JP4704793B2 - 外観検査装置 - Google Patents

外観検査装置 Download PDF

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Publication number
JP4704793B2
JP4704793B2 JP2005109554A JP2005109554A JP4704793B2 JP 4704793 B2 JP4704793 B2 JP 4704793B2 JP 2005109554 A JP2005109554 A JP 2005109554A JP 2005109554 A JP2005109554 A JP 2005109554A JP 4704793 B2 JP4704793 B2 JP 4704793B2
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Japan
Prior art keywords
substrate
defect
unit
macro
inspection
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JP2005109554A
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Japanese (ja)
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JP2006292404A5 (enExample
JP2006292404A (ja
Inventor
順一 小野
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Olympus Corp
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Olympus Corp
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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2005109554A 2005-04-06 2005-04-06 外観検査装置 Expired - Fee Related JP4704793B2 (ja)

Priority Applications (1)

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JP2005109554A JP4704793B2 (ja) 2005-04-06 2005-04-06 外観検査装置

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JP2005109554A JP4704793B2 (ja) 2005-04-06 2005-04-06 外観検査装置

Related Child Applications (1)

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JP2011033342A Division JP2011099875A (ja) 2011-02-18 2011-02-18 外観検査装置

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JP2006292404A JP2006292404A (ja) 2006-10-26
JP2006292404A5 JP2006292404A5 (enExample) 2008-05-22
JP4704793B2 true JP4704793B2 (ja) 2011-06-22

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JP2005109554A Expired - Fee Related JP4704793B2 (ja) 2005-04-06 2005-04-06 外観検査装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103674966A (zh) * 2013-12-06 2014-03-26 深圳市大族激光科技股份有限公司 一种用于晶圆表面瑕疵检测的装置与方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4578383B2 (ja) * 2005-10-25 2010-11-10 株式会社堀場製作所 パネル部材検査装置及びそれに適用されるパネル部材検査用プログラム
IL188825A0 (en) 2008-01-16 2008-11-03 Orbotech Ltd Inspection of a substrate using multiple cameras
JP2009281836A (ja) * 2008-05-21 2009-12-03 Olympus Corp 基板観察装置、基板観察方法、制御装置、およびプログラム
CN101852744B (zh) * 2009-03-30 2012-11-21 松下电器产业株式会社 拍摄检查装置及拍摄检查方法
JP4762351B2 (ja) * 2009-03-30 2011-08-31 パナソニック株式会社 撮像検査装置および撮像検査方法
WO2012153662A1 (ja) * 2011-05-10 2012-11-15 旭硝子株式会社 透光性板状体の微小欠点の検査方法および透光性板状体の微小欠点の検査装置
CN109115778A (zh) * 2018-10-08 2019-01-01 广东北玻电子玻璃有限公司 用于显示屏玻璃标志图案视觉检测的自动化设备
CN115997118A (zh) * 2020-08-04 2023-04-21 康宁公司 用于检查材料的方法和装置

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5757246A (en) * 1980-09-25 1982-04-06 Fuji Photo Film Co Ltd Detecting and measuring apparatus for flaw
JP3537202B2 (ja) * 1994-12-19 2004-06-14 オリンパス株式会社 複数ヘッド顕微鏡装置
JP2000009661A (ja) * 1998-06-26 2000-01-14 Ntn Corp フラットパネル検査装置
JP2000275183A (ja) * 1999-03-23 2000-10-06 Olympus Optical Co Ltd 画像取込み装置
JP3333148B2 (ja) * 1999-05-31 2002-10-07 オリンパス光学工業株式会社 外観検査装置
JP3580493B2 (ja) * 2000-08-11 2004-10-20 株式会社サキコーポレーション 走査ヘッドおよびそれを利用可能な外観検査方法および装置
JP3929285B2 (ja) * 2001-11-05 2007-06-13 オリンパス株式会社 基板検査装置
TWI264532B (en) * 2001-11-05 2006-10-21 Olympus Corp Substrate inspection device
JP4294359B2 (ja) * 2003-04-08 2009-07-08 Ｈｏｙａ株式会社 グレートーンマスクの欠陥修正方法
JP2005017386A (ja) * 2003-06-23 2005-01-20 V Technology Co Ltd 平板状ワークの検査、修正装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103674966A (zh) * 2013-12-06 2014-03-26 深圳市大族激光科技股份有限公司 一种用于晶圆表面瑕疵检测的装置与方法

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JP2006292404A (ja) 2006-10-26

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