JP4528787B2 - レーザプリンタに適用されるｍｅｍｓスキャナ - Google Patents

レーザプリンタに適用されるｍｅｍｓスキャナ Download PDF

Info

Publication number
JP4528787B2
JP4528787B2 JP2006553202A JP2006553202A JP4528787B2 JP 4528787 B2 JP4528787 B2 JP 4528787B2 JP 2006553202 A JP2006553202 A JP 2006553202A JP 2006553202 A JP2006553202 A JP 2006553202A JP 4528787 B2 JP4528787 B2 JP 4528787B2
Authority
JP
Japan
Prior art keywords
mems scanner
opposing
laser printer
scan plate
mems
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2006553202A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007526506A (ja
JP2007526506A5 (https=
Inventor
ランドール、 ビー スプレイグ、
ワイアット、 オー デイヴィス、
ディーン、 アール ブラウン、
欣郎 古賀
信正 阿部
雄二郎 野村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of JP2007526506A publication Critical patent/JP2007526506A/ja
Publication of JP2007526506A5 publication Critical patent/JP2007526506A5/ja
Application granted granted Critical
Publication of JP4528787B2 publication Critical patent/JP4528787B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/12—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using the sheet-feed movement or the medium-advance or the drum-rotation movement as the slow scanning component, e.g. arrangements for the main-scanning
    • H04N1/121—Feeding arrangements
    • H04N1/1235—Feeding a sheet past a transparent plate; Details thereof
    • H04N1/124—Plate shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Printer (AREA)
  • Facsimile Scanning Arrangements (AREA)
JP2006553202A 2004-02-09 2005-02-09 レーザプリンタに適用されるｍｅｍｓスキャナ Expired - Fee Related JP4528787B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
PCT/US2005/004066 WO2005078507A1 (en) 2004-02-09 2005-02-09 Mems scanner adapted to a laser printer

Publications (3)

Publication Number Publication Date
JP2007526506A JP2007526506A (ja) 2007-09-13
JP2007526506A5 JP2007526506A5 (https=) 2008-03-21
JP4528787B2 true JP4528787B2 (ja) 2010-08-18

Family

ID=34860350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006553202A Expired - Fee Related JP4528787B2 (ja) 2004-02-09 2005-02-09 レーザプリンタに適用されるｍｅｍｓスキャナ

Country Status (5)

Country Link
EP (1) EP1723460B1 (https=)
JP (1) JP4528787B2 (https=)
KR (1) KR101091129B1 (https=)
CN (1) CN100492096C (https=)
WO (1) WO2005078507A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7187483B1 (en) * 2005-09-16 2007-03-06 Texas Instruments Incorporated Magnet on frame oscillating device
US7898561B2 (en) * 2007-01-26 2011-03-01 Miradia Inc. MEMS mirror system for laser printing applications
JP2009223246A (ja) * 2008-03-19 2009-10-01 Hitachi Ltd ミラー駆動方法ならびにそれを用いた表示装置
JP5095569B2 (ja) 2008-09-17 2012-12-12 株式会社リコー 光走査装置及び画像形成装置
WO2011133815A2 (en) * 2010-04-21 2011-10-27 Mezmeriz, Inc. Composite scanning mirror systems
JP5659672B2 (ja) * 2010-10-06 2015-01-28 セイコーエプソン株式会社 光スキャナー、ミラーチップ、光スキャナーの製造方法、および画像形成装置
DE112013003679B4 (de) 2012-07-26 2023-05-04 Apple Inc. Dual-Achsen-Scanspiegel und Verfahren zum Scannen
JP6260019B2 (ja) * 2012-11-09 2018-01-17 北陽電機株式会社 金属弾性部材、微小機械装置、微小機械装置の製造方法、揺動制御装置及び揺動制御方法
WO2014126542A1 (en) 2013-02-13 2014-08-21 Tenu Elektroni̇k Sanayi̇ Ve Ti̇caret Li̇mi̇ted Şi̇rketi̇ Lighting system used in vehicles
US9670056B2 (en) * 2014-01-31 2017-06-06 Stmicroelectronics S.R.L. Electrostatically driven MEMS device
CN104924776A (zh) * 2014-03-17 2015-09-23 联想(北京)有限公司 一种打印设备的激光扫描单元
WO2018068822A1 (en) 2016-10-10 2018-04-19 Hp Indigo B.V. Controlling scan-to-scan spacing between print operations

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1136172A (zh) * 1995-05-19 1996-11-20 中国科学院物理研究所 无序多层介质膜宽带光学反射镜及其制备方法
US5999306A (en) * 1995-12-01 1999-12-07 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US6850475B1 (en) * 1996-07-30 2005-02-01 Seagate Technology, Llc Single frequency laser source for optical data storage system
DE19941045A1 (de) 1999-08-28 2001-04-12 Bosch Gmbh Robert Mikroschwingvorrichtung
JP2001264676A (ja) * 2000-03-14 2001-09-26 Olympus Optical Co Ltd 光スキャナ
US7593029B2 (en) 2001-08-20 2009-09-22 Ricoh Company, Ltd. Optical scanning device and image forming apparatus using the same
US7068296B2 (en) 2001-09-14 2006-06-27 Ricoh Company, Ltd. Optical scanning device for reducing a dot position displacement at a joint of scanning lines
US6760144B2 (en) * 2001-12-05 2004-07-06 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
JP4370905B2 (ja) * 2003-12-26 2009-11-25 セイコーエプソン株式会社 光走査装置および画像形成装置

Also Published As

Publication number Publication date
EP1723460A1 (en) 2006-11-22
WO2005078507A1 (en) 2005-08-25
KR101091129B1 (ko) 2011-12-09
EP1723460B1 (en) 2014-07-16
KR20070117436A (ko) 2007-12-12
JP2007526506A (ja) 2007-09-13
CN101002131A (zh) 2007-07-18
CN100492096C (zh) 2009-05-27

Similar Documents

Publication Publication Date Title
JP4390174B2 (ja) 光走査装置
JP4528787B2 (ja) レーザプリンタに適用されるｍｅｍｓスキャナ
KR100901237B1 (ko) 광 편향기 및 이를 이용하는 광학 기구
JP5500016B2 (ja) 光偏向器、光走査装置、画像形成装置及び画像投影装置
US7649301B2 (en) Actuator capable of driving with large rotational angle or large deflection angle
KR101030889B1 (ko) 광 편향기 및 이를 이용한 광학기구
JP4172627B2 (ja) 振動ミラー、光書込装置及び画像形成装置
US7636101B2 (en) MEMS scanner adapted to a laser printer
US8681408B2 (en) Optical scanning device, image forming apparatus, and image projection device
WO2009011405A1 (en) Oscillator device and optical deflector using the same
US7474165B2 (en) Oscillating device, optical deflector and optical instrument using the same
JP6682774B2 (ja) 光偏向器、光走査装置、画像形成装置、画像投影装置、ヘッドアップディスプレイ装置、およびレーダ装置
JP2008070863A (ja) 振動ミラー、光書込装置および画像形成装置
US20100302612A1 (en) Oscillating structure and oscillator device using the same
EP2851733B1 (en) Optical deflection device and image forming apparatus
JP4409894B2 (ja) 光走査装置、光書込装置および画像形成装置
JP2009031643A (ja) 揺動体装置、光偏向器およびそれを用いた画像形成装置
JP2006195290A (ja) 画像読取装置及び画像形成装置
CN101784938A (zh) 摆动体装置及其制造方法、光学偏转器和图像形成装置
JP2012093431A (ja) 光偏向器、光走査装置、画像形成装置及び画像投影装置
JP2007171929A (ja) 揺動体装置、光偏向器、及びそれを用いた光学機器
JP2004341320A (ja) 光走査装置、画像形成装置
JP2007256557A (ja) Ｍｅｍｓアクチュエータ及び走査装置
JP2005266053A (ja) 光走査装置および画像形成装置
JP2020115218A (ja) 光偏向器、光走査装置、画像形成装置、画像投影装置、ヘッドアップディスプレイ装置、およびレーダ装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080129

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20080129

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20100202

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20100419

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100601

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100607

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130611

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4528787

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313117

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees