JP2002169118A5 - - Google Patents
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- Publication number
- JP2002169118A5 JP2002169118A5 JP2000368332A JP2000368332A JP2002169118A5 JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5 JP 2000368332 A JP2000368332 A JP 2000368332A JP 2000368332 A JP2000368332 A JP 2000368332A JP 2002169118 A5 JP2002169118 A5 JP 2002169118A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000368332A JP4585684B2 (ja) | 2000-12-04 | 2000-12-04 | レーザビーム描画装置における音響光学素子定常化システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000368332A JP4585684B2 (ja) | 2000-12-04 | 2000-12-04 | レーザビーム描画装置における音響光学素子定常化システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002169118A JP2002169118A (ja) | 2002-06-14 |
| JP2002169118A5 true JP2002169118A5 (enExample) | 2007-12-27 |
| JP4585684B2 JP4585684B2 (ja) | 2010-11-24 |
Family
ID=18838604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000368332A Expired - Fee Related JP4585684B2 (ja) | 2000-12-04 | 2000-12-04 | レーザビーム描画装置における音響光学素子定常化システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4585684B2 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007144951A (ja) * | 2005-11-30 | 2007-06-14 | Ricoh Co Ltd | 画像形成装置 |
| DE102007053199A1 (de) * | 2007-11-06 | 2009-05-14 | Leica Microsystems Cms Gmbh | Vorrichtung und Verfahren zur Ansteuerung eines akustooptischen Bauteils |
| TWI608886B (zh) * | 2011-07-05 | 2017-12-21 | 電子科學工業股份有限公司 | 用於提供聲光束偏轉器與聲光調變器使用期間之溫度穩定性之系統與方法 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4890539A (enExample) * | 1972-03-01 | 1973-11-26 | ||
| JPS6173920A (ja) * | 1984-09-19 | 1986-04-16 | Fuji Photo Film Co Ltd | レ−ザ露光量安定化装置 |
| JPS61189575A (ja) * | 1985-02-19 | 1986-08-23 | Canon Inc | 画像形成装置 |
| JPS6319962A (ja) * | 1986-07-12 | 1988-01-27 | Konica Corp | ステツピングモ−タを用いた画像記録装置 |
| JPS63231313A (ja) * | 1987-03-19 | 1988-09-27 | Asahi Glass Co Ltd | 音響光学素子 |
| JPS63316877A (ja) * | 1987-06-19 | 1988-12-26 | Fujitsu Ltd | 像形成装置 |
| DE19827140C2 (de) * | 1998-06-18 | 2002-12-12 | Zeiss Carl Jena Gmbh | Laserscanmikroskop mit AOTF |
| DE10029167B8 (de) * | 2000-06-19 | 2015-07-02 | Leica Microsystems Cms Gmbh | Verfahren und Vorrichtung zur Temperaturstabilisierung optischer Bauteile |
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2000
- 2000-12-04 JP JP2000368332A patent/JP4585684B2/ja not_active Expired - Fee Related