KR101091129B1 - 레이저 프린터에 사용되는 ｍｅｍｓ 스캐너 - Google Patents

레이저 프린터에 사용되는 ｍｅｍｓ 스캐너 Download PDF

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Publication number
KR101091129B1
KR101091129B1 KR1020067018626A KR20067018626A KR101091129B1 KR 101091129 B1 KR101091129 B1 KR 101091129B1 KR 1020067018626 A KR1020067018626 A KR 1020067018626A KR 20067018626 A KR20067018626 A KR 20067018626A KR 101091129 B1 KR101091129 B1 KR 101091129B1
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KR
South Korea
Prior art keywords
mems scanner
scan
mems
scanner
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020067018626A
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English (en)
Korean (ko)
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KR20070117436A (ko
Inventor
랜달 비. 스프라규
야트 오. 데이비스
딘 알. 브라운
요시로 고가
노부마사 아베
유지로 노무라
Original Assignee
세이코 엡슨 가부시키가이샤
마이크로비젼, 인코퍼레이티드
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Application filed by 세이코 엡슨 가부시키가이샤, 마이크로비젼, 인코퍼레이티드 filed Critical 세이코 엡슨 가부시키가이샤
Publication of KR20070117436A publication Critical patent/KR20070117436A/ko
Application granted granted Critical
Publication of KR101091129B1 publication Critical patent/KR101091129B1/ko
Assigned to 마이크로비젼, 인코퍼레이티드 reassignment 마이크로비젼, 인코퍼레이티드 권리지분의 전부이전등록 Assignors: 세이코 엡슨 가부시키가이샤
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/113—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using oscillating or rotating mirrors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N1/00—Scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission; Details thereof
    • H04N1/04—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa
    • H04N1/12—Scanning arrangements, i.e. arrangements for the displacement of active reading or reproducing elements relative to the original or reproducing medium, or vice versa using the sheet-feed movement or the medium-advance or the drum-rotation movement as the slow scanning component, e.g. arrangements for the main-scanning
    • H04N1/121—Feeding arrangements
    • H04N1/1235—Feeding a sheet past a transparent plate; Details thereof
    • H04N1/124—Plate shape

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Laser Beam Printer (AREA)
  • Facsimile Scanning Arrangements (AREA)
KR1020067018626A 2004-02-09 2005-02-09 레이저 프린터에 사용되는 ｍｅｍｓ 스캐너 Expired - Fee Related KR101091129B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US54289604P 2004-02-09 2004-02-09
US60/542,896 2004-02-09
PCT/US2005/004066 WO2005078507A1 (en) 2004-02-09 2005-02-09 Mems scanner adapted to a laser printer

Publications (2)

Publication Number Publication Date
KR20070117436A KR20070117436A (ko) 2007-12-12
KR101091129B1 true KR101091129B1 (ko) 2011-12-09

Family

ID=34860350

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020067018626A Expired - Fee Related KR101091129B1 (ko) 2004-02-09 2005-02-09 레이저 프린터에 사용되는 ｍｅｍｓ 스캐너

Country Status (5)

Country Link
EP (1) EP1723460B1 (https=)
JP (1) JP4528787B2 (https=)
KR (1) KR101091129B1 (https=)
CN (1) CN100492096C (https=)
WO (1) WO2005078507A1 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7187483B1 (en) * 2005-09-16 2007-03-06 Texas Instruments Incorporated Magnet on frame oscillating device
US7898561B2 (en) * 2007-01-26 2011-03-01 Miradia Inc. MEMS mirror system for laser printing applications
JP2009223246A (ja) * 2008-03-19 2009-10-01 Hitachi Ltd ミラー駆動方法ならびにそれを用いた表示装置
JP5095569B2 (ja) 2008-09-17 2012-12-12 株式会社リコー 光走査装置及び画像形成装置
WO2011133815A2 (en) * 2010-04-21 2011-10-27 Mezmeriz, Inc. Composite scanning mirror systems
JP5659672B2 (ja) * 2010-10-06 2015-01-28 セイコーエプソン株式会社 光スキャナー、ミラーチップ、光スキャナーの製造方法、および画像形成装置
DE112013003679B4 (de) 2012-07-26 2023-05-04 Apple Inc. Dual-Achsen-Scanspiegel und Verfahren zum Scannen
JP6260019B2 (ja) * 2012-11-09 2018-01-17 北陽電機株式会社 金属弾性部材、微小機械装置、微小機械装置の製造方法、揺動制御装置及び揺動制御方法
WO2014126542A1 (en) 2013-02-13 2014-08-21 Tenu Elektroni̇k Sanayi̇ Ve Ti̇caret Li̇mi̇ted Şi̇rketi̇ Lighting system used in vehicles
US9670056B2 (en) * 2014-01-31 2017-06-06 Stmicroelectronics S.R.L. Electrostatically driven MEMS device
CN104924776A (zh) * 2014-03-17 2015-09-23 联想(北京)有限公司 一种打印设备的激光扫描单元
WO2018068822A1 (en) 2016-10-10 2018-04-19 Hp Indigo B.V. Controlling scan-to-scan spacing between print operations

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6107115A (en) 1995-12-01 2000-08-22 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US6360035B1 (en) 1996-07-30 2002-03-19 Seagate Technology Llc Optical head using micro-machined elements
US20030072066A1 (en) 2001-09-14 2003-04-17 Yoshinori Hayashi Optical scanning device for reducing a dot position displacement at a joint of scanning lines
US20040008400A1 (en) 2001-12-05 2004-01-15 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1136172A (zh) * 1995-05-19 1996-11-20 中国科学院物理研究所 无序多层介质膜宽带光学反射镜及其制备方法
DE19941045A1 (de) 1999-08-28 2001-04-12 Bosch Gmbh Robert Mikroschwingvorrichtung
JP2001264676A (ja) * 2000-03-14 2001-09-26 Olympus Optical Co Ltd 光スキャナ
US7593029B2 (en) 2001-08-20 2009-09-22 Ricoh Company, Ltd. Optical scanning device and image forming apparatus using the same
JP4370905B2 (ja) * 2003-12-26 2009-11-25 セイコーエプソン株式会社 光走査装置および画像形成装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6107115A (en) 1995-12-01 2000-08-22 Seiko Epson Corporation Method of manufacturing spatial light modulator and electronic device employing it
US6360035B1 (en) 1996-07-30 2002-03-19 Seagate Technology Llc Optical head using micro-machined elements
US20030072066A1 (en) 2001-09-14 2003-04-17 Yoshinori Hayashi Optical scanning device for reducing a dot position displacement at a joint of scanning lines
US20040008400A1 (en) 2001-12-05 2004-01-15 Jds Uniphase Corporation Articulated MEMS electrostatic rotary actuator

Also Published As

Publication number Publication date
EP1723460A1 (en) 2006-11-22
WO2005078507A1 (en) 2005-08-25
JP4528787B2 (ja) 2010-08-18
EP1723460B1 (en) 2014-07-16
KR20070117436A (ko) 2007-12-12
JP2007526506A (ja) 2007-09-13
CN101002131A (zh) 2007-07-18
CN100492096C (zh) 2009-05-27

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