JP4554825B2 - 焦点調整装置 - Google Patents

焦点調整装置 Download PDF

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Publication number
JP4554825B2
JP4554825B2 JP2000618766A JP2000618766A JP4554825B2 JP 4554825 B2 JP4554825 B2 JP 4554825B2 JP 2000618766 A JP2000618766 A JP 2000618766A JP 2000618766 A JP2000618766 A JP 2000618766A JP 4554825 B2 JP4554825 B2 JP 4554825B2
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JP
Japan
Prior art keywords
focus adjustment
rocking member
adjustment device
laser
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2000618766A
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English (en)
Japanese (ja)
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JP2002544559A5 (enExample
JP2002544559A (ja
Inventor
スティングル，アンドレアス
Original Assignee
フェムトレーザース プロドゥクシオンズ ゲゼルシャフト ミット ベシュレンクテル ハフツング
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by フェムトレーザース プロドゥクシオンズ ゲゼルシャフト ミット ベシュレンクテル ハフツング filed Critical フェムトレーザース プロドゥクシオンズ ゲゼルシャフト ミット ベシュレンクテル ハフツング
Publication of JP2002544559A publication Critical patent/JP2002544559A/ja
Publication of JP2002544559A5 publication Critical patent/JP2002544559A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/086—One or more reflectors having variable properties or positions for initial adjustment of the resonator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Automatic Focus Adjustment (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP2000618766A 1999-05-18 2000-05-11 焦点調整装置 Expired - Fee Related JP4554825B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
AT0088599A AT406989B (de) 1999-05-18 1999-05-18 Fokussiereinrichtung
AT885/99 1999-05-18
PCT/AT2000/000131 WO2000070383A1 (de) 1999-05-18 2000-05-11 Fokussiereinrichtung

Publications (3)

Publication Number Publication Date
JP2002544559A JP2002544559A (ja) 2002-12-24
JP2002544559A5 JP2002544559A5 (enExample) 2007-06-28
JP4554825B2 true JP4554825B2 (ja) 2010-09-29

Family

ID=3502067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000618766A Expired - Fee Related JP4554825B2 (ja) 1999-05-18 2000-05-11 焦点調整装置

Country Status (9)

Country Link
US (1) US6795476B1 (enExample)
EP (1) EP1181609B1 (enExample)
JP (1) JP4554825B2 (enExample)
CN (1) CN1144074C (enExample)
AT (1) AT406989B (enExample)
AU (1) AU4723800A (enExample)
BR (1) BR0010628A (enExample)
DE (1) DE50002916D1 (enExample)
WO (1) WO2000070383A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201110489A (en) * 2009-04-30 2011-03-16 Corning Inc Folded lasers system
JP2017059683A (ja) * 2015-09-16 2017-03-23 国立大学法人 東京大学 レーザー発振器及びレーザー発振器を備えた分光装置、光コヒーレンストモグラフィ装置、非同期光サンプリング装置、長距離絶対距離計測装置、ｃｗレーザー高速高分解能分光装置
CN110666343B (zh) * 2019-10-31 2021-06-25 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 激光转折装置、激光加工光路系统及光路调试方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1830308A (en) * 1928-02-29 1931-11-03 Gustav P Zepke Extensible support for fixtures
FR2442622A1 (fr) * 1978-06-08 1980-06-27 Aron Rosa Daniele Appareil de chirurgie ophtalmologique
US4661958A (en) * 1983-05-06 1987-04-28 Coherent, Inc. Laser
US4674097A (en) * 1986-01-14 1987-06-16 Cooper Lasersonics, Inc. Distributed-feedback dye laser
DE3814829A1 (de) 1987-05-23 1988-12-01 Teldix Gmbh Anordnung zur verdrehung einer flaeche
US4922501A (en) 1987-09-30 1990-05-01 Spectra Physics, Inc. Mirror translation apparatus for altering focal point position in a laser
CA1278716C (en) * 1987-12-14 1991-01-08 Tom Keightley Mirror assembly
US5025446A (en) * 1988-04-01 1991-06-18 Laserscope Intra-cavity beam relay for optical harmonic generation
US4930493A (en) * 1988-05-09 1990-06-05 Sallis Daniel V Multi-lever rim-drive heliostat
US5253189A (en) * 1989-06-13 1993-10-12 Schlumberger Technologies, Inc. Qualitative kinematics
US6298076B1 (en) * 1999-03-05 2001-10-02 Coherent, Inc. High-power external-cavity optically-pumped semiconductor lasers
US6414752B1 (en) * 1999-06-18 2002-07-02 Kla-Tencor Technologies Corporation Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Also Published As

Publication number Publication date
CN1144074C (zh) 2004-03-31
DE50002916D1 (de) 2003-08-21
EP1181609A1 (de) 2002-02-27
ATA88599A (de) 2000-03-15
WO2000070383A1 (de) 2000-11-23
AT406989B (de) 2000-11-27
CN1350656A (zh) 2002-05-22
EP1181609B1 (de) 2003-07-16
JP2002544559A (ja) 2002-12-24
AU4723800A (en) 2000-12-05
BR0010628A (pt) 2002-02-19
US6795476B1 (en) 2004-09-21

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