JP4629460B2 - 洗浄方法および洗浄装置 - Google Patents

洗浄方法および洗浄装置 Download PDF

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Publication number
JP4629460B2
JP4629460B2 JP2005057688A JP2005057688A JP4629460B2 JP 4629460 B2 JP4629460 B2 JP 4629460B2 JP 2005057688 A JP2005057688 A JP 2005057688A JP 2005057688 A JP2005057688 A JP 2005057688A JP 4629460 B2 JP4629460 B2 JP 4629460B2
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JP
Japan
Prior art keywords
support
cleaned
cleaning
state
support rods
Prior art date
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Expired - Fee Related
Application number
JP2005057688A
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English (en)
Japanese (ja)
Other versions
JP2006245217A (ja
Inventor
卓生 松下
哲彦 田村
真行 森永
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Corp
Panasonic Holdings Corp
Original Assignee
Panasonic Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Panasonic Corp, Matsushita Electric Industrial Co Ltd filed Critical Panasonic Corp
Priority to JP2005057688A priority Critical patent/JP4629460B2/ja
Priority to TW095106782A priority patent/TW200631683A/zh
Priority to CN2006100594433A priority patent/CN1827244B/zh
Publication of JP2006245217A publication Critical patent/JP2006245217A/ja
Application granted granted Critical
Publication of JP4629460B2 publication Critical patent/JP4629460B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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  • Cleaning Or Drying Semiconductors (AREA)
  • Chemical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2005057688A 2005-03-02 2005-03-02 洗浄方法および洗浄装置 Expired - Fee Related JP4629460B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005057688A JP4629460B2 (ja) 2005-03-02 2005-03-02 洗浄方法および洗浄装置
TW095106782A TW200631683A (en) 2005-03-02 2006-03-01 Cleaning method and cleaning device
CN2006100594433A CN1827244B (zh) 2005-03-02 2006-03-02 清洗方法以及清洗装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005057688A JP4629460B2 (ja) 2005-03-02 2005-03-02 洗浄方法および洗浄装置

Publications (2)

Publication Number Publication Date
JP2006245217A JP2006245217A (ja) 2006-09-14
JP4629460B2 true JP4629460B2 (ja) 2011-02-09

Family

ID=36945916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005057688A Expired - Fee Related JP4629460B2 (ja) 2005-03-02 2005-03-02 洗浄方法および洗浄装置

Country Status (3)

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JP (1) JP4629460B2 (zh)
CN (1) CN1827244B (zh)
TW (1) TW200631683A (zh)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102925857A (zh) * 2011-10-23 2013-02-13 常州碳元科技发展有限公司 具有保护层结构的碳层材料的制备方法
CN103894380A (zh) * 2014-03-24 2014-07-02 上海华力微电子有限公司 带清洗枪的竖式清洗机
CN105312547A (zh) * 2015-12-08 2016-02-10 广西长城矿山机械设备制造有限公司 一种铸件清洗支撑台
CN105964626A (zh) * 2016-05-09 2016-09-28 京东方科技集团股份有限公司 一种基板清理装置
CN105965611A (zh) * 2016-05-10 2016-09-28 安徽坤昌家具有限公司 一种木材加工用移动装置
TWI667081B (zh) * 2018-05-10 2019-08-01 弘塑科技股份有限公司 清洗裝置及方法
CN108707877B (zh) * 2018-08-03 2024-07-05 深圳市石金科技股份有限公司 一种化学气相沉积炉的支承装置
CN109201613B (zh) * 2018-09-14 2021-07-20 宁波高新区意川汽车零部件有限公司 一种汽车零部件清洗装置
CN111906102B (zh) * 2019-05-08 2023-02-14 北京北方华创微电子装备有限公司 清洗腔室及清洗设备
CN114008242A (zh) * 2019-06-21 2022-02-01 朗姆研究公司 双向转位装置
CN110935703B (zh) * 2019-12-17 2021-04-30 无锡亚电智能装备有限公司 一种炉管清洗设备及清洗方法
CN112547642B (zh) * 2020-11-30 2021-11-12 徐桂红 一种便携式的眼科器械清洗消毒装置
CN115646972B (zh) * 2022-12-15 2023-05-30 湖南第一师范学院 一种计算机显示屏加工用清洁装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121248A (ja) * 1982-12-27 1984-07-13 Tomoya Satou 動力変換装置
JPS6037452A (ja) * 1983-08-08 1985-02-26 Agency Of Ind Science & Technol 案内溝による回転・往復動変換装置
JPH04243588A (ja) * 1991-01-23 1992-08-31 Fujitsu Ltd 反応管洗浄装置
WO2004012259A1 (ja) * 2002-07-25 2004-02-05 Tokyo Electron Limited 基板処理容器
JP2004060769A (ja) * 2002-07-29 2004-02-26 Toyota Motor Corp 動力機構
JP2004111902A (ja) * 2002-07-26 2004-04-08 Dainippon Screen Mfg Co Ltd 基板処理方法および基板処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100897431B1 (ko) * 2001-11-27 2009-05-14 도쿄엘렉트론가부시키가이샤 액처리장치 및 액처리방법
TW200405405A (en) * 2002-08-19 2004-04-01 Sumitomo Prec Prod Co Vertical movement substrate processing apparatus and substrate processing system having the same

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59121248A (ja) * 1982-12-27 1984-07-13 Tomoya Satou 動力変換装置
JPS6037452A (ja) * 1983-08-08 1985-02-26 Agency Of Ind Science & Technol 案内溝による回転・往復動変換装置
JPH04243588A (ja) * 1991-01-23 1992-08-31 Fujitsu Ltd 反応管洗浄装置
WO2004012259A1 (ja) * 2002-07-25 2004-02-05 Tokyo Electron Limited 基板処理容器
JP2004111902A (ja) * 2002-07-26 2004-04-08 Dainippon Screen Mfg Co Ltd 基板処理方法および基板処理装置
JP2004060769A (ja) * 2002-07-29 2004-02-26 Toyota Motor Corp 動力機構

Also Published As

Publication number Publication date
CN1827244B (zh) 2010-12-01
JP2006245217A (ja) 2006-09-14
CN1827244A (zh) 2006-09-06
TW200631683A (en) 2006-09-16

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