JP4642603B2 - プローブカード - Google Patents

プローブカード Download PDF

Info

Publication number
JP4642603B2
JP4642603B2 JP2005244800A JP2005244800A JP4642603B2 JP 4642603 B2 JP4642603 B2 JP 4642603B2 JP 2005244800 A JP2005244800 A JP 2005244800A JP 2005244800 A JP2005244800 A JP 2005244800A JP 4642603 B2 JP4642603 B2 JP 4642603B2
Authority
JP
Japan
Prior art keywords
contactor
pressing member
convex portion
probe card
outer peripheral
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2005244800A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007057438A (ja
JP2007057438A5 (enExample
Inventor
秀一 塚田
俊裕 米沢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2005244800A priority Critical patent/JP4642603B2/ja
Publication of JP2007057438A publication Critical patent/JP2007057438A/ja
Publication of JP2007057438A5 publication Critical patent/JP2007057438A5/ja
Application granted granted Critical
Publication of JP4642603B2 publication Critical patent/JP4642603B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2005244800A 2005-08-25 2005-08-25 プローブカード Expired - Fee Related JP4642603B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005244800A JP4642603B2 (ja) 2005-08-25 2005-08-25 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005244800A JP4642603B2 (ja) 2005-08-25 2005-08-25 プローブカード

Publications (3)

Publication Number Publication Date
JP2007057438A JP2007057438A (ja) 2007-03-08
JP2007057438A5 JP2007057438A5 (enExample) 2008-10-09
JP4642603B2 true JP4642603B2 (ja) 2011-03-02

Family

ID=37921059

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005244800A Expired - Fee Related JP4642603B2 (ja) 2005-08-25 2005-08-25 プローブカード

Country Status (1)

Country Link
JP (1) JP4642603B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8456184B2 (en) 2007-03-14 2013-06-04 Nhk Spring Co., Ltd. Probe card for a semiconductor wafer
WO2008146705A1 (ja) * 2007-05-31 2008-12-04 Advantest Corporation プローブカードの固定装置
JP5015672B2 (ja) * 2007-06-21 2012-08-29 日本電子材料株式会社 プローブカード
JP5188161B2 (ja) * 2007-11-30 2013-04-24 東京エレクトロン株式会社 プローブカード
JP5232555B2 (ja) * 2008-07-23 2013-07-10 スタンレー電気株式会社 光半導体装置モジュール

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6483328B1 (en) * 1995-11-09 2002-11-19 Formfactor, Inc. Probe card for probing wafers with raised contact elements
AU2001250876A1 (en) * 2000-03-17 2001-10-03 Formfactor, Inc. Method and apparatus for planarizing a semiconductor contactor
JP2002267687A (ja) * 2001-03-12 2002-09-18 Advantest Corp プローブカード及び試験装置
JP3621938B2 (ja) * 2002-08-09 2005-02-23 日本電子材料株式会社 プローブカード
JP2004205487A (ja) * 2002-11-01 2004-07-22 Tokyo Electron Ltd プローブカードの固定機構

Also Published As

Publication number Publication date
JP2007057438A (ja) 2007-03-08

Similar Documents

Publication Publication Date Title
TWI396846B (zh) 探針卡
JP3621938B2 (ja) プローブカード
CN101883986B (zh) 探针装置
CN100520415C (zh) 探针卡
JP4860242B2 (ja) プローブ装置
JP2008039768A (ja) プローブカード
KR100915179B1 (ko) 프로브 카드
JP3096197B2 (ja) プローブカード
KR20090040604A (ko) 웨이퍼 테스트용 프로브 카드
JP4642603B2 (ja) プローブカード
JP2003324132A (ja) テスト用基板
JP2007057439A (ja) プローブ装置及び被検査体とプローブとの接触圧の調整方法
JP4498829B2 (ja) カードホルダ
WO2023227538A1 (en) Probe card with improved temperature control
JP4395429B2 (ja) コンタクトユニットおよびコンタクトユニットを用いた検査システム
JP3313031B2 (ja) プローブカード
JP2017173102A (ja) 電気検査ヘッド
JPH095355A (ja) プローブカード
JP2006214732A (ja) プローブカード用補強板

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080822

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080822

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20100826

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100907

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20101102

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20101130

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20101201

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131210

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees