JP4677606B2 - 蛍光x線分析法 - Google Patents
蛍光x線分析法 Download PDFInfo
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- JP4677606B2 JP4677606B2 JP2005297541A JP2005297541A JP4677606B2 JP 4677606 B2 JP4677606 B2 JP 4677606B2 JP 2005297541 A JP2005297541 A JP 2005297541A JP 2005297541 A JP2005297541 A JP 2005297541A JP 4677606 B2 JP4677606 B2 JP 4677606B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Description
Claims (5)
- 試料が結晶性を有しており、該試料にX線を入射し、放出される蛍光を分析することにより、該試料の内部及び表面上に存在する元素の種類及び量を分析する蛍光X線分析法であって、
散乱・回折X線成分を含む入射X線によるX線強度が増加すると蛍光X線強度が減少する検出器で測定した、試料回転角度と散乱・回折X線強度の関係から、試料回転角度の変化に対する散乱・回折X線強度の変化が少ない入射方位を求めて、該入射方位で入射するように、試料に入射するX線の入射方位を制御し、該試料中の結晶性を有する部分からの散乱又は回折に起因するX線強度を安定化させることを特徴とする蛍光X線分析法。 - 上記試料は、イオン注入された試料であることを特徴とする請求項1に記載の蛍光X線分析法。
- 上記試料は、基板上に作成された薄膜であることを特徴とする請求項1に記載の蛍光X線分析法。
- 上記測定元素は、基板の表面に存在することを特徴とする請求項1に記載の蛍光X線分析法。
- 請求項2に記載の蛍光X線分析法を用いて、イオン注入量を管理することを特徴とする工程管理法。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005297541A JP4677606B2 (ja) | 2005-10-12 | 2005-10-12 | 蛍光x線分析法 |
PCT/JP2006/318903 WO2007043320A1 (ja) | 2005-10-12 | 2006-09-25 | 蛍光x線分析法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005297541A JP4677606B2 (ja) | 2005-10-12 | 2005-10-12 | 蛍光x線分析法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007107952A JP2007107952A (ja) | 2007-04-26 |
JP4677606B2 true JP4677606B2 (ja) | 2011-04-27 |
Family
ID=37942571
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005297541A Expired - Fee Related JP4677606B2 (ja) | 2005-10-12 | 2005-10-12 | 蛍光x線分析法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4677606B2 (ja) |
WO (1) | WO2007043320A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4681018B2 (ja) * | 2008-03-14 | 2011-05-11 | 株式会社リガク | 全反射蛍光x線分析装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126768A (ja) * | 1991-11-05 | 1993-05-21 | Rigaku Denki Kogyo Kk | 蛍光x線の分析方法 |
JPH07229862A (ja) * | 1994-02-16 | 1995-08-29 | Nec Corp | 全反射蛍光x線分析装置 |
US6121624A (en) * | 1998-08-24 | 2000-09-19 | Lucent Technologies, Inc. | Method for controlled implantation of elements into the surface or near surface of a substrate |
-
2005
- 2005-10-12 JP JP2005297541A patent/JP4677606B2/ja not_active Expired - Fee Related
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2006
- 2006-09-25 WO PCT/JP2006/318903 patent/WO2007043320A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05126768A (ja) * | 1991-11-05 | 1993-05-21 | Rigaku Denki Kogyo Kk | 蛍光x線の分析方法 |
JPH07229862A (ja) * | 1994-02-16 | 1995-08-29 | Nec Corp | 全反射蛍光x線分析装置 |
US6121624A (en) * | 1998-08-24 | 2000-09-19 | Lucent Technologies, Inc. | Method for controlled implantation of elements into the surface or near surface of a substrate |
Also Published As
Publication number | Publication date |
---|---|
JP2007107952A (ja) | 2007-04-26 |
WO2007043320A1 (ja) | 2007-04-19 |
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