JP4681938B2 - ナノ構造体の製造方法 - Google Patents

ナノ構造体の製造方法 Download PDF

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Publication number
JP4681938B2
JP4681938B2 JP2005151339A JP2005151339A JP4681938B2 JP 4681938 B2 JP4681938 B2 JP 4681938B2 JP 2005151339 A JP2005151339 A JP 2005151339A JP 2005151339 A JP2005151339 A JP 2005151339A JP 4681938 B2 JP4681938 B2 JP 4681938B2
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JP
Japan
Prior art keywords
film
nanostructure
layer
alloy
pores
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Expired - Fee Related
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JP2005151339A
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English (en)
Japanese (ja)
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JP2006326723A (ja
JP2006326723A5 (enExample
Inventor
滋 市原
達也 斉藤
透 田
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Canon Inc
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Canon Inc
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Priority to JP2005151339A priority Critical patent/JP4681938B2/ja
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Publication of JP2006326723A5 publication Critical patent/JP2006326723A5/ja
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  • Cold Cathode And The Manufacture (AREA)
  • Magnetic Record Carriers (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
  • Electrodes For Cathode-Ray Tubes (AREA)
JP2005151339A 2005-05-24 2005-05-24 ナノ構造体の製造方法 Expired - Fee Related JP4681938B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005151339A JP4681938B2 (ja) 2005-05-24 2005-05-24 ナノ構造体の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005151339A JP4681938B2 (ja) 2005-05-24 2005-05-24 ナノ構造体の製造方法

Publications (3)

Publication Number Publication Date
JP2006326723A JP2006326723A (ja) 2006-12-07
JP2006326723A5 JP2006326723A5 (enExample) 2008-02-14
JP4681938B2 true JP4681938B2 (ja) 2011-05-11

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ID=37548975

Family Applications (1)

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JP2005151339A Expired - Fee Related JP4681938B2 (ja) 2005-05-24 2005-05-24 ナノ構造体の製造方法

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JP (1) JP4681938B2 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5094208B2 (ja) * 2006-08-24 2012-12-12 キヤノン株式会社 構造体の製造方法
KR20080053571A (ko) * 2006-12-11 2008-06-16 광주과학기술원 전자현미경을 이용한 나노구조 분석 방법
ATE541303T1 (de) * 2008-01-11 2012-01-15 Uvis Light Ab Verfahren zur herstellung einer feldemissionsanzeige
JP5099836B2 (ja) * 2008-01-30 2012-12-19 株式会社高松メッキ 電子銃の製造方法
US8048546B2 (en) * 2009-12-16 2011-11-01 Hitachi Global Storage Technologies Netherlands B.V. Perpendicular magnetic recording disk with ordered nucleation layer and method for making the disk
WO2012054043A1 (en) 2010-10-21 2012-04-26 Hewlett-Packard Development Company, L.P. Nano-structure and method of making the same
US20170267520A1 (en) 2010-10-21 2017-09-21 Hewlett-Packard Development Company, L.P. Method of forming a micro-structure
WO2012054044A1 (en) * 2010-10-21 2012-04-26 Hewlett-Packard Development Company, L. P. Method of forming a micro-structure
WO2012054042A1 (en) 2010-10-21 2012-04-26 Hewlett-Packard Development Company, L.P. Method of forming a nano-structure
US9410260B2 (en) 2010-10-21 2016-08-09 Hewlett-Packard Development Company, L.P. Method of forming a nano-structure
JP5824399B2 (ja) * 2012-03-30 2015-11-25 富士フイルム株式会社 ナノインプリント用樹脂モールドおよびその製造方法
KR102848243B1 (ko) * 2020-08-19 2025-08-20 (주)포인트엔지니어링 양극산화막 몰드 및 이를 포함하는 몰드구조체, 이를 이용한 성형물의 제조방법 및 그 성형물
KR20220049203A (ko) 2020-10-14 2022-04-21 (주)포인트엔지니어링 전기 전도성 접촉핀, 이의 제조방법, 검사장치 및 성형물의 제조방법 및 그 성형물
KR102469788B1 (ko) * 2021-02-22 2022-11-23 (주)포인트엔지니어링 복합 몰드, 금속 성형물 및 그 제조방법
WO2022235064A1 (ko) * 2021-05-07 2022-11-10 (주)포인트엔지니어링 금속 구조체 및 그 제조방법
CN114890379B (zh) * 2022-05-16 2025-08-01 苏州山河光电科技有限公司 一种基于高深宽比纳米柱的光学器件制作方法
CN116623133B (zh) * 2023-05-12 2023-11-24 中南大学 一种金属针尖阵列型等离子体光催化剂的制备方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05211029A (ja) * 1992-01-31 1993-08-20 Ricoh Co Ltd 電子放出素子及びその製造方法
JP3729449B2 (ja) * 2001-05-11 2005-12-21 キヤノン株式会社 細孔を有する構造体及びデバイス
JP4383796B2 (ja) * 2003-08-07 2009-12-16 キヤノン株式会社 ナノ構造体、及びその製造方法
JP4434658B2 (ja) * 2003-08-08 2010-03-17 キヤノン株式会社 構造体及びその製造方法

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