JP4616231B2 - Sheet sticking device and sticking method - Google Patents

Description

  The present invention relates to a sheet sticking device and a sticking method, in which intermittent cuts are formed in a belt-like sheet provided with an adhesive layer on one side, and the inside surrounded by the cuts is stuck to an adherend as an adhesive sheet. In particular, the present invention relates to a sheet sticking apparatus and a sticking method that are suitable.

  A plate-like member such as a semiconductor wafer (hereinafter simply referred to as “wafer”) is mounted on a ring frame via a dicing tape, or a protective sheet or the like is affixed to the wafer circuit surface in the processing step. Has been done.

  As a method for applying the dicing tape, the separator (release sheet) to which the dicing tape is temporarily attached is peeled off while the strip-shaped dicing tape is fed out, and the dicing tape is attached to the ring frame and the wafer. A configuration is known in which cutting is performed in a closed loop shape within the surface of the ring frame, and an unnecessary tape portion on the outer peripheral side is wound and collected (see, for example, Patent Document 1). In addition, when the strip-shaped tape base material temporarily attached to the strip-shaped base sheet (release sheet) is fed out, a closed loop-shaped cut is formed in the tape base material to form a dicing tape having a predetermined shape, and the dicing tape is peeled off. A method of peeling from a base sheet at the tip of a plate and attaching it to a ring frame and a wafer is known (see Patent Document 2).

JP 2003-257898 A JP 2006-073920 A

  However, in the sheet sticking method of Patent Document 1, since the cutter blade is moved on the ring frame to cut the dicing tape into a substantially circular shape, the cutter blade may damage the ring frame, and the cutter blade. There is an inherent problem of shortening its own service life. In this regard, the method described in Patent Document 2 forms a closed loop-shaped cut substantially corresponding to the outer shape of the ring frame using a die cut roller, and affixes the sheet region surrounded by the cut as a dicing tape. Therefore, the problem peculiar to the method of Patent Document 1 can be solved.

  However, in the sheet sticking method described in Patent Document 2, a strip-shaped original fabric in which a base sheet is temporarily attached to an adhesive layer provided on one side of the sheet is used, and the layer structure of the original fabric is used. However, there is an inconvenience that a base sheet is essential and wasteful. This is because the incision formed in the tape base material has a continuous closed loop shape, and the inner dicing tape surrounded by the incision must be temporarily attached onto the base sheet. In addition, since the base sheet is essential, the roll diameter when the roll-shaped raw fabric is used is not too large. In addition, when a raw roll with a small roll diameter is used, the consumption cycle of the raw fabric Is shortened, and the work of attaching the original fabric to the support means becomes frequent, resulting in inconvenience that the work efficiency is lowered.

[Object of invention]
The present invention has been devised by paying attention to such inconveniences, and the purpose of the present invention is to use a belt-like sheet having a simple layer structure in which an adhesive layer is provided on one side of the sheet. It is an object to provide a sheet sticking apparatus and a sticking method suitable for sticking an adhesive sheet formed by intermittent cutting along a locus of a closed loop on a sheet to an adherend.

In order to achieve the above object, an adhesive layer is provided on one side, and an adhesive sheet formed by intermittent notches along a substantially closed loop-like trajectory at predetermined intervals, and an outer side of the adhesive sheet In a sheet sticking apparatus that uses a belt-like sheet provided with a tearing portion provided in an unnecessary sheet portion located at a position, draws the belt-like sheet and sticks the adhesive sheet to an adherend supported on a table,
A pressing means that presses the adhesive sheet and affixes the adhesive sheet to an adherend, and a tearing force is applied to the intermittent cuts and tears to separate the adhesive sheet from the unnecessary sheet portion. It is configured to include tearing means.

  In the present invention, the tearing means is disposed on a table that supports the adherend, and the tearing means is located on the adhesive layer side of the unnecessary sheet portion and is provided on both sides in the width direction of the belt-like sheet. A member, a clamper positioned on the non-adhesive layer side of the unnecessary sheet portion, and sandwiching the unnecessary sheet portion between the movable member, and the belt-shaped sheet by driving the movable member and the clamper in a tearing direction. It is possible to adopt a configuration that includes a drive device that expands the.

  Further, the clamper is provided so as to be retractable at a position where it does not interfere with the pressing means when the adhesive sheet is attached to the adherend.

Furthermore, the present invention is provided with an adhesive sheet provided on one side, an adhesive sheet formed by intermittent cuts along a substantially closed loop-like trajectory at predetermined intervals, and an outer side of the adhesive sheet. In a sheet sticking method for sticking the adhesive sheet to an adherend supported on a table by using a belt-like sheet provided with a tearing portion provided in an unnecessary sheet portion positioned, and extending the belt-like sheet.
After applying the adhesive sheet to the adherend by pressing the adhesive sheet, the intermittent cut and tearing part is applied to separate the adhesive sheet and the unnecessary sheet part, A method of winding up the unnecessary sheet portion is employed.

  In the sheet affixing method, the incision is composed of an incision portion and a non-incision portion, and a breakage prevention incision longer than the length of the non-incision portion is provided on the inside and / or outside of the non-incision portion. When separating the sheet and the unnecessary sheet portion, it is preferable to employ a method in which the breakage prevention cuts a break in a direction away from the locus of the closed loop.

  According to the present invention, the adhesive sheet is applied to the adherend by the pressing means, and then the tearing force is applied via the tearing means. Therefore, the release sheet for temporarily attaching the adhesive sheet is provided. It is possible to use a belt-type sheet that does not, and the release sheet is not wasted. In addition, since the tearing force is applied in a state where the adhesive sheet is attached to the adherend, the position where the adhesive sheet is attached can be kept firmly and separated from the unnecessary sheet portion. Furthermore, since a strip-shaped sheet having no release sheet can be used, the roll diameter does not become extremely large when the strip-shaped sheet is wound into a roll and fed out, and the release sheet having the same diameter is used. Compared with a roll with a roll, the frequency of roll replacement can be reduced to improve the sticking efficiency.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a schematic perspective view of a sheet sticking apparatus 10 according to the present embodiment, FIG. 2 is a schematic perspective view of a table, and FIG. 3 is a partial cross-sectional view of the table. ing. In these drawings, the belt-like sheet S has a two-layer structure composed of a sheet base material S1 extending in a belt shape and an adhesive layer A provided on one side of the sheet base material S1. The adhesive sheet S2 is formed by intermittent cuts 11 along a substantially closed loop-like locus at positions spaced apart from each other along the extending direction of the belt-like sheet S, except for the adhesive sheet S2. The outer region is formed as an unnecessary sheet portion S3, and in the region of the unnecessary sheet portion S3, a tear portion formed by a perforation or a slit along the feeding direction of the belt-like sheet S at the substantially central portion in the width direction of the belt-like sheet S. 12 is formed. The tearing portions 12 extend linearly between adjacent closed-loop cuts 11, but the tearing portions 12 are formed so as not to be continuous.

  The notch 11 has a notch 11A and a non-notch 11B alternately arranged along a substantially circular locus, and the notch 11B has a resistance when separating the adhesive sheet S2 and the unnecessary sheet part S3. It is set to a short length to keep it small. In other words, the length and number of the non-cut portions 11B can be easily separated without causing the adhesive sheet S2 to inadvertently fall out of the belt-like sheet S that does not have the release sheet and fall off. It suffices if it is set as follows. In the present embodiment, a fracture preventing cut 11C is formed inside the non-cut portion 11B. This notch 11C for preventing breakage is for damming the break so that the inner region of the adhesive sheet S2 is not greatly broken when a tearing force is applied, and the non-notched portion 11B is adjacent to the notch 11C. If it can cut so that it may connect between the edge parts of the notch | incision 11A which fits, the notch | incision 11C for fracture | rupture prevention will not act directly. In addition, even if the notch | incision 11C for fracture | rupture prevention is provided longer than the length of the non-notch | incision part 11B, a tearing force is provided and the non-notch | incision part 11B may not be notched | incised, it does not cut | disconnect. It is possible to dam the break that may reach the inner region.

  As shown in FIGS. 1 to 3, the sheet sticking device 10 is configured to function as a mounting device for integrating the wafer W as an adherend and the ring frame RF in this embodiment. Yes. This sheet sticking device 10 presses a belt-like sheet S fed out from a feeding device (not shown) to press the adhesive sheet S2 onto the wafer W and the ring frame RF, and the pressing roller 15 and the wafer W and ring. A table 16 that supports the frame RF, and a tearing means 18 that applies a tearing force to the notch 11 and the tearing portion 12 to separate the adhesive sheet S2 and the unnecessary sheet portion S3 are provided.

  The pressing roller 15 is supported by a single-axis robot 20 extending along the feeding direction of the belt-like sheet S at a side position of the table 16. The pressing roller 15 is provided so as to be movable in a substantially horizontal direction via the single-axis robot 20, and rotates while the pressing roller 15 is in contact with the non-adhesive layer side that is the upper surface side of the belt-like sheet S in the drawing. Thus, the adhesive layer A is attached to the wafer W and the ring frame RF. Here, a guide roller 21 is fixed to one end side (left end side in FIG. 1) of the single-axis robot 20 in a rotatable state, and via a winding device (not shown) disposed above the guide roller 21. The unnecessary sheet portion S3 is configured to be wound up.

  The table 16 includes an elevating table 25 having an upper surface structure capable of sucking and holding the ring frame RF and the wafer W, and a base table 26 positioned on the lower surface side of the elevating table 25. As shown in FIG. 3, an air cylinder (hereinafter referred to as “cylinder”) 27 is provided at the center of the base table 26, and a guide shaft 28 is provided in the vicinity of each corner. The tip (upper end) of the rod 29 is connected to the lower surface of the lifting table 25. Thereby, the lifting table 25 can be moved up and down along the guide shaft 28 with respect to a height position where the bonding sheet S <b> 2 can be attached by the advancement and retreat of the rod 29.

  The tearing means 18 is disposed on the table 16, and a pair is disposed on both sides of the belt-like sheet S in the width direction. This tearing means 18 is located on the adhesive layer A side of the unnecessary sheet portion S3, and on the non-adhesive layer side (upper surface side) of the unnecessary sheet portion S3. The clamper 31 sandwiched between the movable member 30 and the movable member 30 and the clamper 31 are driven in the tearing direction, that is, in the direction of separating along the width direction of the strip-shaped sheet S, so that the strip-shaped sheet S is driven in the width direction. And a cylinder 33 (see FIG. 3) as a driving device that expands. The moving member 30 is provided in a substantially L shape in a side view including a flat surface portion 30A located on the upper surface side of the elevating table 25 and a drooping surface portion 30B directed downward from the outer end portion of the flat surface portion 30A. The rod 33A of the cylinder 33 is fixed to the hanging surface part 30B. Thereby, when the rod 33A advances and retreats, the pair of moving members 30 can be separated from each other and can approach each other. When the rod 33A is separated, the belt-like sheet S is expanded in the width direction. Note that the upper surface of the flat surface portion 30A in the moving member 30 is subjected to surface treatment such as fluororesin processing or embossing, whereby the unnecessary sheet portion S3 is strongly bonded to the flat surface portion 30A. It is preventing.

  The clamper 31 is configured by a substantially L-shaped clamp arm 35 that sandwiches the unnecessary sheet portion S3 with the flat surface portion 30A of the moving member 30, and a rotary moving device 37 that rotatably supports the clamp arm 35. Yes. The clamper 31 is located at a position where it does not interfere with the pressing roller 15 when the adhesive sheet S2 is attached to the wafer W and the ring frame RF, that is, as shown by a two-dot chain line in FIG. It can be retracted to the side.

  Next, a method for applying the adhesive sheet S2 in the present embodiment will be described with reference to FIGS.

  First, the belt-like sheet S is fed out from a feeding device (not shown), and the lead end of the belt-like sheet S is fixed to a winding device (not shown) via the guide roller 21 with the adhesive layer A facing the upper side of the table 25. . Then, as shown in FIG. 2, the ring frame RF and the wafer W are placed at predetermined positions on the upper surface of the lifting table 25 via an appropriate transfer arm or the like and sucked and held to complete the preparation (FIG. 4). reference). At this time, the pressing roller 15 is positioned on the right side of the lifting table 25 as shown in FIG. 4, and the table 16 is at the lower limit of the lifting table 25 and the ring frame RF and the wafer W are on the adhesive layer A. While keeping the non-contact position, the moving members 30 approach each other, and the clamper 31 is maintained at the position indicated by the two-dot chain line in FIG.

  When the feeding of the belt-like sheet S is started and it is detected by a sensor or the like (not shown) that the adhesive sheet S2 is positioned above the ring frame RF and the wafer W, the feeding of the belt-like sheet S is stopped. Then, as shown in FIG. 5, the lifting table 25 is raised to bring the ring frame RF and the wafer W close to the adhesive layer A of the adhesive sheet S2, and then, as shown in FIG. It moves in the direction of the guide roller 21 (indicated by a solid line in FIG. 6), returns to the initial position (indicated by a two-dot chain line in FIG. 6), and a belt-like sheet S is attached to the ring frame RF and wafer W.

  When the application of the belt-like sheet S is completed in this manner, as shown in FIG. 7, the clamper 31 rotates from the retracted position to sandwich the unnecessary sheet portion S3 between the flat portion 30A, and then a pair of moving members 30 are driven by a cylinder 33 so as to be separated from each other. By this driving, the belt-like sheet S is expanded in the width direction. At this time, a tearing force is applied to the notch 11 and the tearing portion 12, and the adhesive sheet S2 and the unnecessary sheet portion S3 are separated.

  Then, after the clamper 31 is returned to the retracted state, as shown in FIG. 8, when the lifting table 25 is lowered, only the bonding sheet S <b> 2 is attached to the ring frame RF and the wafer W to be in an accompanying state. In addition, since the non-adhesion process is performed on the plane portion 30A, the unnecessary adhesive sheet portion S3 is not pulled downward by the descending table 16. In this state, the ring frame RF and wafer W integrated through a transfer arm (not shown) are taken out from the lifting table 25 and transferred to the next process or a predetermined stocker, and a new ring frame RF and wafer W are transferred to the lifting table. 25. Then, the same operation as described above is repeated.

  By applying the tearing force described above, the non-notched portion 11B between the end portions of the notched portion 11A is torn and broken so as to connect the adjacent notched portions 11A to each other. When such a rupture is not formed, the adhesive sheet S2 is ruptured. However, even in this case, since the end portion of the cut portion 11A is connected to the breakage prevention cut C1, the breakage is blocked by the breakage prevention cut 11C, and deep inside the adhesive sheet S2. It does not extend and does not significantly affect the accuracy of attaching the adhesive sheet S2.

  Therefore, according to such an embodiment, the adhesive sheet S2 can be attached to the ring frame RF and the wafer W from the belt-like sheet S that does not have a release sheet, and the sheet application excellent in economic efficiency and application efficiency. An apparatus 10 can be provided.

As described above, the best configuration, method, and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this.
In other words, the present invention has been illustrated and described mainly with respect to specific embodiments, but without departing from the scope of the technical idea and object of the present invention, the shape, position, or With respect to the arrangement and the like, those skilled in the art can make various changes as necessary.

For example, the ring frame RF and the semiconductor wafer W are targeted as adherends, but the present invention is not limited to this, and other plate-like members and the like can also be targeted. Therefore, the notch is not limited to being along a substantially circular locus, but may be along a polygonal or elliptical locus.
Furthermore, in the said embodiment, although the case where the notch 11C for fracture | rupture prevention was formed inside the non-notch | incision part 11B was shown, this notch 11C for fracture | rupture prevention does not prevent providing on the outer side.
Further, the belt-like sheet S is formed by forming the adhesive sheet S2 provided with the cuts 11 in advance. In the process of feeding the belt-like sheet S2, the belt-like sheet S is cut with an appropriate die-cutting device or the like to form the adhesive sheet S2. The adhesive sheet S2 can also be attached.
Further, the pressing means is not limited to the pressing roller, and may be replaced by a blade member or the like that moves in the horizontal direction above the table 16 and attaches the adhesive sheet S2 at its edge.

The schematic perspective view of a sheet sticking apparatus. The schematic perspective view of the table which shows the state holding the to-be-adhered body. The partial cross section figure of a table. The side view which shows the initial stage which affixes the adhesive sheet on a to-be-adhered body. The side view which shows the state which the raising / lowering table raised. The side view which shows the state which affixes the adhesive sheet on a to-be-adhered body with a press roller. The perspective view which shows the state which expanded the strip | belt-shaped sheet | seat in the width direction. The partial cross section figure which shows the state which affixed the adhesive sheet on the to-be-adhered body and lowered the raising / lowering table.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Sheet sticking apparatus 11 Incision 11A Incision part 11B Non-incision part 11C Breaking prevention notch 12 Tear part 16 Table 18 Tear means 30 Moving member 31 Clamper 33 Cylinder (drive device)
15 Pressing roller (pressing means)
A Adhesive layer S Strip sheet S1 Sheet substrate S2 Adhesive sheet S3 Unnecessary sheet part RF Ring frame (adhered body)
W Semiconductor wafer (adherence)

Claims (5)

An adhesive layer is provided on one side, and an adhesive sheet formed by intermittent cuts along a substantially closed loop-like trajectory at predetermined intervals, and an unnecessary sheet portion located outside the adhesive sheet In a sheet sticking device that uses a belt-like sheet provided with a provided tearing portion, and sticks the adhesive sheet to an adherend supported on a table by drawing out the belt-like sheet,
A pressing means that presses the adhesive sheet and affixes the adhesive sheet to an adherend, and a tearing force is applied to the intermittent cuts and tears to separate the adhesive sheet from the unnecessary sheet portion. A sheet sticking device comprising a tearing means. The tearing means is disposed on a table that supports the adherend, and the tearing means is located on the adhesive layer side of the unnecessary sheet portion and is provided on both sides in the width direction of the belt-like sheet; and A clamper that is positioned on the non-adhesive layer side of the unnecessary sheet portion and sandwiches the unnecessary sheet portion between the moving member and a drive that drives the moving member and the clamper in the tearing direction to expand the belt-like sheet The sheet sticking device according to claim 1, comprising: a device. 3. The sheet sticking apparatus according to claim 2, wherein the clamper is provided so as to be retractable at a position that does not interfere with the pressing means when the adhesive sheet is stuck to an adherend. An adhesive layer is provided on one side, and an adhesive sheet formed by intermittent cuts along a substantially closed loop-like trajectory at predetermined intervals, and an unnecessary sheet portion located outside the adhesive sheet In a sheet sticking method in which a belt-like sheet provided with a tearing portion is provided, the belt-like sheet is drawn out and the adhesive sheet is stuck on an adherend supported on a table.
After applying the adhesive sheet to the adherend by pressing the adhesive sheet, the intermittent cut and tearing part is applied to separate the adhesive sheet and the unnecessary sheet part, The sheet sticking method comprising winding up the unnecessary sheet portion. The intermittent incision is composed of an incision portion and a non-incision portion, and a breakage prevention incision longer than the length of the non-incision portion is provided inside and / or outside of the non-incision portion, and is unnecessary with the adhesive sheet. The sheet sticking method according to claim 4, wherein when the sheet portion is separated from the sheet portion, the breakage prevention notch dams the breakage in a direction deviating from the locus of the closed loop.

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