JP4604554B2 - プローブ装置 - Google Patents

プローブ装置 Download PDF

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Publication number
JP4604554B2
JP4604554B2 JP2004155475A JP2004155475A JP4604554B2 JP 4604554 B2 JP4604554 B2 JP 4604554B2 JP 2004155475 A JP2004155475 A JP 2004155475A JP 2004155475 A JP2004155475 A JP 2004155475A JP 4604554 B2 JP4604554 B2 JP 4604554B2
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JP
Japan
Prior art keywords
probe
sample
display
image
screen
Prior art date
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Expired - Lifetime
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JP2004155475A
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English (en)
Japanese (ja)
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JP2004251915A5 (enExample
JP2004251915A (ja
Inventor
泰徳 土井
馨 梅村
聡 富松
勝 松島
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Hitachi Ltd
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Hitachi Ltd
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Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP2004155475A priority Critical patent/JP4604554B2/ja
Publication of JP2004251915A publication Critical patent/JP2004251915A/ja
Publication of JP2004251915A5 publication Critical patent/JP2004251915A5/ja
Application granted granted Critical
Publication of JP4604554B2 publication Critical patent/JP4604554B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Electric Properties And Detecting Electric Faults (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2004155475A 2004-05-26 2004-05-26 プローブ装置 Expired - Lifetime JP4604554B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004155475A JP4604554B2 (ja) 2004-05-26 2004-05-26 プローブ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004155475A JP4604554B2 (ja) 2004-05-26 2004-05-26 プローブ装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP32632898A Division JP3624721B2 (ja) 1998-11-17 1998-11-17 プローブ装置

Publications (3)

Publication Number Publication Date
JP2004251915A JP2004251915A (ja) 2004-09-09
JP2004251915A5 JP2004251915A5 (enExample) 2006-01-05
JP4604554B2 true JP4604554B2 (ja) 2011-01-05

Family

ID=33028698

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004155475A Expired - Lifetime JP4604554B2 (ja) 2004-05-26 2004-05-26 プローブ装置

Country Status (1)

Country Link
JP (1) JP4604554B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007018935A (ja) * 2005-07-08 2007-01-25 Hitachi High-Technologies Corp プローブ付き顕微鏡及びプローブ接触方法
US20110186756A1 (en) * 2008-02-25 2011-08-04 The University Of Melbourne Method of fabricating a single photon source

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2774884B2 (ja) * 1991-08-22 1998-07-09 株式会社日立製作所 試料の分離方法及びこの分離方法で得た分離試料の分析方法
JPH0580853A (ja) * 1991-09-18 1993-04-02 Fujitsu Ltd ステージシステム及びステージ制御方法
JPH063417A (ja) * 1992-06-23 1994-01-11 Graphtec Corp 回路基板検査装置
JP2506304B2 (ja) * 1993-03-01 1996-06-12 エキスパートマグネティックス株式会社 回路基板の試験装置
JP3401316B2 (ja) * 1994-01-21 2003-04-28 日置電機株式会社 Ｘ−ｙ方式インサーキットテスタの実装部品の高さに対応するプローブ位置調整装置
JPH0997585A (ja) * 1995-10-02 1997-04-08 Hitachi Ltd 画像取り込み方法および装置ならびにそれを用いた半導体製造装置
JP3577839B2 (ja) * 1996-06-04 2004-10-20 株式会社日立製作所 不良検査方法および装置

Also Published As

Publication number Publication date
JP2004251915A (ja) 2004-09-09

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