JP4650619B2 - 駆動ユニット、光学ユニット、光学装置、並びに露光装置 - Google Patents
駆動ユニット、光学ユニット、光学装置、並びに露光装置 Download PDFInfo
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- JP4650619B2 JP4650619B2 JP2005064687A JP2005064687A JP4650619B2 JP 4650619 B2 JP4650619 B2 JP 4650619B2 JP 2005064687 A JP2005064687 A JP 2005064687A JP 2005064687 A JP2005064687 A JP 2005064687A JP 4650619 B2 JP4650619 B2 JP 4650619B2
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Images
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Lens Barrels (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005064687A JP4650619B2 (ja) | 2005-03-09 | 2005-03-09 | 駆動ユニット、光学ユニット、光学装置、並びに露光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005064687A JP4650619B2 (ja) | 2005-03-09 | 2005-03-09 | 駆動ユニット、光学ユニット、光学装置、並びに露光装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2006250587A JP2006250587A (ja) | 2006-09-21 |
JP2006250587A5 JP2006250587A5 (fr) | 2010-04-22 |
JP4650619B2 true JP4650619B2 (ja) | 2011-03-16 |
Family
ID=37091269
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2005064687A Active JP4650619B2 (ja) | 2005-03-09 | 2005-03-09 | 駆動ユニット、光学ユニット、光学装置、並びに露光装置 |
Country Status (1)
Country | Link |
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JP (1) | JP4650619B2 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3226073A3 (fr) | 2003-04-09 | 2017-10-11 | Nikon Corporation | Procédé et appareil d'exposition et procédé de fabrication de dispositif |
TW201834020A (zh) | 2003-10-28 | 2018-09-16 | 日商尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
TW201809801A (zh) | 2003-11-20 | 2018-03-16 | 日商尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法、以及元件製造方法 |
TWI437618B (zh) | 2004-02-06 | 2014-05-11 | 尼康股份有限公司 | 偏光變換元件、光學照明裝置、曝光裝置以及曝光方法 |
EP1881521B1 (fr) | 2005-05-12 | 2014-07-23 | Nikon Corporation | Système optique de projection, dispositif d'exposition et procédé d'exposition |
WO2007086557A1 (fr) | 2006-01-30 | 2007-08-02 | Nikon Corporation | Dispositif de support d’éléments optiques, procédé d’ajustement de la position d’éléments optiques et dispositif d’exposition |
JP2009026862A (ja) | 2007-07-18 | 2009-02-05 | Canon Inc | 光学素子位置決めシステム、投影光学系及び露光装置 |
JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
US8792079B2 (en) | 2007-12-28 | 2014-07-29 | Nikon Corporation | Exposure apparatus, exposure method, and device manufacturing method having encoders to measure displacement between optical member and measurement mount and between measurement mount and movable body |
JP6478593B2 (ja) * | 2014-11-28 | 2019-03-06 | キヤノン株式会社 | 投影光学系の製造方法、および、デバイス製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH047317U (fr) * | 1990-05-08 | 1992-01-23 | ||
WO2001022480A1 (fr) * | 1999-09-20 | 2001-03-29 | Nikon Corporation | Mecanisme a attelages paralleles, systeme d'exposition et procede de fabrication, et procede de fabrication de dispositifs |
JP2003315087A (ja) * | 2002-04-26 | 2003-11-06 | Mitsutoyo Corp | 検出器位置調整機構 |
JP2004103740A (ja) * | 2002-09-06 | 2004-04-02 | Canon Inc | 露光装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6011458Y2 (ja) * | 1981-12-29 | 1985-04-16 | サムタク株式会社 | ロ−タリ−エンコ−ダ− |
JPS60107722U (ja) * | 1983-12-26 | 1985-07-22 | 株式会社ニコン | モジユラ−型エンコ−ダ |
JPH01291101A (ja) * | 1988-05-18 | 1989-11-22 | Tokyo Electron Ltd | N次元エンコーダ |
JP3142355B2 (ja) * | 1992-03-11 | 2001-03-07 | 敏男 福田 | パラレルリンク機構の運動姿勢演算装置 |
JPH08115128A (ja) * | 1993-07-15 | 1996-05-07 | Agency Of Ind Science & Technol | パラレルリンク機構 |
JPH08178701A (ja) * | 1994-12-27 | 1996-07-12 | Canon Inc | 変位センサ |
JPH10267603A (ja) * | 1996-11-22 | 1998-10-09 | Eizou Nishimura | 位置姿勢検出装置 |
JPH10267642A (ja) * | 1997-03-25 | 1998-10-09 | Eizou Nishimura | 位置姿勢検出装置 |
JPH1133944A (ja) * | 1997-07-24 | 1999-02-09 | Olympus Optical Co Ltd | マイクロパラレルリンク機構 |
JPH11274031A (ja) * | 1998-03-20 | 1999-10-08 | Canon Inc | 露光装置およびデバイス製造方法ならびに位置決め装置 |
-
2005
- 2005-03-09 JP JP2005064687A patent/JP4650619B2/ja active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH047317U (fr) * | 1990-05-08 | 1992-01-23 | ||
WO2001022480A1 (fr) * | 1999-09-20 | 2001-03-29 | Nikon Corporation | Mecanisme a attelages paralleles, systeme d'exposition et procede de fabrication, et procede de fabrication de dispositifs |
JP2003315087A (ja) * | 2002-04-26 | 2003-11-06 | Mitsutoyo Corp | 検出器位置調整機構 |
JP2004103740A (ja) * | 2002-09-06 | 2004-04-02 | Canon Inc | 露光装置 |
Also Published As
Publication number | Publication date |
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JP2006250587A (ja) | 2006-09-21 |
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