JP4573272B2 - 連続成膜装置 - Google Patents

連続成膜装置 Download PDF

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Publication number
JP4573272B2
JP4573272B2 JP2006202735A JP2006202735A JP4573272B2 JP 4573272 B2 JP4573272 B2 JP 4573272B2 JP 2006202735 A JP2006202735 A JP 2006202735A JP 2006202735 A JP2006202735 A JP 2006202735A JP 4573272 B2 JP4573272 B2 JP 4573272B2
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Japan
Prior art keywords
film forming
film
roll
chamber
wall
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Expired - Fee Related
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JP2006202735A
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Japanese (ja)
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JP2008031493A (ja
JP2008031493A5 (ko
Inventor
利規 瀬川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kobe Steel Ltd
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Kobe Steel Ltd
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Priority to JP2006202735A priority Critical patent/JP4573272B2/ja
Publication of JP2008031493A publication Critical patent/JP2008031493A/ja
Publication of JP2008031493A5 publication Critical patent/JP2008031493A5/ja
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Publication of JP4573272B2 publication Critical patent/JP4573272B2/ja
Expired - Fee Related legal-status Critical Current
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  • Physical Vapour Deposition (AREA)
JP2006202735A 2006-07-26 2006-07-26 連続成膜装置 Expired - Fee Related JP4573272B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006202735A JP4573272B2 (ja) 2006-07-26 2006-07-26 連続成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006202735A JP4573272B2 (ja) 2006-07-26 2006-07-26 連続成膜装置

Publications (3)

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JP2008031493A JP2008031493A (ja) 2008-02-14
JP2008031493A5 JP2008031493A5 (ko) 2008-09-11
JP4573272B2 true JP4573272B2 (ja) 2010-11-04

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ID=39121245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006202735A Expired - Fee Related JP4573272B2 (ja) 2006-07-26 2006-07-26 連続成膜装置

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JP (1) JP4573272B2 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5240782B2 (ja) * 2009-05-18 2013-07-17 株式会社神戸製鋼所 連続成膜装置
CN110643969A (zh) * 2018-06-27 2020-01-03 北京铂阳顶荣光伏科技有限公司 一种真空蒸镀设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60234971A (ja) * 1984-03-28 1985-11-21 ジエネラル・エンジニアリング・ラドクリフ・リミテツド 真空成膜装置
JPH11350136A (ja) * 1998-06-11 1999-12-21 Sony Corp 真空成膜装置
JP2001003168A (ja) * 1999-06-18 2001-01-09 Sony Corp 真空成膜装置
JP2006077284A (ja) * 2004-09-09 2006-03-23 Kobe Steel Ltd 連続成膜装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60234971A (ja) * 1984-03-28 1985-11-21 ジエネラル・エンジニアリング・ラドクリフ・リミテツド 真空成膜装置
JPH11350136A (ja) * 1998-06-11 1999-12-21 Sony Corp 真空成膜装置
JP2001003168A (ja) * 1999-06-18 2001-01-09 Sony Corp 真空成膜装置
JP2006077284A (ja) * 2004-09-09 2006-03-23 Kobe Steel Ltd 連続成膜装置

Also Published As

Publication number Publication date
JP2008031493A (ja) 2008-02-14

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