JP4743864B2 - pFET中のボロン拡散係数の減少方法 - Google Patents
pFET中のボロン拡散係数の減少方法 Download PDFInfo
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- JP4743864B2 JP4743864B2 JP2005512854A JP2005512854A JP4743864B2 JP 4743864 B2 JP4743864 B2 JP 4743864B2 JP 2005512854 A JP2005512854 A JP 2005512854A JP 2005512854 A JP2005512854 A JP 2005512854A JP 4743864 B2 JP4743864 B2 JP 4743864B2
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Description
Claims (12)
- pFET及びnFETが設けられている半導体材料中に注入されたボロンの拡散速度を変化させる方法であって、
ボロンにより形成される拡張部を有するpFETにおいて、当該拡張部と接合してハロ領域を形成する工程と、
前記半導体材料の表面上に、電界効果トランジスタのゲート構造物のゲート電極によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
アニーリングする工程の前にnFET上における引張り膜を除去する工程と、
前記拡張部のボロンを活性化するために前記半導体材料をアニーリングする工程と
を含む、前記方法。 - pFET及びnFETが設けられている半導体材料中に注入されたボロンの拡散速度を変化させる方法であって、
ボロンにより形成される拡張部を有するpFETにおいて、当該拡張部と接合してハロ領域を形成する工程と、
前記半導体材料の表面上に、電界効果トランジスタのゲート構造物の側壁によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
アニーリングする工程の前にnFET上における引張り膜を除去する工程と、
前記拡張部のボロンを活性化するために前記半導体材料をアニーリングする工程と
を含む、前記方法。 - pFET及びnFETが設けられている半導体材料中に注入されたボロンの拡散速度を変化させる方法であって、
ボロンにより形成されるソース/ドレイン領域を有するpFETにおいて、当該ソース/ドレイン領域と接合してハロ領域を形成する工程と、
前記半導体材料の表面上に、電界効果トランジスタのゲート構造物のゲート電極によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
アニーリングする工程の前にnFET上における引張り膜を除去する工程と、
前記ソース/ドレイン領域のボロンを活性化するために前記半導体材料をアニーリングする工程と
を含む、前記方法。 - pFET及びnFETが設けられている半導体材料中に注入されたボロンの拡散速度を変化させる方法であって、
ボロンにより形成されるソース/ドレイン領域を有するpFETにおいて、当該ソース/ドレイン領域と接合してハロ領域を形成する工程と、
前記半導体材料の表面上に、電界効果トランジスタのゲート構造物の側壁によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
アニーリングする工程の前にnFET上における引張り膜を除去する工程と、
前記ソース/ドレイン領域のボロンを活性化するために前記半導体材料をアニーリングする工程と
を含む、前記方法。 - pFET及びnFETが設けられている半導体を形成する方法であって、
ボロンにより形成される拡張部を有するpFETにおいて、当該拡張部と接合してハロ領域を形成する工程と、
前記半導体の表面上に、電界効果トランジスタのゲート構造物のゲート電極によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
nFET上における引張り膜を除去する工程と、
前記引張り膜の除去後に、前記半導体をアニーリングする工程と
を含む、前記方法。 - pFET及びnFETが設けられている半導体を形成する方法であって、
ボロンにより形成される拡張部を有するpFETにおいて、当該拡張部と接合してハロ領域を形成する工程と、
前記半導体の表面上に、電界効果トランジスタのゲート構造物の側壁によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
nFET上における引張り膜を除去する工程と、
前記引張り膜の除去後に、前記半導体をアニーリングする工程と
を含む、前記方法。 - pFET及びnFETが設けられている半導体を形成する方法であって、
ボロンにより形成されるソース/ドレイン領域を有するpFETにおいて、当該ソース/ドレイン領域と接合してハロ領域を形成する工程と、
前記半導体の表面上に、電界効果トランジスタのゲート構造物のゲート電極によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
nFET上における引張り膜を除去する工程と、
前記引張り膜の除去後に、前記半導体をアニーリングする工程と
を含む、前記方法。 - pFET及びnFETが設けられている半導体を形成する方法であって、
ボロンにより形成されるソース/ドレイン領域を有するpFETにおいて、当該ソース/ドレイン領域と接合してハロ領域を形成する工程と、
前記半導体の表面上に、電界効果トランジスタのゲート構造物の側壁によって当該ゲート構造物の境界を定める工程と、
前記境界上に、前記ゲート構造物と前記表面との上に引張り膜をプラズマ促進化学的気相堆積(PECVD)法又は熱CVD法で堆積する工程と、
アニーリングする工程の前にnFET上における引張り膜を除去する工程と、
前記引張り膜の除去後に、前記半導体をアニーリングする工程と
を含む、前記方法。 - 前記ゲート構造物が前記半導体材料の前記表面上に複数個設けられている、請求項1〜4のいずれか一項に記載の方法。
- 前記複数個のゲート構造物は、pFETおよびnFETのゲート構造物を備えている、請求項9に記載の方法。
- 前記側壁は、オフセットスペーサである、請求項1〜8のいずれか一項に記載の方法。
- 前記側壁は、ソース/ドレインスペーサである、請求項1〜8のいずれか一項に記載の方法。
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PCT/US2003/039025 WO2005064665A1 (en) | 2003-12-08 | 2003-12-08 | REDUCTION OF BORON DIFFUSIVITY IN pFETs |
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US (1) | US7737014B2 (ja) |
EP (1) | EP1692717A4 (ja) |
JP (1) | JP4743864B2 (ja) |
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US7052946B2 (en) * | 2004-03-10 | 2006-05-30 | Taiwan Semiconductor Manufacturing Co. Ltd. | Method for selectively stressing MOSFETs to improve charge carrier mobility |
JP5114881B2 (ja) * | 2005-07-26 | 2013-01-09 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
KR20120028147A (ko) * | 2010-09-14 | 2012-03-22 | 삼성전자주식회사 | 3차원 반도체 장치의 제조 방법 |
US9202913B2 (en) * | 2010-09-30 | 2015-12-01 | Institute of Microelectronics, Chinese Academy of Sciences | Method for manufacturing semiconductor structure |
US8372705B2 (en) * | 2011-01-25 | 2013-02-12 | International Business Machines Corporation | Fabrication of CMOS transistors having differentially stressed spacers |
CN103377935B (zh) * | 2012-04-23 | 2016-08-03 | 中芯国际集成电路制造(上海)有限公司 | Mos晶体管的制造方法 |
US9911849B2 (en) * | 2015-12-03 | 2018-03-06 | International Business Machines Corporation | Transistor and method of forming same |
CN105870021A (zh) * | 2016-04-14 | 2016-08-17 | 中芯国际集成电路制造(北京)有限公司 | 金属氧化物半导体晶体管的制作方法 |
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US5525529A (en) * | 1994-11-16 | 1996-06-11 | Texas Instruments Incorporated | Method for reducing dopant diffusion |
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US5439831A (en) * | 1994-03-09 | 1995-08-08 | Siemens Aktiengesellschaft | Low junction leakage MOSFETs |
US5719424A (en) * | 1995-10-05 | 1998-02-17 | Micron Technology, Inc. | Graded LDD implant process for sub-half-micron MOS devices |
JP3545526B2 (ja) * | 1996-01-19 | 2004-07-21 | 株式会社東芝 | 半導体装置の製造方法 |
KR100527207B1 (ko) * | 1996-05-08 | 2005-11-09 | 어드밴스드 마이크로 디바이시즈, 인코포레이티드 | 도펀트 확산을 가로막도록 생성된 격자간 변화도를 이용한접합 깊이 및 채널 길이의 제어 |
JPH11150081A (ja) * | 1997-11-19 | 1999-06-02 | Toshiba Corp | 半導体装置の製造方法 |
US6548842B1 (en) * | 2000-03-31 | 2003-04-15 | National Semiconductor Corporation | Field-effect transistor for alleviating short-channel effects |
US6380044B1 (en) * | 2000-04-12 | 2002-04-30 | Ultratech Stepper, Inc. | High-speed semiconductor transistor and selective absorption process forming same |
US6882025B2 (en) * | 2003-04-25 | 2005-04-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained-channel transistor and methods of manufacture |
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US5525529A (en) * | 1994-11-16 | 1996-06-11 | Texas Instruments Incorporated | Method for reducing dopant diffusion |
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EP1692717A4 (en) | 2008-04-09 |
US20070093030A1 (en) | 2007-04-26 |
EP1692717A1 (en) | 2006-08-23 |
CN100433275C (zh) | 2008-11-12 |
AU2003296359A1 (en) | 2005-07-21 |
US7737014B2 (en) | 2010-06-15 |
JP2007524982A (ja) | 2007-08-30 |
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