JP6803917B2 - 真空処理システム及び真空処理を行う方法 - Google Patents
真空処理システム及び真空処理を行う方法 Download PDFInfo
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- JP6803917B2 JP6803917B2 JP2018542266A JP2018542266A JP6803917B2 JP 6803917 B2 JP6803917 B2 JP 6803917B2 JP 2018542266 A JP2018542266 A JP 2018542266A JP 2018542266 A JP2018542266 A JP 2018542266A JP 6803917 B2 JP6803917 B2 JP 6803917B2
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Description
Claims (15)
- フレキシブル基板(10)用の真空処理システム(100)であって、
前記フレキシブル基板(10)を提供するための供給ロール(111)を収容するように適合された第1のチャンバ(110)と、
処理後の前記フレキシブル基板(10)を収めるための巻き取りロール(121)を収容するように適合された第2のチャンバ(120)と、
前記フレキシブル基板(10)を前記第1のチャンバ(110)から前記第2のチャンバ(120)へガイドするための一または複数のガイドローラ(104)を含む基板搬送装置と、
前記第1のチャンバ(110)と前記第2のチャンバ(120)との間のメンテナンスゾーン(130)であって、前記第1のチャンバ(110)及び前記第2のチャンバ(120)のうちの少なくとも1つへのメンテナンスアクセス、又は前記第1のチャンバ(110)及び前記第2のチャンバ(120)のうちの少なくとも1つのメンテナンスアクセスを可能にする、メンテナンスゾーン(130)と、
前記フレキシブル基板(10)を処理するための第1の処理チャンバ(140)と
を備え、
前記第1の処理チャンバ(140)は少なくとも1つの堆積源(630)を備え、
前記少なくとも1つの堆積源(630)は、第1の群のスロット(711)及び第2の群のスロット(712)を備えるマイクロ波アンテナ(700)を含み、
前記第1の群のスロット(711)は、前記第2の群のスロット(712)と比較して、前記マイクロ波アンテナ(700)の長さに沿って異なる径方向位置に配置される、
真空処理システム(100)。 - 前記第1の処理チャンバ(140)を前記第2のチャンバ(120)又は第2の処理チャンバ(240)に連結する通路(150)を更に備え、前記通路(150)は、前記メンテナンスゾーン(130)の上又は下に設けられる、請求項1に記載の真空処理システム(100)。
- 前記第2の処理チャンバ(240)は、前記第2のチャンバ(120)が前記メンテナンスゾーン(130)と前記第2の処理チャンバ(240)との間に設けられるように位置付けされる、請求項2に記載の真空処理システム(100)。
- 前記少なくとも1つの堆積源(630)は、前記第2の処理チャンバ(240)にも設けられており、
前記第1の処理チャンバ(140)及び前記第2の処理チャンバ(240)のうちの少なくとも1つは、
第1の真空処理領域及び少なくとも1つの第2の真空処理領域を通して前記基板(10)をガイドするための外面を有し、且つ第1の方向に延びる回転軸(143)を有する処理ドラム(142)を備え、
前記処理ドラム(142)を備える前記第1の処理チャンバ(140)及び前記第2の処理チャンバ(240)のうちの前記少なくとも1つの内部において、前記少なくとも1つの堆積源(630)は、前記処理ドラム(142)の水平中心線の高さ又はその下方に配置される、
請求項2又は3に記載の真空処理システム(100)。 - 前記第1の処理チャンバ(140)及び前記第2の処理チャンバ(240)のうちの少なくとも1つが、前記少なくとも1つの堆積源(630)を設ける第1の部分(146)と、前記真空処理システムの前記通路(150)との連通を可能にする第2の部分(147)とを備え、前記第1の部分(146)及び前記第2の部分(147)が、垂直方向に対して傾斜した線に沿って連結される、請求項4に記載の真空処理システム(100)。
- 前記処理ドラム(142)に隣接するように加熱デバイス(131)が設けられ、前記加熱デバイス(131)は、前記フレキシブル基板(10)を基板の搬送方向(108)に垂直の方向に拡張させるように、又は前記基板の拡張を維持するように構成され、且つ、前記加熱デバイスは、前記基板の搬送方向(108)に平行の方向に少なくとも20mmの寸法を有する、請求項4又は5に記載の真空処理システム(100)。
- 前記加熱デバイス(131)が前記処理ドラム(142)とスプレッダローラ(144)との間に位置づけされ、前記スプレッダローラ(144)は、前記処理ドラム(142)の上流又は下流で前記基板に接触する第1のローラである、請求項6に記載の真空処理システム(100)。
- 熱調整ユニットを更に備え、前記熱調整ユニット(133)は、前記加熱デバイス(131)の第1の側面の反対側に位置づけされ、前記熱調整ユニット(133)と前記加熱デバイスとは、前記フレキシブル基板(10)の経路を提供する間隙又はトンネルを形成する、請求項6又は7に記載の真空処理システム(100)。
- 前記少なくとも1つの堆積源(630)は曲面を有し、前記少なくとも1つの堆積源の前記曲面は、前記少なくとも1つの堆積源が前記処理ドラム(142)の表面に対して基本的に平行な面を有するように成形されている、請求項4から8のいずれか一項に記載の真空処理システム(100)。
- 前記マイクロ波アンテナ(700)は、前記マイクロ波アンテナ(700)の長さに沿って設けられた複数のスロット(710)を有する細長いスリーブ(720)を備え、前記複数のスロット(710)は前記第1の群のスロット(711)と前記第2の群のスロット(712)を含む、請求項1から9のいずれか一項に記載の真空処理システム(100)。
- 基板をガイドするための基板ガイド制御ユニット(300)を更に備え、前記基板ガイド制御ユニット(300)は単一のガイドローラ(104)を備え、前記単一のガイドローラ(104)は、
調整ユニット(310)と、
前記ガイドローラ(104)の第1の端、及び前記第1の端の反対である第2の端において前記基板(10)の張力を測定するための第1の基板張力測定ユニット(301)及び第2の基板張力測定ユニット(302)と、
前記ガイドローラ(104)の前記第1の端から測定された張力、及び前記ガイドローラ(104)の第2の端で測定された張力を、前記調整ユニット(310)を制御するためのコントローラ(501)に供給するためのデータ接続部(311)と
を備える、請求項1から10のいずれか一項に記載の真空処理システム(100)。 - 前記少なくとも1つの堆積源(630)が、
前記処理ドラム(142)の外面に対向する表面を有する電極(602)と、
前記電極の表面の対向する側面に配置された処理ガス注入口(612)及び処理ガス排気口(614)と、
一または複数の分離ガス注入開口部を有する少なくとも1つの分離ガス注入口(1842)であって、前記処理ガス注入口(612)及び/又は前記処理ガス排気口(614)が前記一または複数の分離ガス注入開口部及び前記電極の表面との間に設けられるように、前記一または複数の分離ガス注入開口部が少なくとも前記電極(602)の表面の対向する側面のうちの1つに設けられる、少なくとも1つの分離ガス注入口(1842)と
を備える、請求項4から9のいずれか一項に記載の真空処理システム(100)。 - 前記少なくとも1つの堆積源(630)と前記処理ドラム(142)の外面との間の距離を調整するように構成されたアクチュエータ(374)を更に備える、請求項4から9及び12のいずれか一項に記載の真空処理システム(100)。
- 前記処理ドラム(142)の外面とガス分離ユニット(370)との間で前記基板(10)が通過することができるスリット(20)を形成するように適合された前記少なくとも1つの第2の真空処理領域から前記第1の真空処理領域を分離させるためのガス分離ユニット(370)を更に備え、前記ガス分離ユニット(370)は、前記第1の真空処理領域と前記第2の真空処理領域との間の流体連結を制御するように適合され、前記流体連結は、前記ガス分離ユニット(370)の位置を調整することによって制御される、請求項4から9、12及び13のいずれか一項に記載の真空処理システム(100)。
- 請求項1から14のいずれか一項に記載の真空処理システムを使用してフレキシブル基板上に少なくとも2つの層を堆積させる方法(900)であって、
処理ドラムの外面の上で前記フレキシブル基板をガイドすること(901)と、
少なくとも第1の堆積源の反対側の側面の少なくとも2つの位置において分離ガスを供給すること(902)と、
前記少なくとも2つの位置の間で処理ガスを供給し前記処理ガスを排気すること(903)と、
前記第1の堆積源と少なくとも1つの第2の堆積源との間の少なくとも1つの真空排気口においてポンプ操作を行うこと(904)と
を含む方法(900)。
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