JP2006326723A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006326723A5 JP2006326723A5 JP2005151339A JP2005151339A JP2006326723A5 JP 2006326723 A5 JP2006326723 A5 JP 2006326723A5 JP 2005151339 A JP2005151339 A JP 2005151339A JP 2005151339 A JP2005151339 A JP 2005151339A JP 2006326723 A5 JP2006326723 A5 JP 2006326723A5
- Authority
- JP
- Japan
- Prior art keywords
- atomic
- pores
- metal
- anodic oxidation
- valve metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 239000011148 porous material Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000010407 anodic oxide Substances 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005151339A JP4681938B2 (ja) | 2005-05-24 | 2005-05-24 | ナノ構造体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005151339A JP4681938B2 (ja) | 2005-05-24 | 2005-05-24 | ナノ構造体の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006326723A JP2006326723A (ja) | 2006-12-07 |
| JP2006326723A5 true JP2006326723A5 (enExample) | 2008-02-14 |
| JP4681938B2 JP4681938B2 (ja) | 2011-05-11 |
Family
ID=37548975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005151339A Expired - Fee Related JP4681938B2 (ja) | 2005-05-24 | 2005-05-24 | ナノ構造体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4681938B2 (enExample) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5094208B2 (ja) * | 2006-08-24 | 2012-12-12 | キヤノン株式会社 | 構造体の製造方法 |
| KR20080053571A (ko) * | 2006-12-11 | 2008-06-16 | 광주과학기술원 | 전자현미경을 이용한 나노구조 분석 방법 |
| ATE541303T1 (de) * | 2008-01-11 | 2012-01-15 | Uvis Light Ab | Verfahren zur herstellung einer feldemissionsanzeige |
| JP5099836B2 (ja) * | 2008-01-30 | 2012-12-19 | 株式会社高松メッキ | 電子銃の製造方法 |
| US8048546B2 (en) * | 2009-12-16 | 2011-11-01 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording disk with ordered nucleation layer and method for making the disk |
| WO2012054043A1 (en) | 2010-10-21 | 2012-04-26 | Hewlett-Packard Development Company, L.P. | Nano-structure and method of making the same |
| US20170267520A1 (en) | 2010-10-21 | 2017-09-21 | Hewlett-Packard Development Company, L.P. | Method of forming a micro-structure |
| WO2012054044A1 (en) * | 2010-10-21 | 2012-04-26 | Hewlett-Packard Development Company, L. P. | Method of forming a micro-structure |
| WO2012054042A1 (en) | 2010-10-21 | 2012-04-26 | Hewlett-Packard Development Company, L.P. | Method of forming a nano-structure |
| US9410260B2 (en) | 2010-10-21 | 2016-08-09 | Hewlett-Packard Development Company, L.P. | Method of forming a nano-structure |
| JP5824399B2 (ja) * | 2012-03-30 | 2015-11-25 | 富士フイルム株式会社 | ナノインプリント用樹脂モールドおよびその製造方法 |
| KR102848243B1 (ko) * | 2020-08-19 | 2025-08-20 | (주)포인트엔지니어링 | 양극산화막 몰드 및 이를 포함하는 몰드구조체, 이를 이용한 성형물의 제조방법 및 그 성형물 |
| KR20220049203A (ko) | 2020-10-14 | 2022-04-21 | (주)포인트엔지니어링 | 전기 전도성 접촉핀, 이의 제조방법, 검사장치 및 성형물의 제조방법 및 그 성형물 |
| KR102469788B1 (ko) * | 2021-02-22 | 2022-11-23 | (주)포인트엔지니어링 | 복합 몰드, 금속 성형물 및 그 제조방법 |
| WO2022235064A1 (ko) * | 2021-05-07 | 2022-11-10 | (주)포인트엔지니어링 | 금속 구조체 및 그 제조방법 |
| CN114890379B (zh) * | 2022-05-16 | 2025-08-01 | 苏州山河光电科技有限公司 | 一种基于高深宽比纳米柱的光学器件制作方法 |
| CN116623133B (zh) * | 2023-05-12 | 2023-11-24 | 中南大学 | 一种金属针尖阵列型等离子体光催化剂的制备方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05211029A (ja) * | 1992-01-31 | 1993-08-20 | Ricoh Co Ltd | 電子放出素子及びその製造方法 |
| JP3729449B2 (ja) * | 2001-05-11 | 2005-12-21 | キヤノン株式会社 | 細孔を有する構造体及びデバイス |
| JP4383796B2 (ja) * | 2003-08-07 | 2009-12-16 | キヤノン株式会社 | ナノ構造体、及びその製造方法 |
| JP4434658B2 (ja) * | 2003-08-08 | 2010-03-17 | キヤノン株式会社 | 構造体及びその製造方法 |
-
2005
- 2005-05-24 JP JP2005151339A patent/JP4681938B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2006326723A5 (enExample) | ||
| US8921824B2 (en) | 3-dimensional graphene structure and process for preparing and transferring the same | |
| Richman et al. | Ordered mesoporous silicon through magnesium reduction of polymer templated silica thin films | |
| JP2007507328A5 (enExample) | ||
| Mei et al. | Fabrication, self-assembly, and properties of ultrathin AlN/GaN porous crystalline nanomembranes: tubes, spirals, and curved sheets | |
| Konovalov et al. | Highly ordered nanotopographies on electropolished aluminum single crystals | |
| JP6150299B2 (ja) | マスクブランク、転写用マスクの製造方法及び半導体装置の製造方法 | |
| Tan et al. | Free-standing porous anodic alumina templates for atomic layer deposition of highly ordered TiO2 nanotube arrays on various substrates | |
| JP2006352082A5 (enExample) | ||
| JP2010213262A5 (enExample) | ||
| JP2010521589A5 (enExample) | ||
| Wang et al. | Ordered arrays of nanoporous silicon nanopillars and silicon nanopillars with nanoporous shells | |
| Zhou et al. | Surface patterning by nanosphere lithography for layer growth with ordered pores | |
| TWI544528B (zh) | 金屬光柵的製備方法 | |
| EP3066044A1 (fr) | Pièce de micromécanique creuse, à plusieurs niveaux fonctionnels et monobloc en un matériau à base d'un allotrope synthétique du carbone | |
| JP2012054893A5 (enExample) | ||
| JP2014521585A5 (enExample) | ||
| JP2009206338A5 (enExample) | ||
| JP2005052956A5 (enExample) | ||
| JP5451788B2 (ja) | 複雑な穴開き微細機械部品 | |
| JP2008075175A5 (enExample) | ||
| EP2082990A3 (en) | Aerogel-bases mold for MEMS fabrication and formation thereof | |
| Jaafar et al. | Nanoporous alumina membrane prepared by nanoindentation and anodic oxidation | |
| JP2008232806A5 (enExample) | ||
| Kraeh et al. | Fabrication of high aspect ratio microtube arrays for 2D photonic crystals |