CN1144074C - 聚焦装置 - Google Patents

聚焦装置 Download PDF

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Publication number
CN1144074C
CN1144074C CNB008076316A CN00807631A CN1144074C CN 1144074 C CN1144074 C CN 1144074C CN B008076316 A CNB008076316 A CN B008076316A CN 00807631 A CN00807631 A CN 00807631A CN 1144074 C CN1144074 C CN 1144074C
Authority
CN
China
Prior art keywords
tilting member
focalizer
thin material
material zone
shaped tilting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB008076316A
Other languages
English (en)
Chinese (zh)
Other versions
CN1350656A (zh
Inventor
安德烈亚斯·施廷格尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Femtolasers Produktions GmbH
Original Assignee
Femtolasers Produktions GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Femtolasers Produktions GmbH filed Critical Femtolasers Produktions GmbH
Publication of CN1350656A publication Critical patent/CN1350656A/zh
Application granted granted Critical
Publication of CN1144074C publication Critical patent/CN1144074C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/086—One or more reflectors having variable properties or positions for initial adjustment of the resonator
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/025—Constructional details of solid state lasers, e.g. housings or mountings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/081—Construction or shape of optical resonators or components thereof comprising three or more reflectors
    • H01S3/0813—Configuration of resonator
    • H01S3/0816—Configuration of resonator having 4 reflectors, e.g. Z-shaped resonators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/11—Mode locking; Q-switching; Other giant-pulse techniques, e.g. cavity dumping
    • H01S3/1106—Mode locking
    • H01S3/1112—Passive mode locking

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)
  • Automatic Focus Adjustment (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
CNB008076316A 1999-05-18 2000-05-11 聚焦装置 Expired - Fee Related CN1144074C (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ATA885/1999 1999-05-18
AT0088599A AT406989B (de) 1999-05-18 1999-05-18 Fokussiereinrichtung
ATA885/99 1999-05-18

Publications (2)

Publication Number Publication Date
CN1350656A CN1350656A (zh) 2002-05-22
CN1144074C true CN1144074C (zh) 2004-03-31

Family

ID=3502067

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB008076316A Expired - Fee Related CN1144074C (zh) 1999-05-18 2000-05-11 聚焦装置

Country Status (9)

Country Link
US (1) US6795476B1 (enExample)
EP (1) EP1181609B1 (enExample)
JP (1) JP4554825B2 (enExample)
CN (1) CN1144074C (enExample)
AT (1) AT406989B (enExample)
AU (1) AU4723800A (enExample)
BR (1) BR0010628A (enExample)
DE (1) DE50002916D1 (enExample)
WO (1) WO2000070383A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201110489A (en) * 2009-04-30 2011-03-16 Corning Inc Folded lasers system
JP2017059683A (ja) * 2015-09-16 2017-03-23 国立大学法人 東京大学 レーザー発振器及びレーザー発振器を備えた分光装置、光コヒーレンストモグラフィ装置、非同期光サンプリング装置、長距離絶対距離計測装置、ｃｗレーザー高速高分解能分光装置
CN110666343B (zh) * 2019-10-31 2021-06-25 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） 激光转折装置、激光加工光路系统及光路调试方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1830308A (en) * 1928-02-29 1931-11-03 Gustav P Zepke Extensible support for fixtures
FR2442622A1 (fr) * 1978-06-08 1980-06-27 Aron Rosa Daniele Appareil de chirurgie ophtalmologique
US4661958A (en) * 1983-05-06 1987-04-28 Coherent, Inc. Laser
US4674097A (en) * 1986-01-14 1987-06-16 Cooper Lasersonics, Inc. Distributed-feedback dye laser
DE3814829A1 (de) 1987-05-23 1988-12-01 Teldix Gmbh Anordnung zur verdrehung einer flaeche
US4922501A (en) 1987-09-30 1990-05-01 Spectra Physics, Inc. Mirror translation apparatus for altering focal point position in a laser
CA1278716C (en) * 1987-12-14 1991-01-08 Tom Keightley Mirror assembly
US5025446A (en) * 1988-04-01 1991-06-18 Laserscope Intra-cavity beam relay for optical harmonic generation
US4930493A (en) * 1988-05-09 1990-06-05 Sallis Daniel V Multi-lever rim-drive heliostat
US5253189A (en) * 1989-06-13 1993-10-12 Schlumberger Technologies, Inc. Qualitative kinematics
US6298076B1 (en) * 1999-03-05 2001-10-02 Coherent, Inc. High-power external-cavity optically-pumped semiconductor lasers
US6414752B1 (en) * 1999-06-18 2002-07-02 Kla-Tencor Technologies Corporation Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool

Also Published As

Publication number Publication date
CN1350656A (zh) 2002-05-22
ATA88599A (de) 2000-03-15
WO2000070383A1 (de) 2000-11-23
AT406989B (de) 2000-11-27
DE50002916D1 (de) 2003-08-21
US6795476B1 (en) 2004-09-21
EP1181609B1 (de) 2003-07-16
JP2002544559A (ja) 2002-12-24
EP1181609A1 (de) 2002-02-27
AU4723800A (en) 2000-12-05
JP4554825B2 (ja) 2010-09-29
BR0010628A (pt) 2002-02-19

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20040331

Termination date: 20170511