JP4703411B2 - はんだ材料 - Google Patents
はんだ材料 Download PDFInfo
- Publication number
- JP4703411B2 JP4703411B2 JP2006008550A JP2006008550A JP4703411B2 JP 4703411 B2 JP4703411 B2 JP 4703411B2 JP 2006008550 A JP2006008550 A JP 2006008550A JP 2006008550 A JP2006008550 A JP 2006008550A JP 4703411 B2 JP4703411 B2 JP 4703411B2
- Authority
- JP
- Japan
- Prior art keywords
- alloy
- solder material
- eutectic
- eutectic alloy
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/0132—Binary Alloys
- H01L2924/01322—Eutectic Alloys, i.e. obtained by a liquid transforming into two solid phases
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Die Bonding (AREA)
Description
(a)第1共晶合金と第2共晶合金との合計に占める第2共晶合金の含有量が、0.1〜1.5質量%であり、第2共晶合金が、Ge−Ni合金またはAg−Ge合金であるはんだ材料。
(i)はんだ材料の合成
基本組成となる第1共晶合金には、共晶点が385℃であるZn−Al合金(Al含有量:5質量%)を用いた。
第2共晶合金には、共晶点が775℃のGe−Ni合金(Ni含有量:28質量%)、共晶点が640℃のCu−Ge合金(Ge含有量:39質量%、参考例)、共晶点が779℃のAg−Cu合金(Cu含有量:39質量%、参考例)および共晶点が651℃のAg−Ge合金(Ge含有量:18質量%)を単独で、もしくは組み合わせて用いた。
得られた合金の液相線温度を示差走査熱量計(DSC)で調べた。結果を表1〜6に示す。表の結果より、全てのはんだ材料が385〜420℃の範囲で完全に液相になることが示された。
得られたはんだ材料を、窒素雰囲気中で、500℃以上で溶融して合金を得た。この合金から、アトマイズ法により、平均粒径20μmの粒状粉を得た。得られた粒状粉(はんだ材料)100質量部あたり、10質量部のフラックス(ロジン、活性剤および溶剤の混合物)を添加して混練を行い、クリームはんだを得た。
図1に示されるような半導体パワー部品4(IGBT)を作製した。ここで、電極フレーム1とICチップ2とを接合するはんだ材料3には、上記のクリームはんだを用いた。はんだ付けは、はんだ材料の液相線温度+20℃の温度で行った。得られた半導体パワー部品4は、図3に示すように、電極フレーム1のリード部を露出させた状態で、エポキシ樹脂からなる封止剤5で封止した。その後、所定のマザーボード6に半導体パワー部品4を実装した。
試験的に半導体パワー部品4を稼働させたところ、半導体パワー部品4の稼働時の温度は約350℃以上まで上昇し、接合部の温度は約390℃程度まで上昇した。よって、はんだ材料の再溶融による電気特性の変化を防止するためには、少なくとも385℃を超える溶融温度(液相線温度)を有するはんだ材料を用いる必要があると考えられる。
(1)静特性:○はIGBTの製品基準を満たすことを示し、×は満たさないことを示す。
(2)ICチップの裏面電極抵抗:○はIGBTの製品基準を満たすことを示し、×は満たさないことを示す。
(3)ICチップの裏面電極放熱性:○はIGBTの製品基準を満たすことを示し、×は満たさないことを示す。
2 ICチップ
3 はんだ材料
4 半導体パワー部品
5 封止剤
6 マザーボード
Claims (1)
- 第1共晶合金と、第2共晶合金からなり、
前記第1共晶合金は、Zn−Al合金からなり、
前記第2共晶合金は、Ge−Ni合金またはAg−Ge合金からなり、
前記第1共晶合金と前記第2共晶合金との合計に占める前記第2共晶合金の含有量が、0.1〜1.5質量%であり、残部が前記Zn−Al合金である、はんだ材料。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006008550A JP4703411B2 (ja) | 2006-01-17 | 2006-01-17 | はんだ材料 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006008550A JP4703411B2 (ja) | 2006-01-17 | 2006-01-17 | はんだ材料 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007190562A JP2007190562A (ja) | 2007-08-02 |
JP4703411B2 true JP4703411B2 (ja) | 2011-06-15 |
Family
ID=38446649
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006008550A Expired - Fee Related JP4703411B2 (ja) | 2006-01-17 | 2006-01-17 | はんだ材料 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4703411B2 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG161110A1 (en) * | 2008-10-15 | 2010-05-27 | Autium Pte Ltd | Solder alloy |
JP6015571B2 (ja) * | 2013-06-18 | 2016-10-26 | 住友金属鉱山株式会社 | PbフリーZn−Al系合金ヒューズ |
CN103934590B (zh) * | 2014-04-13 | 2016-08-17 | 北京工业大学 | 一种ZnAlMgIn高温无铅钎料 |
JP6383208B2 (ja) * | 2014-07-31 | 2018-08-29 | 富士電機株式会社 | 半導体装置の製造方法、接合材および接合材の形成方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5432063A (en) * | 1977-08-16 | 1979-03-09 | Asahi Glass Co Ltd | Si semiconductor solder |
JPS54107852A (en) * | 1978-02-13 | 1979-08-24 | Kunio Yagi | Brazing metal for aluminum of alloy thereof |
JPS5841692A (ja) * | 1981-09-03 | 1983-03-10 | Rihei Omi | 低温溶接ロ− |
JPH11288955A (ja) * | 1998-04-02 | 1999-10-19 | Sumitomo Metal Mining Co Ltd | 高温はんだ付用Zn合金 |
-
2006
- 2006-01-17 JP JP2006008550A patent/JP4703411B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5432063A (en) * | 1977-08-16 | 1979-03-09 | Asahi Glass Co Ltd | Si semiconductor solder |
JPS54107852A (en) * | 1978-02-13 | 1979-08-24 | Kunio Yagi | Brazing metal for aluminum of alloy thereof |
JPS5841692A (ja) * | 1981-09-03 | 1983-03-10 | Rihei Omi | 低温溶接ロ− |
JPH11288955A (ja) * | 1998-04-02 | 1999-10-19 | Sumitomo Metal Mining Co Ltd | 高温はんだ付用Zn合金 |
Also Published As
Publication number | Publication date |
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JP2007190562A (ja) | 2007-08-02 |
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