JP4530868B2 - ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ - Google Patents

ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ Download PDF

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Publication number
JP4530868B2
JP4530868B2 JP2005036765A JP2005036765A JP4530868B2 JP 4530868 B2 JP4530868 B2 JP 4530868B2 JP 2005036765 A JP2005036765 A JP 2005036765A JP 2005036765 A JP2005036765 A JP 2005036765A JP 4530868 B2 JP4530868 B2 JP 4530868B2
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Japan
Prior art keywords
gas
drive mechanism
static pressure
piston drive
gas bearing
Prior art date
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Expired - Lifetime
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JP2005036765A
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English (en)
Japanese (ja)
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JP2006220289A5 (enExample
JP2006220289A (ja
Inventor
勝美 佐々木
輝次 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Pneumatic Servo Controls Ltd
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Shimadzu Corp
Pneumatic Servo Controls Ltd
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Publication date
Application filed by Shimadzu Corp, Pneumatic Servo Controls Ltd filed Critical Shimadzu Corp
Priority to JP2005036765A priority Critical patent/JP4530868B2/ja
Publication of JP2006220289A publication Critical patent/JP2006220289A/ja
Publication of JP2006220289A5 publication Critical patent/JP2006220289A5/ja
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Publication of JP4530868B2 publication Critical patent/JP4530868B2/ja
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Expired - Lifetime legal-status Critical Current

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  • Actuator (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP2005036765A 2005-02-14 2005-02-14 ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ Expired - Lifetime JP4530868B2 (ja)

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JP2005036765A JP4530868B2 (ja) 2005-02-14 2005-02-14 ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005036765A JP4530868B2 (ja) 2005-02-14 2005-02-14 ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ

Publications (3)

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JP2006220289A JP2006220289A (ja) 2006-08-24
JP2006220289A5 JP2006220289A5 (enExample) 2007-12-20
JP4530868B2 true JP4530868B2 (ja) 2010-08-25

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JP2005036765A Expired - Lifetime JP4530868B2 (ja) 2005-02-14 2005-02-14 ピストン駆動機構の静圧気体軸受および気体圧アクチュエータ

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230152920A (ko) * 2022-04-28 2023-11-06 김근호 시험용 유압식 서보 액츄에이터

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2411390C2 (ru) 2006-01-23 2011-02-10 Бер Гмбх Унд Ко. Кг Теплообменник
US9127895B2 (en) 2006-01-23 2015-09-08 MAHLE Behr GmbH & Co. KG Heat exchanger
JP5064135B2 (ja) * 2007-08-07 2012-10-31 新日本製鐵株式会社 超音波衝撃処理装置用打撃ピンホルダー
JP5265210B2 (ja) * 2008-02-07 2013-08-14 ピー・エス・シー株式会社 ピストン駆動機構の静圧気体軸受及び気体圧アクチュエータ
JP2009197631A (ja) * 2008-02-20 2009-09-03 Sanden Corp 揺動板式圧縮機のピストンロッド
US8662029B2 (en) 2010-11-23 2014-03-04 Etagen, Inc. High-efficiency linear combustion engine
CN108953471A (zh) * 2018-07-10 2018-12-07 哈尔滨工业大学 一种无摩擦重力卸荷机构
WO2020023682A1 (en) 2018-07-24 2020-01-30 Etagen, Inc. Linear electromagnetic machine
US12255514B2 (en) 2021-07-30 2025-03-18 Mainspring Energy, Inc. Systems and methods for flexure-based bearing mounting

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60143902U (ja) * 1984-03-06 1985-09-24 太陽鉄工株式会社 低摩擦型流体圧シリンダ−
JPH0230526U (enExample) * 1988-08-19 1990-02-27
JPH061808U (ja) * 1992-06-17 1994-01-14 三立精機株式会社 低摩擦型シリンダ
JP4215285B2 (ja) * 1995-08-08 2009-01-28 株式会社小松製作所 自己潤滑性焼結摺動材およびその製造方法
JPH10129478A (ja) * 1996-11-05 1998-05-19 Tokyo Seimitsu Sokki Kk 振り子車両用空気圧サーボシリンダ
JP2000170767A (ja) * 1998-12-08 2000-06-20 Nsk Ltd 静圧直線案内装置
JP2002070845A (ja) * 2000-08-29 2002-03-08 Daido Steel Co Ltd 軸受機構、それを用いたハードディスク駆動機構及びポリゴンミラー駆動機構
JP3357661B2 (ja) * 2000-11-17 2002-12-16 株式会社不二機販 潤滑性被膜の形成方法
JP2003184883A (ja) * 2001-12-20 2003-07-03 Nissan Motor Co Ltd 軸受摺動部材
JP2003340720A (ja) * 2002-05-28 2003-12-02 Mitsubishi Heavy Ind Ltd 表面処理装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230152920A (ko) * 2022-04-28 2023-11-06 김근호 시험용 유압식 서보 액츄에이터
KR102799113B1 (ko) * 2022-04-28 2025-04-23 김근호 시험용 유압식 서보 액츄에이터

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Publication number Publication date
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