JP4671142B2 - 半導体ウエハの処理装置、温度測定用プローブ及びその温度測定方法 - Google Patents

半導体ウエハの処理装置、温度測定用プローブ及びその温度測定方法 Download PDF

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Publication number
JP4671142B2
JP4671142B2 JP35875499A JP35875499A JP4671142B2 JP 4671142 B2 JP4671142 B2 JP 4671142B2 JP 35875499 A JP35875499 A JP 35875499A JP 35875499 A JP35875499 A JP 35875499A JP 4671142 B2 JP4671142 B2 JP 4671142B2
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Japan
Prior art keywords
probe
probe head
temperature
semiconductor wafer
support
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Expired - Fee Related
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JP35875499A
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English (en)
Japanese (ja)
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JP2000200815A5 (cg-RX-API-DMAC7.html
JP2000200815A (ja
Inventor
ペネロン ジョエル
ギル カードソ アンドレ
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アクセリス テクノロジーズ インコーポレーテッド
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Publication of JP2000200815A5 publication Critical patent/JP2000200815A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/14—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations
    • G01K1/143—Supports; Fastening devices; Arrangements for mounting thermometers in particular locations for measuring surface temperatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/16—Special arrangements for conducting heat from the object to the sensitive element

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Drying Of Semiconductors (AREA)
JP35875499A 1998-12-17 1999-12-17 半導体ウエハの処理装置、温度測定用プローブ及びその温度測定方法 Expired - Fee Related JP4671142B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US213925 1998-12-17
US09/213,925 US6110288A (en) 1998-12-17 1998-12-17 Temperature probe and measurement method for low pressure process

Publications (3)

Publication Number Publication Date
JP2000200815A JP2000200815A (ja) 2000-07-18
JP2000200815A5 JP2000200815A5 (cg-RX-API-DMAC7.html) 2007-05-10
JP4671142B2 true JP4671142B2 (ja) 2011-04-13

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ID=22797057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35875499A Expired - Fee Related JP4671142B2 (ja) 1998-12-17 1999-12-17 半導体ウエハの処理装置、温度測定用プローブ及びその温度測定方法

Country Status (4)

Country Link
US (1) US6110288A (cg-RX-API-DMAC7.html)
EP (1) EP1014058B1 (cg-RX-API-DMAC7.html)
JP (1) JP4671142B2 (cg-RX-API-DMAC7.html)
DE (1) DE69927921T2 (cg-RX-API-DMAC7.html)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6594780B1 (en) * 1999-10-19 2003-07-15 Inasoft, Inc. Operating system and data protection
US7080940B2 (en) * 2001-04-20 2006-07-25 Luxtron Corporation In situ optical surface temperature measuring techniques and devices
US6572265B1 (en) 2001-04-20 2003-06-03 Luxtron Corporation In situ optical surface temperature measuring techniques and devices
US20040012808A1 (en) * 2001-06-04 2004-01-22 Payne David M. Network-based technical support and diagnostics
US6796711B2 (en) * 2002-03-29 2004-09-28 Axcelis Technologies, Inc. Contact temperature probe and process
US6695886B1 (en) * 2002-08-22 2004-02-24 Axcelis Technologies, Inc. Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool
US7183779B2 (en) * 2004-12-28 2007-02-27 Spectrum Technologies, Inc. Soil probe device and method of making same
US7651269B2 (en) * 2007-07-19 2010-01-26 Lam Research Corporation Temperature probes having a thermally isolated tip
JP5591565B2 (ja) * 2010-03-12 2014-09-17 東京エレクトロン株式会社 温度測定用プローブ、温度測定システム及びこれを用いた温度測定方法
US9196516B2 (en) * 2013-03-14 2015-11-24 Qualitau, Inc. Wafer temperature measurement tool
WO2022187343A1 (en) * 2021-03-02 2022-09-09 Applied Materials, Inc. Apparatus for fiber optic temperature probe in processing chambers

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2093045A6 (cg-RX-API-DMAC7.html) * 1970-05-29 1972-01-28 Commissariat Energie Atomique
US4909314A (en) * 1979-12-21 1990-03-20 Varian Associates, Inc. Apparatus for thermal treatment of a wafer in an evacuated environment
US4457359A (en) * 1982-05-25 1984-07-03 Varian Associates, Inc. Apparatus for gas-assisted, solid-to-solid thermal transfer with a semiconductor wafer
JPS59215718A (ja) * 1983-05-23 1984-12-05 Kokusai Electric Co Ltd 半導体基板の赤外線熱処理装置
US4949783A (en) * 1988-05-18 1990-08-21 Veeco Instruments, Inc. Substrate transport and cooling apparatus and method for same
US4907894A (en) * 1988-12-20 1990-03-13 Bnf Metals Technology Centre Surface-temperature sensing method and apparatus
US5755511A (en) * 1994-12-19 1998-05-26 Applied Materials, Inc. Method and apparatus for measuring substrate temperatures
US6140612A (en) * 1995-06-07 2000-10-31 Lam Research Corporation Controlling the temperature of a wafer by varying the pressure of gas between the underside of the wafer and the chuck
US5791782A (en) * 1995-09-21 1998-08-11 Fusion Systems Corporation Contact temperature probe with unrestrained orientation
JP3323927B2 (ja) * 1995-11-02 2002-09-09 株式会社アドバンスト・ディスプレイ 基板表面検査方法および該方法に用いる装置
US5775416A (en) * 1995-11-17 1998-07-07 Cvc Products, Inc. Temperature controlled chuck for vacuum processing
US5761023A (en) * 1996-04-25 1998-06-02 Applied Materials, Inc. Substrate support with pressure zones having reduced contact area and temperature feedback
JPH10239165A (ja) * 1997-02-27 1998-09-11 Sony Corp 基板の温度測定器、基板の温度を測定する方法および基板の加熱方法
US5937541A (en) * 1997-09-15 1999-08-17 Siemens Aktiengesellschaft Semiconductor wafer temperature measurement and control thereof using gas temperature measurement

Also Published As

Publication number Publication date
EP1014058A1 (en) 2000-06-28
DE69927921T2 (de) 2006-07-27
DE69927921D1 (de) 2005-12-01
JP2000200815A (ja) 2000-07-18
US6110288A (en) 2000-08-29
EP1014058B1 (en) 2005-10-26

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