JP4576664B2 - 光路ズレ検知装置、および共焦点顕微鏡 - Google Patents

光路ズレ検知装置、および共焦点顕微鏡 Download PDF

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Publication number
JP4576664B2
JP4576664B2 JP2000127242A JP2000127242A JP4576664B2 JP 4576664 B2 JP4576664 B2 JP 4576664B2 JP 2000127242 A JP2000127242 A JP 2000127242A JP 2000127242 A JP2000127242 A JP 2000127242A JP 4576664 B2 JP4576664 B2 JP 4576664B2
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Japan
Prior art keywords
light
optical path
stray
detected
source
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JP2000127242A
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English (en)
Japanese (ja)
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JP2001324678A (ja
JP2001324678A5 (enExample
Inventor
晃 安達
忠 打田
三樹男 青島
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Nikon Corp
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Nikon Corp
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Priority to JP2000127242A priority Critical patent/JP4576664B2/ja
Priority to US09/799,731 priority patent/US6693272B2/en
Publication of JP2001324678A publication Critical patent/JP2001324678A/ja
Publication of JP2001324678A5 publication Critical patent/JP2001324678A5/ja
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0072—Optical details of the image generation details concerning resolution or correction, including general design of CSOM objectives
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0032—Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2000127242A 2000-03-08 2000-04-27 光路ズレ検知装置、および共焦点顕微鏡 Expired - Fee Related JP4576664B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2000127242A JP4576664B2 (ja) 2000-03-08 2000-04-27 光路ズレ検知装置、および共焦点顕微鏡
US09/799,731 US6693272B2 (en) 2000-03-08 2001-03-07 Light path deviation detecting apparatus and confocal microscope

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-63984 2000-03-08
JP2000063984 2000-03-08
JP2000127242A JP4576664B2 (ja) 2000-03-08 2000-04-27 光路ズレ検知装置、および共焦点顕微鏡

Publications (3)

Publication Number Publication Date
JP2001324678A JP2001324678A (ja) 2001-11-22
JP2001324678A5 JP2001324678A5 (enExample) 2009-11-19
JP4576664B2 true JP4576664B2 (ja) 2010-11-10

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Family Applications (1)

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JP2000127242A Expired - Fee Related JP4576664B2 (ja) 2000-03-08 2000-04-27 光路ズレ検知装置、および共焦点顕微鏡

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US (1) US6693272B2 (enExample)
JP (1) JP4576664B2 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10111824B4 (de) * 2001-03-13 2017-04-06 Leica Microsystems Cms Gmbh Verfahren zum Justieren eines Mikroskops und Mikroskop mit Einrichtung zum Justieren des Lichtstrahls
US6876679B1 (en) * 2001-08-20 2005-04-05 Dennis Bowler Systems and methods of operating an incoherently beam combined laser
US20050073446A1 (en) * 2003-10-06 2005-04-07 Mihal Lazaridis Selective keyboard illumination
JP4446087B2 (ja) * 2004-03-01 2010-04-07 独立行政法人情報通信研究機構 光検出装置及びこれを用いた光検出システム
JP4729269B2 (ja) * 2004-06-01 2011-07-20 オリンパス株式会社 レーザ走査型顕微鏡
JP4934275B2 (ja) * 2004-10-27 2012-05-16 オリンパス株式会社 レーザ走査型顕微鏡
JP2007175744A (ja) * 2005-12-28 2007-07-12 Yamazaki Mazak Corp レーザ加工機における光路軸の調整装置
JP5287252B2 (ja) * 2006-12-22 2013-09-11 株式会社ニコン レーザ走査共焦点顕微鏡
US7936503B2 (en) * 2007-02-19 2011-05-03 Olympus Corporation Laser scanning microscope
JP5058625B2 (ja) 2007-02-19 2012-10-24 オリンパス株式会社 レーザ顕微鏡
DE102007011305A1 (de) * 2007-03-06 2008-09-11 Leica Microsystems Cms Gmbh Vorrichtung und Verfahren zur Strahljustage in einem optischen Strahlengang
JP2009058341A (ja) * 2007-08-31 2009-03-19 Sanyo Electric Co Ltd ビーム照射装置およびレーザレーダ
US7978313B2 (en) * 2008-05-30 2011-07-12 The Boeing Company Systems and methods for targeting directed energy devices
JP2010085434A (ja) * 2008-09-29 2010-04-15 Sanyo Electric Co Ltd ビーム照射装置および位置検出装置
JP5696396B2 (ja) 2010-08-16 2015-04-08 ソニー株式会社 顕微鏡及びゴースト除去方法
KR101350976B1 (ko) * 2010-12-22 2014-01-14 한국기초과학지원연구원 온도분포 측정장치
JP5991850B2 (ja) * 2012-05-11 2016-09-14 オリンパス株式会社 顕微鏡装置
CN104280210A (zh) * 2013-07-09 2015-01-14 上海和辉光电有限公司 激光源的质量检测装置及其质量检测方法
US10365211B2 (en) * 2017-09-26 2019-07-30 Kla-Tencor Corporation Systems and methods for metrology beam stabilization
BE1026154B1 (fr) 2018-03-27 2019-10-29 Laser Engineering Applications Système optique
WO2020095444A1 (ja) * 2018-11-09 2020-05-14 株式会社ニコン 顕微鏡
DE102020209268B3 (de) 2020-07-22 2021-10-14 Hochschule Emden/Leer Optisches System
GB2632850A (en) * 2023-08-24 2025-02-26 Renishaw Plc Spectrometer, module and method
FI20245539A1 (en) * 2024-04-30 2025-10-31 Modulight Corp Automated control of laser beams

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0682166B2 (ja) * 1986-05-21 1994-10-19 日本電気株式会社 レ−ザアライメント計測装置
JP2716121B2 (ja) * 1987-02-06 1998-02-18 株式会社ニコン レーザ光軸検出装置
US4801791A (en) * 1987-07-24 1989-01-31 Spectra-Physics, Inc. Pendulous compensator vibratory motion damping system
JPH01278987A (ja) * 1988-04-28 1989-11-09 Toshiba Corp 光軸調整装置
JPH04174315A (ja) * 1989-12-26 1992-06-22 Fujitsu Ltd 光軸調整装置
GB9014263D0 (en) * 1990-06-27 1990-08-15 Dixon Arthur E Apparatus and method for spatially- and spectrally- resolvedmeasurements
US5121405A (en) * 1990-12-20 1992-06-09 Coherent, Inc. Alignment control system for lasers
JPH0836766A (ja) * 1994-07-25 1996-02-06 Sony Corp 露光光学装置
US5923418A (en) * 1995-02-21 1999-07-13 Clark-Mxr, Inc. Apparatus for controlling the position and direction of a laser beam
US5847867A (en) * 1996-07-03 1998-12-08 Yokogawa Electric Corporation Confocal microscope
JPH10197799A (ja) * 1997-01-08 1998-07-31 Olympus Optical Co Ltd 光軸ずれ補正装置及び走査型光学顕微鏡
JPH10242504A (ja) * 1997-02-25 1998-09-11 Kyocera Corp 入射光規制部材及びこれを用いた光モジュール
US6108127A (en) * 1997-05-15 2000-08-22 3M Innovative Properties Company High resolution confocal microscope
JPH11174332A (ja) * 1997-12-11 1999-07-02 Nikon Corp レーザ顕微鏡

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Publication number Publication date
US6693272B2 (en) 2004-02-17
US20010022341A1 (en) 2001-09-20
JP2001324678A (ja) 2001-11-22

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