JP4693496B2 - 液体吐出ヘッドおよびその製造方法 - Google Patents

液体吐出ヘッドおよびその製造方法 Download PDF

Info

Publication number
JP4693496B2
JP4693496B2 JP2005150860A JP2005150860A JP4693496B2 JP 4693496 B2 JP4693496 B2 JP 4693496B2 JP 2005150860 A JP2005150860 A JP 2005150860A JP 2005150860 A JP2005150860 A JP 2005150860A JP 4693496 B2 JP4693496 B2 JP 4693496B2
Authority
JP
Japan
Prior art keywords
flow path
substrate
resist
liquid
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005150860A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006326910A (ja
JP2006326910A5 (https=
Inventor
雅隆 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2005150860A priority Critical patent/JP4693496B2/ja
Priority to US11/435,441 priority patent/US7575303B2/en
Publication of JP2006326910A publication Critical patent/JP2006326910A/ja
Publication of JP2006326910A5 publication Critical patent/JP2006326910A5/ja
Application granted granted Critical
Publication of JP4693496B2 publication Critical patent/JP4693496B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2005150860A 2005-05-24 2005-05-24 液体吐出ヘッドおよびその製造方法 Expired - Fee Related JP4693496B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005150860A JP4693496B2 (ja) 2005-05-24 2005-05-24 液体吐出ヘッドおよびその製造方法
US11/435,441 US7575303B2 (en) 2005-05-24 2006-05-17 Liquid-ejection head and method for producing the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005150860A JP4693496B2 (ja) 2005-05-24 2005-05-24 液体吐出ヘッドおよびその製造方法

Publications (3)

Publication Number Publication Date
JP2006326910A JP2006326910A (ja) 2006-12-07
JP2006326910A5 JP2006326910A5 (https=) 2008-12-18
JP4693496B2 true JP4693496B2 (ja) 2011-06-01

Family

ID=37462070

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005150860A Expired - Fee Related JP4693496B2 (ja) 2005-05-24 2005-05-24 液体吐出ヘッドおよびその製造方法

Country Status (2)

Country Link
US (1) US7575303B2 (https=)
JP (1) JP4693496B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
KR20080060003A (ko) * 2006-12-26 2008-07-01 삼성전자주식회사 잉크젯 프린트 헤드의 제조방법
US7855151B2 (en) 2007-08-21 2010-12-21 Hewlett-Packard Development Company, L.P. Formation of a slot in a silicon substrate
US8409454B2 (en) * 2009-04-01 2013-04-02 Canon Kabushiki Kaisha Production process for structure and production process for liquid discharge head

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE155741T1 (de) * 1990-04-27 1997-08-15 Canon Kk Aufzeichnungsverfahren und -gerät
US5387314A (en) * 1993-01-25 1995-02-07 Hewlett-Packard Company Fabrication of ink fill slots in thermal ink-jet printheads utilizing chemical micromachining
JP3143307B2 (ja) * 1993-02-03 2001-03-07 キヤノン株式会社 インクジェット記録ヘッドの製造方法
US6336714B1 (en) * 1996-02-07 2002-01-08 Hewlett-Packard Company Fully integrated thermal inkjet printhead having thin film layer shelf
JP3652022B2 (ja) 1996-07-23 2005-05-25 キヤノン株式会社 インクジェット記録ヘッド及びインクジェット記録ヘッドの製造方法
JPH1095119A (ja) * 1996-09-25 1998-04-14 Canon Inc 液体吐出ヘッドおよびその製造方法
US6481832B2 (en) * 2001-01-29 2002-11-19 Hewlett-Packard Company Fluid-jet ejection device
US6749289B2 (en) * 2001-03-22 2004-06-15 Fuji Photo Film Co., Ltd. Liquid ejection apparatus and inkjet printer, and method of manufacturing them
US6910758B2 (en) * 2003-07-15 2005-06-28 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for fluid ejection device
US7326356B2 (en) * 2004-08-31 2008-02-05 Hewlett-Packard Development Company, L.P. Substrate and method of forming substrate for fluid ejection device
JP2006126116A (ja) * 2004-11-01 2006-05-18 Canon Inc フィルター用基板の製造方法、インクジェット記録ヘッドおよびその製造方法
JP2006130868A (ja) * 2004-11-09 2006-05-25 Canon Inc インクジェット記録ヘッド及びその製造方法

Also Published As

Publication number Publication date
JP2006326910A (ja) 2006-12-07
US20060266733A1 (en) 2006-11-30
US7575303B2 (en) 2009-08-18

Similar Documents

Publication Publication Date Title
KR100397604B1 (ko) 버블 젯 방식의 잉크 젯 프린트 헤드 및 그 제조방법
US8173030B2 (en) Liquid drop ejector having self-aligned hole
KR100374788B1 (ko) 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법
US8043517B2 (en) Method of forming openings in substrates and inkjet printheads fabricated thereby
JP4693496B2 (ja) 液体吐出ヘッドおよびその製造方法
JP5791366B2 (ja) 液体吐出ヘッド用基板の製造方法、液体吐出ヘッドの製造方法および液体吐出ヘッドアセンブリの製造方法
JP5335396B2 (ja) インクジェット記録ヘッドの製造方法
JP2006027273A (ja) インクジェットヘッドの製造方法
US20060092246A1 (en) Method for manufacturing a filter substrate, inkjet recording head, and method for manufacturing the inkjet recording head
JP2007136875A (ja) インクジェット記録ヘッド用基体
JP2005144782A (ja) インクジェット記録ヘッドの製造方法。
JP2004209708A (ja) インクジェット記録ヘッド、その製造方法、およびその製造に用いるインクジェット記録ヘッド用基体
JP4261904B2 (ja) インクジェット記録ヘッド用基板の製造方法、およびインクジェット記録ヘッドの製造方法
JP2012240208A (ja) インクジェットヘッド
KR20070060924A (ko) 패럴린 마스크를 이용한 실리콘 습식 식각 방법 및 이방법을 이용한 잉크젯 프린트헤드의 노즐 플레이트 제조방법
EP2091741B1 (en) Method of forming openings in substrates
JP2007283667A (ja) インクジェット記録ヘッドおよびインクジェット記録ヘッドの製造方法
JP4298286B2 (ja) インクジェット記録ヘッドの製造方法
KR20020089650A (ko) 버블젯 방식의 잉크젯 프린트 헤드 및 그 제작방법
JP2008110560A (ja) 液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド用ノズルプレートの製造方法
WO2022208701A1 (ja) ノズルプレートの製造方法、ノズルプレート及び流体吐出ヘッド
JP2010052303A (ja) 記録ヘッド及び記録ヘッドの製造方法
JP2007210242A (ja) インクジェット記録ヘッド及びその作製方法
JP2002144581A (ja) インクジェットヘッドおよびインクジェットヘッドのノズル形成方法
KR20080008866A (ko) 잉크젯 헤드의 제조방법.

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080526

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081030

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20101020

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101220

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20110216

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20110222

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140304

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees