JP4739684B2 - ポリマー支持体上に2つのバリア層の配置を形成するための方法 - Google Patents
ポリマー支持体上に2つのバリア層の配置を形成するための方法 Download PDFInfo
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- JP4739684B2 JP4739684B2 JP2004066095A JP2004066095A JP4739684B2 JP 4739684 B2 JP4739684 B2 JP 4739684B2 JP 2004066095 A JP2004066095 A JP 2004066095A JP 2004066095 A JP2004066095 A JP 2004066095A JP 4739684 B2 JP4739684 B2 JP 4739684B2
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- 230000004888 barrier function Effects 0.000 title claims description 86
- 238000000034 method Methods 0.000 title claims description 53
- 229920000642 polymer Polymers 0.000 title claims description 19
- 239000010410 layer Substances 0.000 claims description 143
- 239000000919 ceramic Substances 0.000 claims description 62
- 230000006911 nucleation Effects 0.000 claims description 36
- 238000010899 nucleation Methods 0.000 claims description 36
- 239000000463 material Substances 0.000 claims description 18
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 230000004048 modification Effects 0.000 claims description 10
- 238000012986 modification Methods 0.000 claims description 10
- 230000001737 promoting effect Effects 0.000 claims description 10
- 239000002346 layers by function Substances 0.000 claims description 8
- 239000000126 substance Substances 0.000 claims description 6
- 229910044991 metal oxide Inorganic materials 0.000 claims description 5
- 150000004706 metal oxides Chemical class 0.000 claims description 5
- 150000004767 nitrides Chemical class 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 5
- 229910010293 ceramic material Inorganic materials 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 4
- 239000012044 organic layer Substances 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000000992 sputter etching Methods 0.000 claims description 3
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 2
- 238000010306 acid treatment Methods 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- 238000004925 denaturation Methods 0.000 claims description 2
- 230000036425 denaturation Effects 0.000 claims description 2
- 238000009832 plasma treatment Methods 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000002356 single layer Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910004166 TaN Inorganic materials 0.000 claims 1
- 229910010413 TiO 2 Inorganic materials 0.000 claims 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
- 238000003801 milling Methods 0.000 claims 1
- 238000007639 printing Methods 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
- 238000004544 sputter deposition Methods 0.000 claims 1
- 229910052718 tin Inorganic materials 0.000 claims 1
- 230000007547 defect Effects 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 239000007800 oxidant agent Substances 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000005538 encapsulation Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 230000035699 permeability Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000002800 charge carrier Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000005728 strengthening Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005401 electroluminescence Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000010955 niobium Substances 0.000 description 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000307 polymer substrate Polymers 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/56—After-treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Laminated Bodies (AREA)
- Electroluminescent Light Sources (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Description
A)支持体上に第一のバリア層を適用する工程、
B)第一のバリア層の表面を変性してこの第一の層の表面上に新たな核形成サイトを導入する工程および
C)第一のバリア層上で新たな核形成サイトにより第二のセラミックバリア層を形成する工程
からなる、ポリマー支持体上に2つのセラミックバリア層の配置を形成するための方法により解決されることが判明した。本発明の有利な実施態様およびOLEDを形成するための方法は請求項2以降に記載されている。
Claims (20)
- 連続する次の:
A)支持体(1)上に第一のセラミックバリア層(5)を適用する工程、
B)第一のバリア層(5)の表面上に核形成促進材料を適用することにより第一のバリア層(5)の表面(5A)を変性してこの第一の層の表面上に新たな核形成サイトを導入する工程、
C)第一のバリア層(5)上に新たな核形成サイトを使用して第二のセラミックバリア層(10)を形成する工程
を含む、ポリマー支持体(1)上に2つのセラミックバリア層(5、10)の配置を形成するための方法。 - 工程B)がさらに、化学的表面変性または機械的表面変性のいずれかの変性法を含む、請求項1記載の方法。
- 工程B)が次の方法:酸処理、塩基処理、水蒸気への曝露、プラズマ処理およびオゾン処理、からなる群から選択される化学的表面変性を含む、請求項2記載の方法。
- 工程B)が機械的表面変性を含み、該変性は次の方法:イオンミリング、ナノ粉砕、レーザによる表面の溶融および熱処理、からなる群から選択される、請求項2記載の方法。
- 核形成促進材料が金属、金属窒化物および金属酸化物からなる群から選択され、その際、該材料は1原子または1分子の臨界核を有する、請求項1から4までのいずれか1項記載の方法。
- 核形成促進材料を次の材料:Ta、Cr、W、Mo、Nb、Ti、TaN、TiN、Ta2O5およびTiO2から選択する、請求項1から5までのいずれか1項記載の方法。
- 核形成促進材料が、第一のセラミックバリア層の表面上で連続相を形成しない、請求項1から6までのいずれか1項記載の方法。
- 核形成促進材料の量が、単分子層を形成するために必要とされる質量を下回る、請求項1から7までのいずれか1項記載の方法。
- 金属窒化物、金属酸化物および金属酸窒化物から選択されるセラミック材料を第一および第二のバリア層のために使用する、請求項1から8までのいずれか1項記載の方法。
- 金属をAlまたはSiから選択する、請求項1から9までのいずれか1項記載の方法。
- 工程C)において第二のバリア層(10)をCVDまたはPVDにより形成する、請求項1から10までのいずれか1項記載の方法。
- 工程A)において第一のバリア層(5)を積層、印刷、スパッタリング、噴霧、CVDまたはPVDにより適用する、請求項1から11までのいずれか1項記載の方法。
- フレキシブルで透明な支持体(1)を使用する、請求項1から12までのいずれか1項記載の方法。
- 工程C)の後で第二のバリア層上に、第三のバリア層を形成するために工程B)およびC)を繰り返すことにより、少なくとも1つの第三のバリア層を形成する、請求項1から13までのいずれか1項記載の方法。
- 工程A)およびC)において、第一のバリア層(5)および第二のバリア層(10)を1〜250nmの厚さで形成する、請求項1から14までのいずれか1項記載の方法。
- さらに有機電気デバイスを形成するための工程を含み、その際、工程C)のあとで第二のバリア層上に有機機能層を形成する、請求項1から15までのいずれか1項記載の方法。
- 有機電気デバイスが、集積プラスチック回路、フレキシブルな有機光センサ、有機太陽電池、光検出器またはOLEDである、請求項1から16までのいずれか1項記載の方法。
- さらにOLEDを形成するためのその後の:
D)工程C)の後で第二のバリア層(10)上に第一の導電層(15)を形成する工程、
E)第一の導電層(15)上に機能性有機層(20)を形成する工程、
F)機能性有機層(20)上に第二の導電層を形成する工程
を含む、請求項1から15までのいずれか1項記載の方法。 - 請求項18記載のOLEDを形成するための方法において、さらに:
G)第二の導電層(25)上に封入部(40)を形成してOLEDを封止する工程
を含む、OLEDの形成方法。 - 工程G)がさらに:
G1)第二の導電層(25)上に第四のセラミックバリア層(30)を形成する工程、
G2)引き続き第四のバリア層(30)の表面(30A)を変性してこの第四の層の表面上に新たな核形成サイトを導入する工程、
G3)第四のバリア層上に第五のセラミックバリア層(35)を形成する工程
を含む、請求項19記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03005270.8 | 2003-03-10 | ||
EP03005270A EP1466997B1 (en) | 2003-03-10 | 2003-03-10 | Method for forming and arrangement of barrier layers on a polymeric substrate |
Publications (2)
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JP2004338377A JP2004338377A (ja) | 2004-12-02 |
JP4739684B2 true JP4739684B2 (ja) | 2011-08-03 |
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JP2004066095A Expired - Lifetime JP4739684B2 (ja) | 2003-03-10 | 2004-03-09 | ポリマー支持体上に2つのバリア層の配置を形成するための方法 |
Country Status (3)
Country | Link |
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US (2) | US20040197489A1 (ja) |
EP (1) | EP1466997B1 (ja) |
JP (1) | JP4739684B2 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7807232B2 (en) * | 2006-01-18 | 2010-10-05 | Sigma Laboratories Of Arizona, Llc | Inline passivation of vacuum-deposited aluminum on web substrate |
US7535017B2 (en) | 2003-05-30 | 2009-05-19 | Osram Opto Semiconductors Gmbh | Flexible multilayer packaging material and electronic devices with the packaging material |
US20070040501A1 (en) * | 2005-08-18 | 2007-02-22 | Aitken Bruce G | Method for inhibiting oxygen and moisture degradation of a device and the resulting device |
US7722929B2 (en) | 2005-08-18 | 2010-05-25 | Corning Incorporated | Sealing technique for decreasing the time it takes to hermetically seal a device and the resulting hermetically sealed device |
US7829147B2 (en) | 2005-08-18 | 2010-11-09 | Corning Incorporated | Hermetically sealing a device without a heat treating step and the resulting hermetically sealed device |
US20080206589A1 (en) * | 2007-02-28 | 2008-08-28 | Bruce Gardiner Aitken | Low tempertature sintering using Sn2+ containing inorganic materials to hermetically seal a device |
US20080048178A1 (en) * | 2006-08-24 | 2008-02-28 | Bruce Gardiner Aitken | Tin phosphate barrier film, method, and apparatus |
US8115326B2 (en) * | 2006-11-30 | 2012-02-14 | Corning Incorporated | Flexible substrates having a thin-film barrier |
US20120028011A1 (en) * | 2010-07-27 | 2012-02-02 | Chong Pyung An | Self-passivating mechanically stable hermetic thin film |
US9940616B1 (en) | 2013-03-14 | 2018-04-10 | Square, Inc. | Verifying proximity during payment transactions |
US10192220B2 (en) | 2013-06-25 | 2019-01-29 | Square, Inc. | Integrated online and offline inventory management |
US8892462B1 (en) | 2013-10-22 | 2014-11-18 | Square, Inc. | Proxy card payment with digital receipt delivery |
US20150134439A1 (en) | 2013-11-08 | 2015-05-14 | Square, Inc. | Interactive digital receipt |
US10810682B2 (en) | 2013-12-26 | 2020-10-20 | Square, Inc. | Automatic triggering of receipt delivery |
US10198731B1 (en) | 2014-02-18 | 2019-02-05 | Square, Inc. | Performing actions based on the location of mobile device during a card swipe |
US20150254628A1 (en) | 2014-03-10 | 2015-09-10 | Square, Inc. | Quick Legend Receipt System |
US10692064B2 (en) | 2014-03-19 | 2020-06-23 | Square, Inc. | Merchant platform |
US9930793B2 (en) * | 2014-03-27 | 2018-03-27 | Intel Corporation | Electric circuit on flexible substrate |
US9569767B1 (en) | 2014-05-06 | 2017-02-14 | Square, Inc. | Fraud protection based on presence indication |
US20150332223A1 (en) | 2014-05-19 | 2015-11-19 | Square, Inc. | Transaction information collection for mobile payment experience |
US10949888B1 (en) | 2014-09-10 | 2021-03-16 | Square, Inc. | Geographically targeted, time-based promotions |
US10909563B1 (en) | 2014-10-30 | 2021-02-02 | Square, Inc. | Generation and tracking of referrals in receipts |
US10026062B1 (en) | 2015-06-04 | 2018-07-17 | Square, Inc. | Apparatuses, methods, and systems for generating interactive digital receipts |
US10929866B1 (en) | 2016-06-27 | 2021-02-23 | Square, Inc. | Frictionless entry into combined merchant loyalty program |
JP2019084715A (ja) * | 2017-11-02 | 2019-06-06 | イビデン株式会社 | 透光板 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5792550A (en) * | 1989-10-24 | 1998-08-11 | Flex Products, Inc. | Barrier film having high colorless transparency and method |
JPH0414440A (ja) * | 1990-05-07 | 1992-01-20 | Toray Ind Inc | 積層フィルム |
JP2823178B2 (ja) * | 1992-04-06 | 1998-11-11 | シャープ株式会社 | 金属配線基板及びその製造方法 |
IT1277813B1 (it) * | 1995-02-01 | 1997-11-12 | Galileo Vacuum Tec Spa | Procedimento perfezionato per la co-deposizione di ossidi metallici su un film plastico, relativo impianto e prodotto ottenuto |
JP4028047B2 (ja) * | 1997-10-07 | 2007-12-26 | 大日本印刷株式会社 | 透明バリア性ナイロンフィルム、それを使用した積層体および包装用容器 |
US6268695B1 (en) * | 1998-12-16 | 2001-07-31 | Battelle Memorial Institute | Environmental barrier material for organic light emitting device and method of making |
WO2000048749A1 (en) | 1999-02-18 | 2000-08-24 | Battelle Memorial Institute | Method for adhering laminate structures |
US6413645B1 (en) * | 2000-04-20 | 2002-07-02 | Battelle Memorial Institute | Ultrabarrier substrates |
US6291272B1 (en) * | 1999-12-23 | 2001-09-18 | International Business Machines Corporation | Structure and process for making substrate packages for high frequency application |
JP3712342B2 (ja) * | 2000-03-31 | 2005-11-02 | 大日本印刷株式会社 | 透明ガスバリアフィルム |
JP2002056773A (ja) * | 2000-08-08 | 2002-02-22 | Matsushita Electric Ind Co Ltd | プラズマディスプレイパネル用膜形成方法及びプラズマディスプレイパネル用膜形成装置 |
TW541659B (en) * | 2002-04-16 | 2003-07-11 | Macronix Int Co Ltd | Method of fabricating contact plug |
US20030203210A1 (en) * | 2002-04-30 | 2003-10-30 | Vitex Systems, Inc. | Barrier coatings and methods of making same |
US7361386B2 (en) * | 2002-07-22 | 2008-04-22 | The Regents Of The University Of California | Functional coatings for the reduction of oxygen permeation and stress and method of forming the same |
US7198820B2 (en) * | 2003-02-06 | 2007-04-03 | Planar Systems, Inc. | Deposition of carbon- and transition metal-containing thin films |
US7535017B2 (en) * | 2003-05-30 | 2009-05-19 | Osram Opto Semiconductors Gmbh | Flexible multilayer packaging material and electronic devices with the packaging material |
-
2003
- 2003-03-10 EP EP03005270A patent/EP1466997B1/en not_active Expired - Fee Related
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2004
- 2004-03-09 JP JP2004066095A patent/JP4739684B2/ja not_active Expired - Lifetime
- 2004-03-10 US US10/798,712 patent/US20040197489A1/en not_active Abandoned
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2014
- 2014-07-17 US US14/333,680 patent/US9428834B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
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EP1466997B1 (en) | 2012-02-22 |
US20140329026A1 (en) | 2014-11-06 |
EP1466997A1 (en) | 2004-10-13 |
US9428834B2 (en) | 2016-08-30 |
JP2004338377A (ja) | 2004-12-02 |
US20040197489A1 (en) | 2004-10-07 |
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