JP4585684B2 - レーザビーム描画装置における音響光学素子定常化システム - Google Patents

レーザビーム描画装置における音響光学素子定常化システム Download PDF

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Publication number
JP4585684B2
JP4585684B2 JP2000368332A JP2000368332A JP4585684B2 JP 4585684 B2 JP4585684 B2 JP 4585684B2 JP 2000368332 A JP2000368332 A JP 2000368332A JP 2000368332 A JP2000368332 A JP 2000368332A JP 4585684 B2 JP4585684 B2 JP 4585684B2
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Prior art keywords
laser beam
acousto
aom
modulation signal
optic
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Expired - Fee Related
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JP2000368332A
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Japanese (ja)
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JP2002169118A5 (enExample
JP2002169118A (ja
Inventor
裕之 鷲山
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Orc Manufacturing Co Ltd
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Orc Manufacturing Co Ltd
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Priority to JP2000368332A priority Critical patent/JP4585684B2/ja
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Publication of JP2002169118A5 publication Critical patent/JP2002169118A5/ja
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  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
JP2000368332A 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム Expired - Fee Related JP4585684B2 (ja)

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JP2000368332A JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

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JP2000368332A JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

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JP2002169118A JP2002169118A (ja) 2002-06-14
JP2002169118A5 JP2002169118A5 (enExample) 2007-12-27
JP4585684B2 true JP4585684B2 (ja) 2010-11-24

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JP2000368332A Expired - Fee Related JP4585684B2 (ja) 2000-12-04 2000-12-04 レーザビーム描画装置における音響光学素子定常化システム

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007144951A (ja) * 2005-11-30 2007-06-14 Ricoh Co Ltd 画像形成装置
DE102007053199A1 (de) * 2007-11-06 2009-05-14 Leica Microsystems Cms Gmbh Vorrichtung und Verfahren zur Ansteuerung eines akustooptischen Bauteils
TWI608886B (zh) * 2011-07-05 2017-12-21 電子科學工業股份有限公司 用於提供聲光束偏轉器與聲光調變器使用期間之溫度穩定性之系統與方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4890539A (enExample) * 1972-03-01 1973-11-26
JPS6173920A (ja) * 1984-09-19 1986-04-16 Fuji Photo Film Co Ltd レ−ザ露光量安定化装置
JPS61189575A (ja) * 1985-02-19 1986-08-23 Canon Inc 画像形成装置
JPS6319962A (ja) * 1986-07-12 1988-01-27 Konica Corp ステツピングモ−タを用いた画像記録装置
JPS63231313A (ja) * 1987-03-19 1988-09-27 Asahi Glass Co Ltd 音響光学素子
JPS63316877A (ja) * 1987-06-19 1988-12-26 Fujitsu Ltd 像形成装置
DE19827140C2 (de) * 1998-06-18 2002-12-12 Zeiss Carl Jena Gmbh Laserscanmikroskop mit AOTF
DE10029167B8 (de) * 2000-06-19 2015-07-02 Leica Microsystems Cms Gmbh Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile

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Publication number Publication date
JP2002169118A (ja) 2002-06-14

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