JP4557657B2 - 接触式プローブおよび形状測定装置 - Google Patents

接触式プローブおよび形状測定装置 Download PDF

Info

Publication number
JP4557657B2
JP4557657B2 JP2004280827A JP2004280827A JP4557657B2 JP 4557657 B2 JP4557657 B2 JP 4557657B2 JP 2004280827 A JP2004280827 A JP 2004280827A JP 2004280827 A JP2004280827 A JP 2004280827A JP 4557657 B2 JP4557657 B2 JP 4557657B2
Authority
JP
Japan
Prior art keywords
probe
yoke
permanent magnet
contact
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004280827A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006098060A5 (enExample
JP2006098060A (ja
Inventor
健男 丸山
真人 根岸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2004280827A priority Critical patent/JP4557657B2/ja
Publication of JP2006098060A publication Critical patent/JP2006098060A/ja
Publication of JP2006098060A5 publication Critical patent/JP2006098060A5/ja
Application granted granted Critical
Publication of JP4557657B2 publication Critical patent/JP4557657B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP2004280827A 2004-09-28 2004-09-28 接触式プローブおよび形状測定装置 Expired - Fee Related JP4557657B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004280827A JP4557657B2 (ja) 2004-09-28 2004-09-28 接触式プローブおよび形状測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004280827A JP4557657B2 (ja) 2004-09-28 2004-09-28 接触式プローブおよび形状測定装置

Publications (3)

Publication Number Publication Date
JP2006098060A JP2006098060A (ja) 2006-04-13
JP2006098060A5 JP2006098060A5 (enExample) 2007-11-15
JP4557657B2 true JP4557657B2 (ja) 2010-10-06

Family

ID=36238050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004280827A Expired - Fee Related JP4557657B2 (ja) 2004-09-28 2004-09-28 接触式プローブおよび形状測定装置

Country Status (1)

Country Link
JP (1) JP4557657B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4291849B2 (ja) * 2006-12-20 2009-07-08 パナソニック株式会社 三次元測定プローブ
JP5209440B2 (ja) * 2008-10-30 2013-06-12 独立行政法人理化学研究所 形状測定プローブ
JP5255422B2 (ja) * 2008-12-16 2013-08-07 独立行政法人理化学研究所 形状測定プローブ
JP4850265B2 (ja) * 2009-03-12 2012-01-11 パナソニック株式会社 形状測定装置用プローブ及び形状測定装置
JP4875180B2 (ja) * 2010-03-25 2012-02-15 ファナック株式会社 微細接触力調整機構を有する接触式計測装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2519823B2 (ja) * 1990-08-17 1996-07-31 株式会社東芝 変位測定装置
JPH04113210A (ja) * 1990-09-03 1992-04-14 Toshiba Corp 変位測定装置
JP3420327B2 (ja) * 1994-05-26 2003-06-23 株式会社ミツトヨ タッチ信号プローブ
JP2000155002A (ja) * 1998-11-19 2000-06-06 Mitsutoyo Corp 形状計測用プローブ
JP4557466B2 (ja) * 2001-08-02 2010-10-06 キヤノン株式会社 接触式プローブ
JP4376592B2 (ja) * 2003-10-31 2009-12-02 株式会社リコー 形状測定装置

Also Published As

Publication number Publication date
JP2006098060A (ja) 2006-04-13

Similar Documents

Publication Publication Date Title
CN112815901B (zh) 坐标测量机、探测系统以及补偿探针元件处的力的方法
KR102386005B1 (ko) 기질을 정렬하기 위한 방법 및 장치
US11867666B2 (en) Measuring system, measuring arrangement and method for determining measuring signals during a penetration movement of a penetration body into a surface of a test body
JP4557657B2 (ja) 接触式プローブおよび形状測定装置
JP3305288B2 (ja) 工作機械精度計測装置
JP4557466B2 (ja) 接触式プローブ
JPH05288216A (ja) 力検出手段付き直線運動用案内装置
JP4376592B2 (ja) 形状測定装置
JP2016070667A (ja) 接触式プローブ及び形状測定装置
KR20070120441A (ko) 스테이지장치
EP3572764B1 (en) Shape measuring probe
JP5053039B2 (ja) 位置検出装置
JP2966214B2 (ja) 表面形状計測装置
JPH05332766A (ja) 倣いプローブ
Bosmans et al. Force loops
Deng Integrated 6-dof lorentz actuator with gravity compensation for vibration isolation in in-line surface metrology
JP2007057308A (ja) 接触式プローブ
JP2642818B2 (ja) 位置測定装置
KR100803657B1 (ko) 접촉식 변위센서를 이용하여 홀변위를 측정하기 위한자동측정장치
JP5645349B2 (ja) 形状測定装置
JP5176210B2 (ja) 加工装置
US6307284B1 (en) Positioning apparatus, information recording/reproducing apparatus, and inspection apparatus
JPH0435293B2 (enExample)
Terei et al. Novel Concept for Micro-Assembly of Optical Devices Using a Planar Motor System
JPH10339785A (ja) 摺動体の支持装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070927

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070927

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20090527

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20091222

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100222

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100413

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100614

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100713

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100720

R150 Certificate of patent or registration of utility model

Ref document number: 4557657

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130730

Year of fee payment: 3

LAPS Cancellation because of no payment of annual fees