JP4637914B2 - 電気的構成部材 - Google Patents
電気的構成部材 Download PDFInfo
- Publication number
- JP4637914B2 JP4637914B2 JP2007541701A JP2007541701A JP4637914B2 JP 4637914 B2 JP4637914 B2 JP 4637914B2 JP 2007541701 A JP2007541701 A JP 2007541701A JP 2007541701 A JP2007541701 A JP 2007541701A JP 4637914 B2 JP4637914 B2 JP 4637914B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductor
- region
- conductor path
- electrical component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004020 conductor Substances 0.000 claims description 151
- 238000002161 passivation Methods 0.000 claims description 56
- 239000000758 substrate Substances 0.000 claims description 38
- 230000003993 interaction Effects 0.000 claims description 32
- 239000002775 capsule Substances 0.000 claims description 15
- 239000007788 liquid Substances 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 7
- 235000011837 pasties Nutrition 0.000 claims description 7
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 6
- 229920005591 polysilicon Polymers 0.000 claims description 6
- 238000005266 casting Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000011156 evaluation Methods 0.000 claims description 2
- 241000269435 Rana <genus> Species 0.000 claims 2
- 238000010292 electrical insulation Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 202
- 230000007797 corrosion Effects 0.000 description 13
- 238000005260 corrosion Methods 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 230000005669 field effect Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 235000012239 silicon dioxide Nutrition 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005536 corrosion prevention Methods 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000012491 analyte Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS
- G01N27/4148—Integrated circuits therefor, e.g. fabricated by CMOS processing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Electrochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Molecular Biology (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2004/013464 WO2006056226A1 (de) | 2004-11-26 | 2004-11-26 | Elektrisches bauelement |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008522139A JP2008522139A (ja) | 2008-06-26 |
| JP2008522139A5 JP2008522139A5 (https=) | 2010-11-25 |
| JP4637914B2 true JP4637914B2 (ja) | 2011-02-23 |
Family
ID=34959762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007541701A Expired - Fee Related JP4637914B2 (ja) | 2004-11-26 | 2004-11-26 | 電気的構成部材 |
Country Status (5)
| Country | Link |
|---|---|
| US (2) | US7777283B2 (https=) |
| EP (1) | EP1815238B1 (https=) |
| JP (1) | JP4637914B2 (https=) |
| CN (1) | CN101048655A (https=) |
| WO (1) | WO2006056226A1 (https=) |
Families Citing this family (53)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8262900B2 (en) | 2006-12-14 | 2012-09-11 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US8349167B2 (en) | 2006-12-14 | 2013-01-08 | Life Technologies Corporation | Methods and apparatus for detecting molecular interactions using FET arrays |
| US11339430B2 (en) | 2007-07-10 | 2022-05-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US7948015B2 (en) | 2006-12-14 | 2011-05-24 | Life Technologies Corporation | Methods and apparatus for measuring analytes using large scale FET arrays |
| US8099757B2 (en) | 2007-10-15 | 2012-01-17 | Time Warner Cable Inc. | Methods and apparatus for revenue-optimized delivery of content in a network |
| US8813143B2 (en) | 2008-02-26 | 2014-08-19 | Time Warner Enterprises LLC | Methods and apparatus for business-based network resource allocation |
| US7947524B2 (en) * | 2008-09-30 | 2011-05-24 | Stion Corporation | Humidity control and method for thin film photovoltaic materials |
| US20100137143A1 (en) | 2008-10-22 | 2010-06-03 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes |
| US20100301398A1 (en) | 2009-05-29 | 2010-12-02 | Ion Torrent Systems Incorporated | Methods and apparatus for measuring analytes |
| US8776573B2 (en) | 2009-05-29 | 2014-07-15 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
| US20120261274A1 (en) | 2009-05-29 | 2012-10-18 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
| US8487790B2 (en) | 2010-06-30 | 2013-07-16 | Life Technologies Corporation | Chemical detection circuit including a serializer circuit |
| EP2588850B1 (en) | 2010-06-30 | 2016-12-28 | Life Technologies Corporation | Method for dry testing isfet arrays |
| AU2011226767B1 (en) | 2010-06-30 | 2011-11-10 | Life Technologies Corporation | Ion-sensing charge-accumulation circuits and methods |
| US11307166B2 (en) | 2010-07-01 | 2022-04-19 | Life Technologies Corporation | Column ADC |
| CN103168341B (zh) | 2010-07-03 | 2016-10-05 | 生命科技公司 | 具有轻度掺杂的排出装置的化学敏感的传感器 |
| EP2617061B1 (en) | 2010-09-15 | 2021-06-30 | Life Technologies Corporation | Methods and apparatus for measuring analytes |
| JP5913323B2 (ja) | 2010-09-24 | 2016-04-27 | ライフ テクノロジーズ コーポレーション | マッチドペアトランジスタ回路 |
| US20120167392A1 (en) * | 2010-12-30 | 2012-07-05 | Stmicroelectronics Pte. Ltd. | Razor with chemical and biological sensor |
| KR20130045047A (ko) * | 2011-10-25 | 2013-05-03 | 에스케이하이닉스 주식회사 | 3차원 구조의 비휘발성 메모리 소자 및 그 제조 방법 |
| US9970984B2 (en) | 2011-12-01 | 2018-05-15 | Life Technologies Corporation | Method and apparatus for identifying defects in a chemical sensor array |
| US9027400B2 (en) | 2011-12-02 | 2015-05-12 | Stmicroelectronics Pte Ltd. | Tunable humidity sensor with integrated heater |
| US9019688B2 (en) | 2011-12-02 | 2015-04-28 | Stmicroelectronics Pte Ltd. | Capacitance trimming with an integrated heater |
| CN102637641B (zh) * | 2012-03-20 | 2015-05-20 | 华中科技大学 | 一种相变随机存储器阵列与外围电路芯片的集成方法 |
| US8786331B2 (en) | 2012-05-29 | 2014-07-22 | Life Technologies Corporation | System for reducing noise in a chemical sensor array |
| US8862155B2 (en) | 2012-08-30 | 2014-10-14 | Time Warner Cable Enterprises Llc | Apparatus and methods for enabling location-based services within a premises |
| US9091647B2 (en) | 2012-09-08 | 2015-07-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Direct sensing bioFETs and methods of manufacture |
| US9080968B2 (en) | 2013-01-04 | 2015-07-14 | Life Technologies Corporation | Methods and systems for point of use removal of sacrificial material |
| US9841398B2 (en) | 2013-01-08 | 2017-12-12 | Life Technologies Corporation | Methods for manufacturing well structures for low-noise chemical sensors |
| US8963216B2 (en) | 2013-03-13 | 2015-02-24 | Life Technologies Corporation | Chemical sensor with sidewall spacer sensor surface |
| CN105283758B (zh) * | 2013-03-15 | 2018-06-05 | 生命科技公司 | 具有一致传感器表面区域的化学传感器 |
| US20140264471A1 (en) | 2013-03-15 | 2014-09-18 | Life Technologies Corporation | Chemical device with thin conductive element |
| US9835585B2 (en) | 2013-03-15 | 2017-12-05 | Life Technologies Corporation | Chemical sensor with protruded sensor surface |
| CN105264366B (zh) * | 2013-03-15 | 2019-04-16 | 生命科技公司 | 具有一致传感器表面区域的化学传感器 |
| US9066153B2 (en) | 2013-03-15 | 2015-06-23 | Time Warner Cable Enterprises Llc | Apparatus and methods for multicast delivery of content in a content delivery network |
| US10368255B2 (en) | 2017-07-25 | 2019-07-30 | Time Warner Cable Enterprises Llc | Methods and apparatus for client-based dynamic control of connections to co-existing radio access networks |
| US20140336063A1 (en) | 2013-05-09 | 2014-11-13 | Life Technologies Corporation | Windowed Sequencing |
| US10458942B2 (en) | 2013-06-10 | 2019-10-29 | Life Technologies Corporation | Chemical sensor array having multiple sensors per well |
| US9313568B2 (en) | 2013-07-23 | 2016-04-12 | Chicago Custom Acoustics, Inc. | Custom earphone with dome in the canal |
| US11540148B2 (en) | 2014-06-11 | 2022-12-27 | Time Warner Cable Enterprises Llc | Methods and apparatus for access point location |
| US10028025B2 (en) | 2014-09-29 | 2018-07-17 | Time Warner Cable Enterprises Llc | Apparatus and methods for enabling presence-based and use-based services |
| US9935833B2 (en) | 2014-11-05 | 2018-04-03 | Time Warner Cable Enterprises Llc | Methods and apparatus for determining an optimized wireless interface installation configuration |
| CN111505087A (zh) | 2014-12-18 | 2020-08-07 | 生命科技公司 | 使用大规模 fet 阵列测量分析物的方法和装置 |
| EP3234576B1 (en) | 2014-12-18 | 2023-11-22 | Life Technologies Corporation | High data rate integrated circuit with transmitter configuration |
| US10077472B2 (en) | 2014-12-18 | 2018-09-18 | Life Technologies Corporation | High data rate integrated circuit with power management |
| US10327187B2 (en) | 2015-12-04 | 2019-06-18 | Time Warner Cable Enterprises Llc | Apparatus and method for wireless network extensibility and enhancement |
| US9986578B2 (en) | 2015-12-04 | 2018-05-29 | Time Warner Cable Enterprises Llc | Apparatus and methods for selective data network access |
| US9918345B2 (en) | 2016-01-20 | 2018-03-13 | Time Warner Cable Enterprises Llc | Apparatus and method for wireless network services in moving vehicles |
| US10492034B2 (en) | 2016-03-07 | 2019-11-26 | Time Warner Cable Enterprises Llc | Apparatus and methods for dynamic open-access networks |
| US10586023B2 (en) | 2016-04-21 | 2020-03-10 | Time Warner Cable Enterprises Llc | Methods and apparatus for secondary content management and fraud prevention |
| US10164858B2 (en) | 2016-06-15 | 2018-12-25 | Time Warner Cable Enterprises Llc | Apparatus and methods for monitoring and diagnosing a wireless network |
| US10645547B2 (en) | 2017-06-02 | 2020-05-05 | Charter Communications Operating, Llc | Apparatus and methods for providing wireless service in a venue |
| US10638361B2 (en) | 2017-06-06 | 2020-04-28 | Charter Communications Operating, Llc | Methods and apparatus for dynamic control of connections to co-existing radio access networks |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4644380A (en) * | 1977-12-08 | 1987-02-17 | University Of Pennsylvania | Substance-sensitive electrical structures |
| GB2096825A (en) | 1981-04-09 | 1982-10-20 | Sibbald Alastair | Chemical sensitive semiconductor field effect transducer |
| US4743954A (en) * | 1985-06-07 | 1988-05-10 | University Of Utah | Integrated circuit for a chemical-selective sensor with voltage output |
| DE3637513A1 (de) | 1986-11-04 | 1988-05-11 | Semikron Elektronik Gmbh | Verfahren zum herstellen feinstrukturierter kontaktelektroden von leistungs-halbleiterbauelementen |
| KR940010562B1 (ko) * | 1991-09-06 | 1994-10-24 | 손병기 | Ta_2O_5수소이온 감지막을 갖는 감이온 전계효과 트랜지스터의 제조방법 |
| DE19641777C2 (de) | 1996-10-10 | 2001-09-27 | Micronas Gmbh | Verfahren zum Herstellen eines Sensors mit einer Metallelektrode in einer MOS-Anordnung |
| US5944970A (en) * | 1997-04-29 | 1999-08-31 | Honeywell Inc. | Solid state electrochemical sensors |
| US6572748B1 (en) * | 1998-03-10 | 2003-06-03 | Micronas Gmbh | Reference electrode |
| EP1070244A4 (en) * | 1998-04-09 | 2002-04-17 | California Inst Of Techn | ELECTRONIC TECHNIQUES USED FOR THE DETECTION OF ANALYTES |
| AU6099100A (en) * | 1999-07-14 | 2001-02-05 | Veridicom, Inc. | Ultra-rugged i.c. sensor and method of making the same |
| US6482639B2 (en) | 2000-06-23 | 2002-11-19 | The United States Of America As Represented By The Secretary Of The Navy | Microelectronic device and method for label-free detection and quantification of biological and chemical molecules |
| GB2370410A (en) * | 2000-12-22 | 2002-06-26 | Seiko Epson Corp | Thin film transistor sensor |
| WO2003014722A1 (en) | 2001-08-08 | 2003-02-20 | The Arizona Board Of Regents | Nucleic acid field effect transistor |
| JP2003322633A (ja) * | 2002-05-01 | 2003-11-14 | Seiko Epson Corp | センサセル、バイオセンサ及びこれらの製造方法 |
| JP2005016963A (ja) * | 2003-06-23 | 2005-01-20 | Canon Inc | 化学センサ、化学センサ装置 |
| GB0322010D0 (en) * | 2003-09-19 | 2003-10-22 | Univ Cambridge Tech | Detection of molecular interactions using field effect transistors |
-
2004
- 2004-11-26 US US11/791,501 patent/US7777283B2/en not_active Expired - Fee Related
- 2004-11-26 CN CN200480044289.1A patent/CN101048655A/zh active Pending
- 2004-11-26 EP EP04803308A patent/EP1815238B1/de not_active Expired - Lifetime
- 2004-11-26 JP JP2007541701A patent/JP4637914B2/ja not_active Expired - Fee Related
- 2004-11-26 WO PCT/EP2004/013464 patent/WO2006056226A1/de not_active Ceased
-
2010
- 2010-07-21 US US12/840,597 patent/US8084792B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2008522139A (ja) | 2008-06-26 |
| WO2006056226A1 (de) | 2006-06-01 |
| US20100283087A1 (en) | 2010-11-11 |
| EP1815238A1 (de) | 2007-08-08 |
| US8084792B2 (en) | 2011-12-27 |
| CN101048655A (zh) | 2007-10-03 |
| US7777283B2 (en) | 2010-08-17 |
| EP1815238B1 (de) | 2008-07-16 |
| US20070290235A1 (en) | 2007-12-20 |
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