JP4638682B2 - 水晶振動子の製造方法 - Google Patents

水晶振動子の製造方法 Download PDF

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Publication number
JP4638682B2
JP4638682B2 JP2004083752A JP2004083752A JP4638682B2 JP 4638682 B2 JP4638682 B2 JP 4638682B2 JP 2004083752 A JP2004083752 A JP 2004083752A JP 2004083752 A JP2004083752 A JP 2004083752A JP 4638682 B2 JP4638682 B2 JP 4638682B2
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Japan
Prior art keywords
etching
leg
metal film
crystal
width
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Expired - Fee Related
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JP2004083752A
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Japanese (ja)
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JP2005277483A5 (https=
JP2005277483A (ja
Inventor
泉 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Citizen Holdings Co Ltd
Citizen Watch Co Ltd
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Citizen Holdings Co Ltd
Citizen Watch Co Ltd
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Priority to JP2004083752A priority Critical patent/JP4638682B2/ja
Publication of JP2005277483A publication Critical patent/JP2005277483A/ja
Publication of JP2005277483A5 publication Critical patent/JP2005277483A5/ja
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Publication of JP4638682B2 publication Critical patent/JP4638682B2/ja
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Expired - Fee Related legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2004083752A 2004-03-23 2004-03-23 水晶振動子の製造方法 Expired - Fee Related JP4638682B2 (ja)

Priority Applications (1)

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JP2004083752A JP4638682B2 (ja) 2004-03-23 2004-03-23 水晶振動子の製造方法

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Application Number Priority Date Filing Date Title
JP2004083752A JP4638682B2 (ja) 2004-03-23 2004-03-23 水晶振動子の製造方法

Publications (3)

Publication Number Publication Date
JP2005277483A JP2005277483A (ja) 2005-10-06
JP2005277483A5 JP2005277483A5 (https=) 2007-07-05
JP4638682B2 true JP4638682B2 (ja) 2011-02-23

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JP2004083752A Expired - Fee Related JP4638682B2 (ja) 2004-03-23 2004-03-23 水晶振動子の製造方法

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JP (1) JP4638682B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6018962B2 (ja) * 2013-03-28 2016-11-02 シチズンファインデバイス株式会社 水晶振動子の製造方法
CH716605A1 (fr) * 2019-09-16 2021-03-31 Richemont Int Sa Procédé de fabrication d'une pluralité de résonateurs sur une plaquette.

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01179513A (ja) * 1988-01-09 1989-07-17 Kinseki Ltd 水晶振動子のエッチング加工方法
JPH10270967A (ja) * 1997-03-26 1998-10-09 Seiko Epson Corp 水晶振動子の製造方法
JP3729249B2 (ja) * 2000-09-01 2005-12-21 セイコーエプソン株式会社 振動片の製造方法、振動片、振動片を有する振動子、発振器及び携帯電話装置
JP2005277482A (ja) * 2004-03-23 2005-10-06 Citizen Watch Co Ltd 水晶振動子の製造方法および振動ジャイロ

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JP2005277483A (ja) 2005-10-06

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