coating layer was formed by vapor deposition.
ついで、上記の本発明被覆サーメット工具および比較被覆サーメット工具の硬質被覆層の表面層を構成する改質（Ｃｒ，Ｚｒ）2Ｏ3層および従来Ｃｒ2Ｏ3層について、電界放出型走査電子顕微鏡を用いて、構成原子共有格子点分布グラフをそれぞれ作成した。
すなわち、上記構成原子共有格子点分布グラフは、上記の改質（Ｃｒ，Ｚｒ）2Ｏ3層および従来Ｃｒ2Ｏ3層の表面を研磨面とした状態で、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記表面研磨面に７０度の入射角度で１５ｋＶの加速電圧の電子線を１ｎＡの照射電流で、前記表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に照射して、電子後方散乱回折像装置を用い、３０×５０μｍの領域を０．１μｍ／ｓｔｅｐの間隔で、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角を測定し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現した場合、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を求めることにより作成した。
The modified (Cr, Zr) 2 O 3 layer and the conventional Cr 2 O 3 layer constituting the surface layer of the hard coating layer of the above-described coated cermet tool of the present invention and comparative coated cermet tool are then subjected to a field emission scanning electron microscope. Was used to create the constituent atom shared lattice point distribution graphs.
That is, the constituent atomic shared lattice point distribution graph shows a mirror of a field emission scanning electron microscope in a state where the surfaces of the modified (Cr, Zr) 2 O 3 layer and the conventional Cr 2 O 3 layer are polished surfaces. A crystal grain having a hexagonal crystal lattice that is set in a cylinder and exists in the measurement range of the surface polished surface with an electron beam having an acceleration voltage of 15 kV and an irradiation current of 1 nA at an incident angle of 70 degrees on the surface polished surface Individually irradiated, using an electron backscatter diffraction image apparatus, a 30 × 50 μm region at a spacing of 0.1 μm / step is the crystal plane of the crystal grain with respect to the normal of the polished surface ( The tilt angle formed by the normal lines of the (0001) plane and the (10-10) plane is measured, and based on the measured tilt angle obtained as a result, each of the constituent atoms is Cases that share one constituent atom between grains The distribution of points (constituent atom shared lattice points) is calculated, and there are N lattice points that do not share constituent atoms between the constituent atom shared lattice points (where N is two or more on the crystal structure of the corundum hexagonal close-packed crystal) (Even if the upper limit of N is 28 from the point of distribution frequency, the even number of 4, 8, 14, 24, and 26 does not exist) When the existing constituent atom shared lattice point form is expressed as ΣN + 1 Each ΣN + 1 was created by calculating the distribution ratio of the entire ΣN + 1.
この結果得られた各種の改質（Ｃｒ，Ｚｒ）2Ｏ3層および従来Ｃｒ2Ｏ3層の構成原子共有格子点分布グラフにおいて、ΣＮ＋１全体（上記の結果からΣ３、Σ７、Σ１１、Σ１３、Σ１７、Σ１９、Σ２１、Σ２３、およびΣ２９のそれぞれの分布割合の合計）に占めるΣ３の分布割合をそれぞれ表６，７にそれぞれ示した。 As a result, in the constituent atomic share lattice point distribution graphs of various modified (Cr, Zr) 2 O 3 layers and conventional Cr 2 O 3 layers obtained as a result, the entire ΣN + 1 (from the above results, Σ3, Σ7, Σ11, Σ13, The distribution ratios of Σ3 in the total distribution ratios of Σ17, Σ19, Σ21, Σ23, and Σ29) are shown in Tables 6 and 7, respectively.
上記の各種の改質（Ｃｒ，Ｚｒ）2Ｏ3層および従来Ｃｒ2Ｏ3層の構成原子共有格子点分布グラフにおいて、表６，７にそれぞれ示される通り、本発明被覆サーメット工具の改質（Ｃｒ，Ｚｒ）2Ｏ3層は、いずれもΣ３の占める分布割合が６０％以上の構成原子共有格子点分布グラフを示すのに対して、比較被覆サーメット工具の従来Ｃｒ2Ｏ3層は、いずれもΣ３の分布割合が３０％以下の構成原子共有格子点分布グラフを示すものであった。
なお、図４は、本発明被覆サーメット工具２の硬質被覆層の表面層である改質（Ｃｒ，Ｚｒ）2Ｏ3層の構成原子共有格子点分布グラフ、図５は、比較被覆サーメット工具２の硬質被覆層の表面層である従来Ｃｒ2Ｏ3層の構成原子共有格子点分布グラフをそれぞれ示すものである。
In the above-described various modified (Cr, Zr) 2 O 3 layers and conventional Cr 2 O 3 layer constituting atom sharing lattice point distribution graphs, as shown in Tables 6 and 7, the coated cermet tools of the present invention were modified. The (Cr, Zr) 2 O 3 layer shows a constituent atomic shared lattice point distribution graph in which the distribution ratio of Σ3 is 60% or more, whereas the conventional Cr 2 O 3 layer of the comparative coated cermet tool is In either case, the distribution graph of constituent atom shared lattice points with a Σ3 distribution ratio of 30% or less was shown.
FIG. 4 is a graph showing the distribution of constituent atomic shared lattice points of the modified (Cr, Zr) 2 O 3 layer, which is the surface layer of the hard coating layer of the
さらに、上記の本発明被覆サーメット工具１〜１３および比較被覆サーメット工具１〜１３について、これの硬質被覆層の構成層を電子線マイクロアナライザー（ＥＰＭＡ）およびオージェ分光分析装置を用いて観察（層の縦断面を観察）したところ、前者および後者とも目標組成と実質的に同じ組成を有することが確認され、また、これらの被覆サーメット工具の硬質被覆層の構成層の厚さを、走査型電子顕微鏡を用いて測定（同じく縦断面測定）したところ、いずれも目標層厚と実質的に同じ平均層厚（５点測定の平均値）を示した。 Further, for the above-described coated cermet tools 1 to 13 and comparative coated cermet tools 1 to 13, the constituent layers of the hard coating layer were observed using an electron beam microanalyzer (EPMA) and an Auger spectroscopic analyzer (layer When the longitudinal section was observed), it was confirmed that both the former and the latter had substantially the same composition as the target composition, and the thicknesses of the constituent layers of the hard coating layers of these coated cermet tools were measured using a scanning electron microscope. When measured using (same longitudinal section measurement), all showed an average layer thickness (average value of 5-point measurement) substantially the same as the target layer thickness.
つぎに、上記の本発明被覆サーメット工具１〜１３および比較被覆サーメット工具１〜１３各種の被覆サーメット工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材：ＪＩＳ・ＳＳ５４０の丸棒、
切削速度：４８０ｍ／ｍｉｎ、
切り込み：３ｍｍ、
送り：０．３ｍｍ／ｒｅｖ、
切削時間：８分、
の条件（切削条件Ａという）での軟鋼の乾式連続高速切削試験（通常の切削速度は２４０ｍ／ｍｉｎ）、
被削材：ＪＩＳ・ＳＵＳ４２０Ｆの長さ方向等間隔４本縦溝入丸棒、
切削速度：２６０ｍ／ｍｉｎ、
切り込み：２．５ｍｍ、
送り：０．２５ｍｍ／ｒｅｖ、
切削時間：８分、
の条件（切削条件Ｂという）でのステンレス鋼の乾式断続高速切削試験（通常の切削速度は１４０ｍ／ｍｉｎ）、さらに、
被削材：ＪＩＳ・ＳＭｎ４４３の長さ方向等間隔４本縦溝入丸棒、
切削速度：３７０ｍ／ｍｉｎ、
切り込み：２ｍｍ、
送り：０．３５ｍｍ／ｒｅｖ、
切削時間：８分、
の条件（切削条件Ｃという）での高マンガン鋼の乾式断続高速切削試験（通常の切削速度は２１０ｍ／ｍｉｎ）を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。この測定結果を表８に示した。
Next, for the above-mentioned various coated cermet tools of the present invention coated cermet tool 1-13 and comparative coated cermet tool 1-13, all are screwed with a fixing jig to the tip of the tool steel tool,
Work material: JIS / SS540 round bar,
Cutting speed: 480 m / min,
Incision: 3mm,
Feed: 0.3mm / rev,
Cutting time: 8 minutes
Dry continuous high-speed cutting test (normal cutting speed is 240 m / min) of mild steel under the following conditions (referred to as cutting conditions A),
Work material: JIS / SUS420F lengthwise equidistant four round grooved round bars,
Cutting speed: 260 m / min,
Incision: 2.5mm,
Feed: 0.25mm / rev,
Cutting time: 8 minutes
In a dry interrupted high-speed cutting test (normal cutting speed is 140 m / min) of stainless steel under the conditions (referred to as cutting condition B),
Work material: JIS · SMn443 lengthwise equally spaced 4 bars with round grooves,
Cutting speed: 370 m / min,
Cutting depth: 2mm,
Feed: 0.35mm / rev,
Cutting time: 8 minutes
A dry intermittent high-speed cutting test (normal cutting speed is 210 m / min) of high manganese steel under the above conditions (referred to as cutting condition C), and the flank wear width of the cutting edge was measured in any cutting test. The measurement results are shown in Table 8.
表６〜８に示される結果から、本発明被覆サーメット工具１〜１３は、いずれも硬質被覆層の表面層が、Σ３の分布割合が６０％以上の構成原子共有格子点分布グラフを示す改質（Ｃｒ，Ｚｒ）2Ｏ3層で構成され、前記改質（Ｃｒ，Ｚｒ）2Ｏ3層は、すぐれた潤滑性と高温強度を有することから、上記の粘性の高い難削材の高い高熱発生を伴う高速切削加工でも、切刃部に切粉が溶着しないすぐれた潤滑性が長期に亘って持続され、この結果硬質被覆層のチッピング発生が防止され、長期に亘ってすぐれた耐摩耗性を発揮するのに対して、硬質被覆層の表面層が、Σ３の分布割合が３０％以下の構成原子共有格子点分布グラフを示す従来Ｃｒ2Ｏ3層で構成された比較被覆サーメット工具１〜１３においては、いずれも上記の高速切削加工では、表面層の従来Ｃｒ2Ｏ3層が、潤滑性を有するものの、高温強度不足が原因で、早期に摩滅し、前記従来Ｃｒ2Ｏ3層の存在しない状態で切削加工が行なわれるようになるので、切削加工開始後、短時間で硬質被覆層にチッピングが発生し、これが原因で使用寿命に至ることが明らかである。 From the results shown in Tables 6 to 8, the coated cermet tools 1 to 13 of the present invention are all modified so that the surface layer of the hard coating layer shows a constituent atom shared lattice point distribution graph in which the distribution ratio of Σ3 is 60% or more. It is composed of (Cr, Zr) 2 O 3 layer, and the modified (Cr, Zr) 2 O 3 layer has excellent lubricity and high-temperature strength. Even in high-speed machining with generation, excellent lubricity that prevents chips from welding to the cutting edge is maintained for a long period of time, and as a result, chipping of the hard coating layer is prevented, and excellent wear resistance is achieved over a long period of time. In contrast, the surface layer of the hard coating layer is a comparative coated cermet tool 1 to 1 composed of a conventional Cr 2 O 3 layer showing a constituent atomic shared lattice point distribution graph in which the distribution ratio of Σ3 is 30% or less. 13 is the above high-speed cutting process. Although the conventional Cr 2 O 3 layer of the surface layer has lubricity, it is worn out early due to insufficient high-temperature strength, and cutting is performed in the absence of the conventional Cr 2 O 3 layer. Therefore, it is clear that chipping occurs in the hard coating layer in a short time after the start of cutting, which leads to the service life.
上述のように、この発明の被覆サーメット工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、特に粘性の高い難削材の高い高熱発生を伴う高速切削加工でも、すぐれた耐チッピング性を示し、長期に亘ってすぐれた耐摩耗性を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。 As described above, the coated cermet tool of the present invention is not only continuous cutting and intermittent cutting under normal conditions such as various steels and cast irons, but particularly high-speed cutting with high heat generation of highly viscous difficult-to-cut materials. However, since it exhibits excellent chipping resistance and excellent wear resistance over a long period of time, it is fully satisfied with high performance of cutting equipment, labor saving and energy saving of cutting work, and further cost reduction It can cope with.
Claims (1)
（ａ）下部層として、炭化チタン層、窒化チタン層、炭窒化チタン層、炭酸化チタン層、および炭窒酸化チタン層のうちの１層または２層以上からなり、かつ３〜２０μｍの全体平均層厚を有するＴｉ化合物層、
（ｂ）上部層として、１〜１５μｍの平均層厚を有し、かつ化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム層、
以上（ａ）および（ｂ）で構成された硬質被覆層を蒸着形成してなる、表面被覆サーメット製切削工具において、
上記硬質被覆層の表面層として、２〜１０μｍの平均層厚を有し、かつＣｒの一部をＣｒとの合量に占める割合で１〜５原子％のＺｒで置換含有してなると共に、電界放出型走査電子顕微鏡を用い、表面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射して、前記表面研磨面の法線に対して、前記結晶粒の結晶面である（０００１）面および（１０-１０）面の法線がなす傾斜角を測定し、この場合前記結晶粒は、格子点にＣｒとＺｒと酸素からなる構成原子がそれぞれ存在するコランダム型六方最密晶の結晶構造を有し、この結果得られた測定傾斜角に基づいて、相互に隣接する結晶粒の界面で、前記構成原子のそれぞれが前記結晶粒相互間で１つの構成原子を共有する格子点（構成原子共有格子点）の分布を算出し、前記構成原子共有格子点間に構成原子を共有しない格子点がＮ個（ただし、Ｎはコランダム型六方最密晶の結晶構造上２以上の偶数となるが、分布頻度の点からＮの上限を２８とした場合、４、８、１４、２４、および２６の偶数は存在せず）存在する構成原子共有格子点形態をΣＮ＋１で現した場合、個々のΣＮ＋１がΣＮ＋１全体に占める分布割合を示す構成原子共有格子点分布グラフにおいて、Σ３に最高ピークが存在し、かつ前記Σ３のΣＮ＋１全体に占める分布割合が６０％以上である構成原子共有格子点分布グラフを示すＺｒ含有改質Ｃｒ系酸化物層、
を蒸着形成してなる、難削材の高速切削加工で硬質被覆層がすぐれた耐チッピング性を発揮する表面被覆サーメット製切削工具。 On the surface of the tool base composed of tungsten carbide based cemented carbide or titanium carbonitride based cermet,
(A) As a lower layer, it consists of one or more of a titanium carbide layer, a titanium nitride layer, a titanium carbonitride layer, a titanium carbonate layer, and a titanium carbonitride oxide layer, and an overall average of 3 to 20 μm A Ti compound layer having a layer thickness,
(B) As an upper layer, an aluminum oxide layer having an average layer thickness of 1 to 15 μm and having an α-type crystal structure in a state of chemical vapor deposition,
In the surface-coated cermet cutting tool formed by vapor-depositing the hard coating layer composed of (a) and (b) above,
As the surface layer of the hard coating layer, it has an average layer thickness of 2 to 10 μm, and a part of Cr is substituted with 1 to 5 atomic% of Zr in a proportion of the total amount with Cr, Using a field emission scanning electron microscope, each crystal grain having a hexagonal crystal lattice existing within the measurement range of the surface polishing surface is irradiated with an electron beam, and the crystal grain is compared with the normal line of the surface polishing surface. The tilt angles formed by the normal lines of the (0001) plane and the (10-10) plane, which are crystal planes of the above, are measured. In this case, the crystal grains have constituent atoms composed of Cr, Zr, and oxygen at lattice points, respectively. Corundum-type hexagonal close-packed crystal structure, and based on the measured tilt angle obtained as a result, each of the constituent atoms forms one structure between the crystal grains at the interface between adjacent crystal grains. Distribution of lattice points that share atoms (constituent atom shared lattice points) The number of lattice points that do not share constituent atoms between the constituent atomic shared lattice points is calculated (where N is an even number of 2 or more on the crystal structure of the corundum hexagonal close-packed crystal, but N When the upper limit of 28 is 28, the even number of 4, 8, 14, 24, and 26 does not exist.) When the existing constituent atom shared lattice point form is expressed as ΣN + 1, the distribution ratio of each ΣN + 1 to the entire ΣN + 1 A Zr-containing modified Cr system showing a constituent atom sharing lattice distribution graph in which the highest peak exists in Σ3 and the distribution ratio of the Σ3 to the entire ΣN + 1 is 60% or more Oxide layer,
A surface-coated cermet cutting tool that exhibits excellent chipping resistance due to high-speed cutting of difficult-to-cut materials.
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