JP4537411B2 - 基板搬出入装置及び基板搬出入方法 - Google Patents

基板搬出入装置及び基板搬出入方法 Download PDF

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Publication number
JP4537411B2
JP4537411B2 JP2006548435A JP2006548435A JP4537411B2 JP 4537411 B2 JP4537411 B2 JP 4537411B2 JP 2006548435 A JP2006548435 A JP 2006548435A JP 2006548435 A JP2006548435 A JP 2006548435A JP 4537411 B2 JP4537411 B2 JP 4537411B2
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JP
Japan
Prior art keywords
tray
substrate
carry
loading
pin
Prior art date
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Expired - Fee Related
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JP2006548435A
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English (en)
Japanese (ja)
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JPWO2006123520A1 (ja
Inventor
哲郎 神近
智博 上田
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Hirata Corp
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Hirata Corp
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Publication date
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Publication of JPWO2006123520A1 publication Critical patent/JPWO2006123520A1/ja
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Publication of JP4537411B2 publication Critical patent/JP4537411B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68771—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by supporting more than one semiconductor substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0235—Containers
    • B65G2201/0258—Trays, totes or bins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0267—Pallets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0294—Vehicle bodies

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • De-Stacking Of Articles (AREA)
JP2006548435A 2005-05-17 2006-04-25 基板搬出入装置及び基板搬出入方法 Expired - Fee Related JP4537411B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/JP2005/008991 WO2006123402A1 (ja) 2005-05-17 2005-05-17 基板搬出入装置及び基板搬出入方法
JPPCT/JP2005/008991 2005-05-17
PCT/JP2006/308633 WO2006123520A1 (ja) 2005-05-17 2006-04-25 基板搬出入装置及び基板搬出入方法

Publications (2)

Publication Number Publication Date
JPWO2006123520A1 JPWO2006123520A1 (ja) 2008-12-25
JP4537411B2 true JP4537411B2 (ja) 2010-09-01

Family

ID=37430986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006548435A Expired - Fee Related JP4537411B2 (ja) 2005-05-17 2006-04-25 基板搬出入装置及び基板搬出入方法

Country Status (5)

Country Link
JP (1) JP4537411B2 (zh)
KR (1) KR100830225B1 (zh)
CN (1) CN101018723B (zh)
TW (1) TWI320392B (zh)
WO (2) WO2006123402A1 (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI496233B (zh) * 2013-03-01 2015-08-11 Mas Automation Corp Substrate positioning device
CN104849500A (zh) * 2015-03-24 2015-08-19 昆山德友机械设备有限公司 一种电子器件极性测试设备的输送定位系统
CN104849659A (zh) * 2015-06-08 2015-08-19 江苏森源电气股份有限公司 一种真空断路器的终检工作台
CN106955850B (zh) * 2017-04-10 2019-06-04 苏州菱欧自动化科技股份有限公司 一种电池片的自动检测方法
JP7085467B2 (ja) * 2018-12-11 2022-06-16 平田機工株式会社 ロードロックチャンバ
JP2022059213A (ja) * 2020-10-01 2022-04-13 日本電産サンキョー株式会社 搬送システム
TWI811760B (zh) * 2021-08-11 2023-08-11 迅得機械股份有限公司 托盤定位機構
CN113602815A (zh) * 2021-08-26 2021-11-05 深圳市诺泰芯装备有限公司 一种IC Tray托盘供料回收设备及方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01281220A (ja) * 1988-05-07 1989-11-13 Sanyo Electric Co Ltd トレー収納装置
JPH06271009A (ja) * 1993-03-18 1994-09-27 Tokyo Electron Tohoku Ltd 移載装置
JP2004186249A (ja) * 2002-11-29 2004-07-02 Sharp Corp 基板移載装置並びに基板の取り出し方法および基板の収納方法
JP2005104475A (ja) * 2003-09-26 2005-04-21 Sharp Corp 基板収納トレイ用パレットおよび基板移載システム

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01281220A (ja) * 1988-05-07 1989-11-13 Sanyo Electric Co Ltd トレー収納装置
JPH06271009A (ja) * 1993-03-18 1994-09-27 Tokyo Electron Tohoku Ltd 移載装置
JP2004186249A (ja) * 2002-11-29 2004-07-02 Sharp Corp 基板移載装置並びに基板の取り出し方法および基板の収納方法
JP2005104475A (ja) * 2003-09-26 2005-04-21 Sharp Corp 基板収納トレイ用パレットおよび基板移載システム

Also Published As

Publication number Publication date
WO2006123520A1 (ja) 2006-11-23
TWI320392B (zh) 2010-02-11
KR20070088490A (ko) 2007-08-29
WO2006123402A1 (ja) 2006-11-23
KR100830225B1 (ko) 2008-05-16
CN101018723A (zh) 2007-08-15
CN101018723B (zh) 2011-06-15
JPWO2006123520A1 (ja) 2008-12-25

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