JP4681530B2 - ナノ結晶シリコン量子ドットメモリ装置の形成方法 - Google Patents
ナノ結晶シリコン量子ドットメモリ装置の形成方法 Download PDFInfo
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- 229910021423 nanocrystalline silicon Inorganic materials 0.000 title claims description 85
- 238000000034 method Methods 0.000 title claims description 39
- 239000002096 quantum dot Substances 0.000 title claims description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 60
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 48
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 32
- 239000000377 silicon dioxide Substances 0.000 claims description 26
- 235000012239 silicon dioxide Nutrition 0.000 claims description 26
- 238000000151 deposition Methods 0.000 claims description 24
- 238000007254 oxidation reaction Methods 0.000 claims description 24
- 230000003647 oxidation Effects 0.000 claims description 23
- 238000005229 chemical vapour deposition Methods 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 17
- 229910052710 silicon Inorganic materials 0.000 claims description 17
- 239000010703 silicon Substances 0.000 claims description 17
- 230000008021 deposition Effects 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 13
- 230000015572 biosynthetic process Effects 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 238000004544 sputter deposition Methods 0.000 claims description 3
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000010408 film Substances 0.000 description 113
- 239000010410 layer Substances 0.000 description 41
- 239000011856 silicon-based particle Substances 0.000 description 24
- 230000006870 function Effects 0.000 description 10
- 238000000137 annealing Methods 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 239000002159 nanocrystal Substances 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011229 interlayer Substances 0.000 description 2
- 239000005001 laminate film Substances 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002105 nanoparticle Substances 0.000 description 2
- 238000005424 photoluminescence Methods 0.000 description 2
- 230000000717 retained effect Effects 0.000 description 2
- 150000003376 silicon Chemical class 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000005689 Fowler Nordheim tunneling Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000002784 hot electron Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000004875 x-ray luminescence Methods 0.000 description 1
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- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/349—Arrangements for evaluating degradation, retention or wearout, e.g. by counting erase cycles
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- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/349—Arrangements for evaluating degradation, retention or wearout, e.g. by counting erase cycles
- G11C16/3495—Circuits or methods to detect or delay wearout of nonvolatile EPROM or EEPROM memory devices, e.g. by counting numbers of erase or reprogram cycles, by using multiple memory areas serially or cyclically
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- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
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- H01L29/15—Structures with periodic or quasi periodic potential variation, e.g. multiple quantum wells, superlattices
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/401—Multistep manufacturing processes
- H01L29/4011—Multistep manufacturing processes for data storage electrodes
- H01L29/40114—Multistep manufacturing processes for data storage electrodes the electrodes comprising a conductor-insulator-conductor-insulator-semiconductor structure
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42324—Gate electrodes for transistors with a floating gate
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
- H01L29/4925—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
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- H—ELECTRICITY
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
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- G11C2216/08—Nonvolatile memory wherein data storage is accomplished by storing relatively few electrons in the storage layer, i.e. single electron memory
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- Non-Volatile Memory (AREA)
- Semiconductor Memories (AREA)
Description
CVD多結晶シリコン堆積処理の条件
熱酸化処理の条件
図7(b)は、多層CVD多結晶シリコンと熱酸化処理を用いたナノ結晶シリコン粒子の堆積を示している。
図7(c)は、CVD法によるコントロール酸化膜の堆積と、多結晶シリコンゲート(ゲート電極)の堆積を示している。
図7(d)は、ゲート酸化膜に達するまで行われるゲートのエッチングを示している。
図7(e)は、ソース、ドレイン注入、及び酸化物堆積を示している。
図7(f)は、フォトレジストを用いたコンタクトのエッチング、第1金属配線処理、及び、最終的な装置構造を示している。
102: シリコン基板
104: シリコン活性層
106: チャネル領域
108: ゲート酸化膜
110: ナノ結晶シリコンメモリ膜
112: 多結晶シリコン/二酸化シリコン積層膜
114: 多結晶シリコ層
116: 二酸化シリコン膜
118: コントロール酸化膜(層間酸化膜)
120: ゲート電極(コントロールゲート)
122: ソース領域
124: ドレイン領域
126: 積層膜厚
128: 膜厚
134: 膜厚
1600:ナノ結晶シリコン量子ドットメモリ装置の形成方法の処理手順全体
1700:ナノ結晶シリコン量子ドットメモリ装置の操作方法の処理手順全体
Claims (10)
- ナノ結晶シリコン量子ドットメモリ装置の形成方法であって、
シリコン基板の活性層上にゲート酸化膜を形成する工程と、
前記ゲート酸化膜上に、多結晶シリコン/二酸化シリコン積層膜を含むナノ結晶シリコンメモリ膜を形成する工程と、
前記ナノ結晶シリコンメモリ膜上にシリコン酸化膜からなるコントロール酸化膜を形成する工程と、
前記コントロール酸化膜上にゲート電極を形成する工程と、
前記活性層にソース/ドレイン領域を形成する工程と、
を有し、
前記ゲート酸化膜上に前記ナノ結晶シリコンメモリ膜を形成する工程において、
化学的気相成長(CVD)法を用いて非晶質シリコン層を堆積し、
前記非晶質シリコン層の一部を熱酸化処理して、前記積層膜内の二酸化シリコンを形成するとともに、前記非晶質シリコン層の他の一部をナノ結晶化させ、
前記非晶質シリコン層の熱酸化処理される部分を増加させ、前記積層膜内の二酸化シリコンの膜厚の増加に応じて前記ナノ結晶シリコンの粒子サイズを減少させて、前記積層膜内の二酸化シリコンの膜厚により前記粒子サイズを調節することを特徴とする形成方法。 - 前記ゲート酸化膜上に前記ナノ結晶シリコンメモリ膜を形成する工程において、前記非晶質シリコン層の堆積及び熱酸化処理を繰り返し行い、複数層の多結晶シリコン/二酸化シリコン積層膜を形成することを特徴とする請求項1に記載の形成方法。
- 前記複数層の多結晶シリコン/二酸化シリコン積層膜を形成する工程において、約2〜5層の多結晶シリコン/二酸化シリコン積層膜を形成することを特徴とする請求項2に記載の形成方法。
- 前記非晶質シリコン層の一部を熱酸化処理する工程において、前記非晶質シリコン層の約10〜80%の範囲を熱酸化処理することを特徴とする請求項1に記載の形成方法。
- 前記非晶質シリコン層を堆積する工程において、約2〜10nmの範囲の膜厚を有する非晶質シリコン層を堆積することを特徴とする請求項1に記載の形成方法。
- 前記非晶質シリコン層を堆積する工程において、
標準状態換算で約40〜200cm3/分の範囲の流量でシランを導入し、
前記基板を約500〜600℃の範囲の温度まで加熱し、
約150〜250mTorrの範囲の堆積圧力を設定し、
約1〜5分の範囲の時間、堆積を行うことを特徴とする請求項1に記載の形成方法。 - 前記非晶質シリコン層の一部を熱酸化処理する工程において、
標準状態換算で約1.6リットル/分の流量で酸素を導入し、
標準状態換算で約8リットル/分の流量で窒素を導入し、
前記基板を約700〜1100℃の範囲の温度まで加熱し、
ほぼ周囲雰囲気の酸化圧力を設定し、
約5〜60分の範囲の時間、酸化を行うことを特徴とする請求項1に記載の形成方法。 - 前記ゲート酸化膜上に前記ナノ結晶シリコンメモリ膜を形成する工程において、約1〜30nmの範囲の直径を有するナノ結晶シリコンを形成することを特徴とする請求項1に記載の形成方法。
- 前記コントロール酸化膜を形成する工程において、
化学的気相成長(CVD)及びスパッタリングから成るグループから選択される堆積方法を用いて非晶質シリコン層を堆積し、前記非晶質シリコン層を熱酸化処理することを特徴とする請求項1に記載の形成方法。 - 前記コントロール酸化膜を形成する工程において、約10〜50nmの範囲の膜厚を有するシリコン酸化膜を形成することを特徴とする請求項1に記載の形成方法。
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US11/281,955 US20070108502A1 (en) | 2005-11-17 | 2005-11-17 | Nanocrystal silicon quantum dot memory device |
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KR20070119944A (ko) * | 2006-06-16 | 2007-12-21 | 삼성전자주식회사 | 실리콘 나노 결정 형성 방법 및 이 방법이 적용된 메모리소자의 제조 방법 |
JP5578641B2 (ja) * | 2008-12-01 | 2014-08-27 | 国立大学法人広島大学 | 不揮発性半導体記憶素子とその製造方法 |
US8093129B2 (en) * | 2009-02-03 | 2012-01-10 | Micron Technology, Inc. | Methods of forming memory cells |
TW201032340A (en) * | 2009-02-26 | 2010-09-01 | Nat Applied Res Laboratories | A silicon quantum dot near-infrared phototransistor detector |
EP2309562B1 (en) * | 2009-10-12 | 2012-12-05 | Hitachi Ltd. | Charge carrier device |
CN102255016B (zh) * | 2011-08-17 | 2012-11-07 | 南京大学 | 一种近红外光发射硅基材料及其制备方法 |
CN103289683A (zh) * | 2013-05-09 | 2013-09-11 | 上海大学 | 一种SiO2包覆的CdS量子点纳米复合薄膜的制备方法 |
US20190198630A1 (en) * | 2017-12-21 | 2019-06-27 | Macronix International Co., Ltd. | Managing Gate Coupling For Memory Devices |
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KR100446632B1 (ko) * | 2002-10-14 | 2004-09-04 | 삼성전자주식회사 | 비휘발성 sonsnos 메모리 |
KR100973282B1 (ko) | 2003-05-20 | 2010-07-30 | 삼성전자주식회사 | 나노 결정층을 구비하는 소노스 메모리 장치 |
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- 2006-10-30 TW TW095140054A patent/TW200733246A/zh unknown
- 2006-11-16 KR KR1020060113091A patent/KR100875865B1/ko not_active IP Right Cessation
- 2006-11-17 CN CNA2006101492278A patent/CN1967795A/zh active Pending
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Also Published As
Publication number | Publication date |
---|---|
US20070108502A1 (en) | 2007-05-17 |
CN1967795A (zh) | 2007-05-23 |
KR20070052667A (ko) | 2007-05-22 |
TW200733246A (en) | 2007-09-01 |
JP2007142373A (ja) | 2007-06-07 |
KR100875865B1 (ko) | 2008-12-24 |
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