JP4536534B2 - 半導体発光素子の製造方法 - Google Patents
半導体発光素子の製造方法 Download PDFInfo
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- JP4536534B2 JP4536534B2 JP2005019468A JP2005019468A JP4536534B2 JP 4536534 B2 JP4536534 B2 JP 4536534B2 JP 2005019468 A JP2005019468 A JP 2005019468A JP 2005019468 A JP2005019468 A JP 2005019468A JP 4536534 B2 JP4536534 B2 JP 4536534B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 238000005424 photoluminescence Methods 0.000 claims description 49
- 238000000034 method Methods 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 229910052733 gallium Inorganic materials 0.000 claims description 5
- 229910052738 indium Inorganic materials 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 5
- 239000000203 mixture Substances 0.000 description 28
- 239000000758 substrate Substances 0.000 description 24
- 239000013078 crystal Substances 0.000 description 20
- 150000004767 nitrides Chemical class 0.000 description 20
- 230000006798 recombination Effects 0.000 description 15
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 14
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- 229910001218 Gallium arsenide Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 230000033001 locomotion Effects 0.000 description 3
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- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 239000000969 carrier Substances 0.000 description 2
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- 238000001803 electron scattering Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
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- 238000001459 lithography Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005136 cathodoluminescence Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
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- 229910052749 magnesium Inorganic materials 0.000 description 1
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- 238000004651 near-field scanning optical microscopy Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000001443 photoexcitation Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34333—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2304/00—Special growth methods for semiconductor lasers
- H01S2304/04—MOCVD or MOVPE
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
- H01S5/2009—Confining in the direction perpendicular to the layer structure by using electron barrier layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
- H01S5/3213—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities asymmetric clading layers
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- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biophysics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Semiconductor Lasers (AREA)
Description
まず、本実施の形態に係る半導体発光素子の特徴、及びその効果について説明する。
量子井戸構造などの量子閉じ込め構造におけるIn組成比の空間的な揺らぎの存在は、貫通転位密度の低いGaN基板上においては、特定の発光波長を有する半導体発光素子での発光効率などの素子特性を低減すると考えられる。
図1は、本実施の形態に係る窒化物系半導体レーザの構造を示す断面図である。
本実施の形態に係る窒化物系半導体レーザは、リッジ構造及びSCH(Separate Confinement heterostructure)構造を有するものである。また、活性層5は、AlxGayIn1-x-yN(x≧0、y≧0、x+y=1)III−V窒化物系化合物半導体(本実施の形態の例では、x=0)の多層へテロ接合から構成されている。
まず、予めサーマルクリーニングなどにより表面を清浄化したGaN基板1上に有機金属化学気相成長(MOCVD)法により例えば1200℃の成長温度でn型GaN層2を成長させ、その後、同じくMOCVD法により、n型Alx1Ga1-x1Nクラッド層3、n型GaN光ガイド層4、アンドープのIny1Ga1-y1N/Iny2Ga1-y2N多重量子井戸層からなる活性層5、p型Alx2Ga1-x2N電子障壁層6およびp型GaN光ガイド層7、p型Alx3Ga1-x3Nクラッド層8およびp型GaNコンタクト層9を順次積層する。
以上により、図1に示す窒化物系半導体レーザが作製される。
図2は、活性層5のフォトルミネッセンス発光強度(発光ピーク強度)を300Kでの発光強度で規格化した温度変化を示す図である。温度の上昇に伴って、非発光再結合確率が上昇するため、発光強度が低下し、温度上昇に伴う発光強度の低減の度合いはMOCVDの成長条件によって変化することがわかる。
図4からわかるように、フォトルミネッセンス発光強度比が小さくなるとともに閾値電流が低減していくことがわかる。そして、フォトルミネッセンス発光強度比が0.1を境に閾値電流が著しく低減していることがわかる。
Claims (2)
- In、Ga、Nを含む量子閉じ込め構造を活性層とする半導体発光素子の製造方法であって、
フォトルミネッセンス発光ピーク強度の5Kにおける値に対する300Kにおける値の比が0.1以下となる前記量子閉じ込め構造の形成条件を得る工程と、
前記形成条件により、前記量子閉じ込め構造を形成する工程と、
を備えることを特徴とする半導体発光素子の製造方法。 - 前記量子閉じ込め構造は、量子井戸構造であることを特徴とする請求項1に記載の半導体発光素子の製造方法。
Priority Applications (2)
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JP2005019468A JP4536534B2 (ja) | 2005-01-27 | 2005-01-27 | 半導体発光素子の製造方法 |
US11/326,509 US7172429B2 (en) | 2005-01-27 | 2006-01-06 | Method of manufacturing semiconductor light emitting device |
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JP2005019468A JP4536534B2 (ja) | 2005-01-27 | 2005-01-27 | 半導体発光素子の製造方法 |
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JP2006210574A JP2006210574A (ja) | 2006-08-10 |
JP4536534B2 true JP4536534B2 (ja) | 2010-09-01 |
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JP2005019468A Expired - Fee Related JP4536534B2 (ja) | 2005-01-27 | 2005-01-27 | 半導体発光素子の製造方法 |
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US (1) | US7172429B2 (ja) |
JP (1) | JP4536534B2 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2008227002A (ja) * | 2007-03-09 | 2008-09-25 | Nichia Chem Ind Ltd | 窒化物半導体レーザ素子 |
JP2009152276A (ja) * | 2007-12-19 | 2009-07-09 | Mitsubishi Electric Corp | 窒化物半導体レーザの製造方法 |
JP2019091801A (ja) * | 2017-11-14 | 2019-06-13 | シャープ株式会社 | 窒化物半導体レーザ素子 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08125274A (ja) * | 1994-08-29 | 1996-05-17 | Matsushita Electric Ind Co Ltd | 半導体レーザ及びその製造方法ならびに歪量子井戸結晶及びその製造方法 |
JP2002344089A (ja) * | 2001-05-14 | 2002-11-29 | Sharp Corp | 窒化物系半導体発光素子およびその製造方法 |
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2005
- 2005-01-27 JP JP2005019468A patent/JP4536534B2/ja not_active Expired - Fee Related
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2006
- 2006-01-06 US US11/326,509 patent/US7172429B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08125274A (ja) * | 1994-08-29 | 1996-05-17 | Matsushita Electric Ind Co Ltd | 半導体レーザ及びその製造方法ならびに歪量子井戸結晶及びその製造方法 |
JP2002344089A (ja) * | 2001-05-14 | 2002-11-29 | Sharp Corp | 窒化物系半導体発光素子およびその製造方法 |
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Publication number | Publication date |
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US7172429B2 (en) | 2007-02-06 |
JP2006210574A (ja) | 2006-08-10 |
US20060166392A1 (en) | 2006-07-27 |
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