JP4702629B2 - ムービングマグネット形リニアスライダおよびそれを用いた工作機械 - Google Patents

ムービングマグネット形リニアスライダおよびそれを用いた工作機械 Download PDF

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Publication number
JP4702629B2
JP4702629B2 JP2006514426A JP2006514426A JP4702629B2 JP 4702629 B2 JP4702629 B2 JP 4702629B2 JP 2006514426 A JP2006514426 A JP 2006514426A JP 2006514426 A JP2006514426 A JP 2006514426A JP 4702629 B2 JP4702629 B2 JP 4702629B2
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Prior art keywords
armature
linear slider
linear
length
magnetic
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JP2006514426A
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Japanese (ja)
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JPWO2005122369A1 (ja
Inventor
恭祐 宮本
龍彦 木場
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Yaskawa Electric Corp
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Yaskawa Electric Corp
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Priority to JP2006514426A priority Critical patent/JP4702629B2/ja
Publication of JPWO2005122369A1 publication Critical patent/JPWO2005122369A1/ja
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
JP2006514426A 2004-05-14 2005-05-12 ムービングマグネット形リニアスライダおよびそれを用いた工作機械 Expired - Fee Related JP4702629B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006514426A JP4702629B2 (ja) 2004-05-14 2005-05-12 ムービングマグネット形リニアスライダおよびそれを用いた工作機械

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2004175306 2004-05-14
JP2004175306 2004-06-14
PCT/JP2005/008678 WO2005122369A1 (ja) 2004-05-14 2005-05-12 ムービングマグネット形リニアスライダ
JP2006514426A JP4702629B2 (ja) 2004-05-14 2005-05-12 ムービングマグネット形リニアスライダおよびそれを用いた工作機械

Publications (2)

Publication Number Publication Date
JPWO2005122369A1 JPWO2005122369A1 (ja) 2008-04-10
JP4702629B2 true JP4702629B2 (ja) 2011-06-15

Family

ID=35503422

Family Applications (1)

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JP2006514426A Expired - Fee Related JP4702629B2 (ja) 2004-05-14 2005-05-12 ムービングマグネット形リニアスライダおよびそれを用いた工作機械

Country Status (6)

Country Link
US (1) US7659641B2 (enExample)
JP (1) JP4702629B2 (enExample)
KR (1) KR101066357B1 (enExample)
CN (1) CN100553085C (enExample)
TW (1) TWI362162B (enExample)
WO (1) WO2005122369A1 (enExample)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006022193B4 (de) * 2006-05-12 2009-08-27 Rovema - Verpackungsmaschinen Gmbh Vertikale Schlauchbeutelmaschine mit zwei Linearmotoren
DE102006022192B4 (de) * 2006-05-12 2009-08-27 Rovema - Verpackungsmaschinen Gmbh Vorrichtung zum Verschweißen einer Folienbahn
JP5250268B2 (ja) * 2008-01-11 2013-07-31 ヤマハ発動機株式会社 部品移載装置
JP5250267B2 (ja) * 2008-01-11 2013-07-31 ヤマハ発動機株式会社 リニアモータ及び部品移載装置
JP5253824B2 (ja) * 2008-01-11 2013-07-31 ヤマハ発動機株式会社 リニアモータ、部品実装装置及び部品検査装置
JP5598757B2 (ja) * 2010-01-26 2014-10-01 株式会社安川電機 冷媒冷却リニアモータ
JP5859856B2 (ja) * 2012-01-11 2016-02-16 ヤマハ発動機株式会社 リニアモータ及び部品実装装置
JP5824647B2 (ja) * 2012-10-18 2015-11-25 パナソニックＩｐマネジメント株式会社 発電装置
KR101308317B1 (ko) * 2013-03-19 2013-10-04 장석호 분할 코일체를 갖는 코일판과 분할 자석을 갖는 왕복 이동형 자석판을 이용한 발전겸용 전동장치
CN104259869B (zh) * 2014-05-20 2017-03-22 大连日佳电子有限公司 一种双层双相反应式线性精密调整滑台
US10471610B2 (en) 2015-06-16 2019-11-12 Samsung Electronics Co., Ltd. Robot arm having weight compensation mechanism
TWI589100B (zh) * 2016-05-13 2017-06-21 台達電子工業股份有限公司 致動器和直線運動模組
CN107370331B (zh) * 2016-05-13 2019-11-29 台达电子工业股份有限公司 致动器和直线运动模块
NL2018266B1 (en) 2017-01-31 2018-08-16 Ccm Beheer Bv Planar positioning device
WO2020208732A1 (ja) * 2019-04-10 2020-10-15 ヤマハ発動機株式会社 リニア駆動装置及び部品実装用ヘッド
WO2020223030A1 (en) * 2019-04-29 2020-11-05 Kulicke And Soffa Industries, Inc. Linear motors and wire bonding machines including the same
CN109980891A (zh) * 2019-04-30 2019-07-05 郑雨 一种圈轨式直线电动机
CN111564947A (zh) * 2020-05-19 2020-08-21 广州市昊志机电股份有限公司 一种无铁芯圆弧直线电机和驱动装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06253526A (ja) * 1993-03-01 1994-09-09 Sharp Corp 直線駆動装置
JPH08140329A (ja) * 1994-11-07 1996-05-31 Toyota Auto Body Co Ltd 磁石可動型リニアモータ
JP2003172615A (ja) * 2001-12-07 2003-06-20 Hitachi Metals Ltd 位置検出手段および相対移動装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3815750B2 (ja) * 1995-10-09 2006-08-30 キヤノン株式会社 ステージ装置、ならびに前記ステージ装置を用いた露光装置およびデバイス製造方法
JP4094799B2 (ja) * 2000-06-22 2008-06-04 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置
JP2004015904A (ja) * 2002-06-06 2004-01-15 Canon Inc リニアステージ、リニアポジショナおよびリニアスピンスタンド
JP2005278280A (ja) * 2004-03-24 2005-10-06 Yaskawa Electric Corp ムービングコイル形リニアスライダ
JP4521221B2 (ja) * 2004-05-18 2010-08-11 日本トムソン株式会社 可動マグネット型リニアモータを内蔵したスライド装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06253526A (ja) * 1993-03-01 1994-09-09 Sharp Corp 直線駆動装置
JPH08140329A (ja) * 1994-11-07 1996-05-31 Toyota Auto Body Co Ltd 磁石可動型リニアモータ
JP2003172615A (ja) * 2001-12-07 2003-06-20 Hitachi Metals Ltd 位置検出手段および相対移動装置

Also Published As

Publication number Publication date
JPWO2005122369A1 (ja) 2008-04-10
WO2005122369A1 (ja) 2005-12-22
KR101066357B1 (ko) 2011-09-20
CN1965460A (zh) 2007-05-16
KR20070021184A (ko) 2007-02-22
TWI362162B (enExample) 2012-04-11
US7659641B2 (en) 2010-02-09
CN100553085C (zh) 2009-10-21
US20070096567A1 (en) 2007-05-03

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