CN100492096C - 适合于激光打印机的mems扫描仪 - Google Patents

适合于激光打印机的mems扫描仪 Download PDF

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Publication number
CN100492096C
CN100492096C CNB2005800108068A CN200580010806A CN100492096C CN 100492096 C CN100492096 C CN 100492096C CN B2005800108068 A CNB2005800108068 A CN B2005800108068A CN 200580010806 A CN200580010806 A CN 200580010806A CN 100492096 C CN100492096 C CN 100492096C
Authority
CN
China
Prior art keywords
laser printer
mems scanner
mems
scanner
width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB2005800108068A
Other languages
English (en)
Chinese (zh)
Other versions
CN101002131A (zh
Inventor
兰黛尔·B·斯帕拉古
瓦耶塔·O·戴维斯
迪恩·R·布朗
古贺欣郎
阿部信正
野村雄二郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microvision Inc
Original Assignee
Seiko Epson Corp
Microvision Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Microvision Inc filed Critical Seiko Epson Corp
Publication of CN101002131A publication Critical patent/CN101002131A/zh
Application granted granted Critical
Publication of CN100492096C publication Critical patent/CN100492096C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/12—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using the sheet-feed movement or the medium-advance or the drum-rotation movement as the slow scanning component, e.g. arrangements for the main-scanning
    • H04N1/121—Feeding arrangements
    • H04N1/1235—Feeding a sheet past a transparent plate; Details thereof
    • H04N1/124—Plate shape

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Printer (AREA)
  • Facsimile Scanning Arrangements (AREA)
CNB2005800108068A 2004-02-09 2005-02-09 适合于激光打印机的mems扫描仪 Expired - Fee Related CN100492096C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US60/542,896 2004-02-09

Publications (2)

Publication Number Publication Date
CN101002131A CN101002131A (zh) 2007-07-18
CN100492096C true CN100492096C (zh) 2009-05-27

Family

ID=34860350

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2005800108068A Expired - Fee Related CN100492096C (zh) 2004-02-09 2005-02-09 适合于激光打印机的mems扫描仪

Country Status (5)

Country Link
EP (1) EP1723460B1 (https=)
JP (1) JP4528787B2 (https=)
KR (1) KR101091129B1 (https=)
CN (1) CN100492096C (https=)
WO (1) WO2005078507A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102445752A (zh) * 2010-10-06 2012-05-09 精工爱普生株式会社 光扫描仪及其制造方法、反射镜芯片以及图像形成装置

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7187483B1 (en) * 2005-09-16 2007-03-06 Texas Instruments Incorporated Magnet on frame oscillating device
US7898561B2 (en) * 2007-01-26 2011-03-01 Miradia Inc. MEMS mirror system for laser printing applications
JP2009223246A (ja) * 2008-03-19 2009-10-01 Hitachi Ltd ミラー駆動方法ならびにそれを用いた表示装置
JP5095569B2 (ja) 2008-09-17 2012-12-12 株式会社リコー 光走査装置及び画像形成装置
WO2011133815A2 (en) * 2010-04-21 2011-10-27 Mezmeriz, Inc. Composite scanning mirror systems
DE112013003679B4 (de) 2012-07-26 2023-05-04 Apple Inc. Dual-Achsen-Scanspiegel und Verfahren zum Scannen
JP6260019B2 (ja) * 2012-11-09 2018-01-17 北陽電機株式会社 金属弾性部材、微小機械装置、微小機械装置の製造方法、揺動制御装置及び揺動制御方法
WO2014126542A1 (en) 2013-02-13 2014-08-21 Tenu Elektroni̇k Sanayi̇ Ve Ti̇caret Li̇mi̇ted Şi̇rketi̇ Lighting system used in vehicles
US9670056B2 (en) * 2014-01-31 2017-06-06 Stmicroelectronics S.R.L. Electrostatically driven MEMS device
CN104924776A (zh) * 2014-03-17 2015-09-23 联想(北京)有限公司 一种打印设备的激光扫描单元
WO2018068822A1 (en) 2016-10-10 2018-04-19 Hp Indigo B.V. Controlling scan-to-scan spacing between print operations

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1136172A (zh) * 1995-05-19 1996-11-20 中国科学院物理研究所 无序多层介质膜宽带光学反射镜及其制备方法
US6107115A (en) * 1995-12-01 2000-08-22 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US6360035B1 (en) * 1996-07-30 2002-03-19 Seagate Technology Llc Optical head using micro-machined elements
US20030072066A1 (en) * 2001-09-14 2003-04-17 Yoshinori Hayashi Optical scanning device for reducing a dot position displacement at a joint of scanning lines

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19941045A1 (de) 1999-08-28 2001-04-12 Bosch Gmbh Robert Mikroschwingvorrichtung
JP2001264676A (ja) * 2000-03-14 2001-09-26 Olympus Optical Co Ltd 光スキャナ
US7593029B2 (en) 2001-08-20 2009-09-22 Ricoh Company, Ltd. Optical scanning device and image forming apparatus using the same
US6760144B2 (en) * 2001-12-05 2004-07-06 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator
JP4370905B2 (ja) * 2003-12-26 2009-11-25 セイコーエプソン株式会社 光走査装置および画像形成装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1136172A (zh) * 1995-05-19 1996-11-20 中国科学院物理研究所 无序多层介质膜宽带光学反射镜及其制备方法
US6107115A (en) * 1995-12-01 2000-08-22 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US6360035B1 (en) * 1996-07-30 2002-03-19 Seagate Technology Llc Optical head using micro-machined elements
US20030072066A1 (en) * 2001-09-14 2003-04-17 Yoshinori Hayashi Optical scanning device for reducing a dot position displacement at a joint of scanning lines

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
激光打印机的原理、检修与维护. 胡广友，王光富.光电子技术与信息，第8卷第5期. 1995 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102445752A (zh) * 2010-10-06 2012-05-09 精工爱普生株式会社 光扫描仪及其制造方法、反射镜芯片以及图像形成装置
CN102445752B (zh) * 2010-10-06 2015-06-24 精工爱普生株式会社 光扫描仪及其制造方法、反射镜芯片以及图像形成装置

Also Published As

Publication number Publication date
EP1723460A1 (en) 2006-11-22
WO2005078507A1 (en) 2005-08-25
JP4528787B2 (ja) 2010-08-18
KR101091129B1 (ko) 2011-12-09
EP1723460B1 (en) 2014-07-16
KR20070117436A (ko) 2007-12-12
JP2007526506A (ja) 2007-09-13
CN101002131A (zh) 2007-07-18

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Legal Events

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C41 Transfer of patent application or patent right or utility model
TR01 Transfer of patent right

Effective date of registration: 20151028

Address after: Washington State

Patentee after: Microvision Inc.

Address before: Washington State

Patentee before: Microvision Inc.

Patentee before: Seiko Epson Corp.

CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20090527

Termination date: 20200209

CF01 Termination of patent right due to non-payment of annual fee