JP4629460B2 - 洗浄方法および洗浄装置 - Google Patents
洗浄方法および洗浄装置 Download PDFInfo
- Publication number
- JP4629460B2 JP4629460B2 JP2005057688A JP2005057688A JP4629460B2 JP 4629460 B2 JP4629460 B2 JP 4629460B2 JP 2005057688 A JP2005057688 A JP 2005057688A JP 2005057688 A JP2005057688 A JP 2005057688A JP 4629460 B2 JP4629460 B2 JP 4629460B2
- Authority
- JP
- Japan
- Prior art keywords
- support
- cleaned
- cleaning
- state
- support rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Images
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- Cleaning Or Drying Semiconductors (AREA)
- Chemical Vapour Deposition (AREA)
- Cleaning In General (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005057688A JP4629460B2 (ja) | 2005-03-02 | 2005-03-02 | 洗浄方法および洗浄装置 |
TW095106782A TW200631683A (en) | 2005-03-02 | 2006-03-01 | Cleaning method and cleaning device |
CN2006100594433A CN1827244B (zh) | 2005-03-02 | 2006-03-02 | 清洗方法以及清洗装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005057688A JP4629460B2 (ja) | 2005-03-02 | 2005-03-02 | 洗浄方法および洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006245217A JP2006245217A (ja) | 2006-09-14 |
JP4629460B2 true JP4629460B2 (ja) | 2011-02-09 |
Family
ID=36945916
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005057688A Expired - Fee Related JP4629460B2 (ja) | 2005-03-02 | 2005-03-02 | 洗浄方法および洗浄装置 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP4629460B2 (zh) |
CN (1) | CN1827244B (zh) |
TW (1) | TW200631683A (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102925857A (zh) * | 2011-10-23 | 2013-02-13 | 常州碳元科技发展有限公司 | 具有保护层结构的碳层材料的制备方法 |
CN103894380A (zh) * | 2014-03-24 | 2014-07-02 | 上海华力微电子有限公司 | 带清洗枪的竖式清洗机 |
CN105312547A (zh) * | 2015-12-08 | 2016-02-10 | 广西长城矿山机械设备制造有限公司 | 一种铸件清洗支撑台 |
CN105964626A (zh) * | 2016-05-09 | 2016-09-28 | 京东方科技集团股份有限公司 | 一种基板清理装置 |
CN105965611A (zh) * | 2016-05-10 | 2016-09-28 | 安徽坤昌家具有限公司 | 一种木材加工用移动装置 |
TWI667081B (zh) * | 2018-05-10 | 2019-08-01 | 弘塑科技股份有限公司 | 清洗裝置及方法 |
CN108707877B (zh) * | 2018-08-03 | 2024-07-05 | 深圳市石金科技股份有限公司 | 一种化学气相沉积炉的支承装置 |
CN109201613B (zh) * | 2018-09-14 | 2021-07-20 | 宁波高新区意川汽车零部件有限公司 | 一种汽车零部件清洗装置 |
CN111906102B (zh) * | 2019-05-08 | 2023-02-14 | 北京北方华创微电子装备有限公司 | 清洗腔室及清洗设备 |
CN114008242A (zh) * | 2019-06-21 | 2022-02-01 | 朗姆研究公司 | 双向转位装置 |
CN110935703B (zh) * | 2019-12-17 | 2021-04-30 | 无锡亚电智能装备有限公司 | 一种炉管清洗设备及清洗方法 |
CN112547642B (zh) * | 2020-11-30 | 2021-11-12 | 徐桂红 | 一种便携式的眼科器械清洗消毒装置 |
CN115646972B (zh) * | 2022-12-15 | 2023-05-30 | 湖南第一师范学院 | 一种计算机显示屏加工用清洁装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121248A (ja) * | 1982-12-27 | 1984-07-13 | Tomoya Satou | 動力変換装置 |
JPS6037452A (ja) * | 1983-08-08 | 1985-02-26 | Agency Of Ind Science & Technol | 案内溝による回転・往復動変換装置 |
JPH04243588A (ja) * | 1991-01-23 | 1992-08-31 | Fujitsu Ltd | 反応管洗浄装置 |
WO2004012259A1 (ja) * | 2002-07-25 | 2004-02-05 | Tokyo Electron Limited | 基板処理容器 |
JP2004060769A (ja) * | 2002-07-29 | 2004-02-26 | Toyota Motor Corp | 動力機構 |
JP2004111902A (ja) * | 2002-07-26 | 2004-04-08 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100897431B1 (ko) * | 2001-11-27 | 2009-05-14 | 도쿄엘렉트론가부시키가이샤 | 액처리장치 및 액처리방법 |
TW200405405A (en) * | 2002-08-19 | 2004-04-01 | Sumitomo Prec Prod Co | Vertical movement substrate processing apparatus and substrate processing system having the same |
-
2005
- 2005-03-02 JP JP2005057688A patent/JP4629460B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-01 TW TW095106782A patent/TW200631683A/zh unknown
- 2006-03-02 CN CN2006100594433A patent/CN1827244B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59121248A (ja) * | 1982-12-27 | 1984-07-13 | Tomoya Satou | 動力変換装置 |
JPS6037452A (ja) * | 1983-08-08 | 1985-02-26 | Agency Of Ind Science & Technol | 案内溝による回転・往復動変換装置 |
JPH04243588A (ja) * | 1991-01-23 | 1992-08-31 | Fujitsu Ltd | 反応管洗浄装置 |
WO2004012259A1 (ja) * | 2002-07-25 | 2004-02-05 | Tokyo Electron Limited | 基板処理容器 |
JP2004111902A (ja) * | 2002-07-26 | 2004-04-08 | Dainippon Screen Mfg Co Ltd | 基板処理方法および基板処理装置 |
JP2004060769A (ja) * | 2002-07-29 | 2004-02-26 | Toyota Motor Corp | 動力機構 |
Also Published As
Publication number | Publication date |
---|---|
CN1827244B (zh) | 2010-12-01 |
JP2006245217A (ja) | 2006-09-14 |
CN1827244A (zh) | 2006-09-06 |
TW200631683A (en) | 2006-09-16 |
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