JP4691752B2 - 振動アクチュエータの駆動装置 - Google Patents

振動アクチュエータの駆動装置 Download PDF

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Publication number
JP4691752B2
JP4691752B2 JP2000065936A JP2000065936A JP4691752B2 JP 4691752 B2 JP4691752 B2 JP 4691752B2 JP 2000065936 A JP2000065936 A JP 2000065936A JP 2000065936 A JP2000065936 A JP 2000065936A JP 4691752 B2 JP4691752 B2 JP 4691752B2
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Japan
Prior art keywords
phase
voltage
electrodes
vibration
electrode
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Expired - Fee Related
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JP2000065936A
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English (en)
Japanese (ja)
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JP2001258279A5 (enExample
JP2001258279A (ja
Inventor
通宏 戸部
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Nikon Corp
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Nikon Corp
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Priority to JP2000065936A priority Critical patent/JP4691752B2/ja
Publication of JP2001258279A publication Critical patent/JP2001258279A/ja
Publication of JP2001258279A5 publication Critical patent/JP2001258279A5/ja
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Publication of JP4691752B2 publication Critical patent/JP4691752B2/ja
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Expired - Fee Related legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2000065936A 2000-03-10 2000-03-10 振動アクチュエータの駆動装置 Expired - Fee Related JP4691752B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000065936A JP4691752B2 (ja) 2000-03-10 2000-03-10 振動アクチュエータの駆動装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000065936A JP4691752B2 (ja) 2000-03-10 2000-03-10 振動アクチュエータの駆動装置

Publications (3)

Publication Number Publication Date
JP2001258279A JP2001258279A (ja) 2001-09-21
JP2001258279A5 JP2001258279A5 (enExample) 2007-04-26
JP4691752B2 true JP4691752B2 (ja) 2011-06-01

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ID=18585380

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JP2000065936A Expired - Fee Related JP4691752B2 (ja) 2000-03-10 2000-03-10 振動アクチュエータの駆動装置

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JP (1) JP4691752B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100773852B1 (ko) * 2004-06-09 2007-11-06 캐논 가부시끼가이샤 진동파 구동장치 및 진동자
JP4072518B2 (ja) 2004-06-09 2008-04-09 キヤノン株式会社 振動波駆動装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04325884A (ja) * 1991-04-25 1992-11-16 Yamatake Honeywell Co Ltd 表面波モータ
JP3065177B2 (ja) * 1992-07-31 2000-07-12 松下電器産業株式会社 超音波モータ
JPH06133568A (ja) * 1992-10-14 1994-05-13 Nikon Corp 超音波モータの駆動回路
JP3198041B2 (ja) * 1996-02-07 2001-08-13 シャープ株式会社 超音波モーター速度制御装置
JPH09233869A (ja) * 1996-02-23 1997-09-05 Canon Inc 振動装置
JPH1052072A (ja) * 1996-07-31 1998-02-20 Canon Inc 振動アクチュエータ
JPH11164574A (ja) * 1997-09-25 1999-06-18 Nikon Corp 振動アクチュエータ駆動装置

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Publication number Publication date
JP2001258279A (ja) 2001-09-21

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