JP4513435B2 - 搬送装置 - Google Patents

搬送装置 Download PDF

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Publication number
JP4513435B2
JP4513435B2 JP2004203778A JP2004203778A JP4513435B2 JP 4513435 B2 JP4513435 B2 JP 4513435B2 JP 2004203778 A JP2004203778 A JP 2004203778A JP 2004203778 A JP2004203778 A JP 2004203778A JP 4513435 B2 JP4513435 B2 JP 4513435B2
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JP
Japan
Prior art keywords
arm
drive
arm portion
pick
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2004203778A
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English (en)
Japanese (ja)
Other versions
JP2005229087A (ja
JP2005229087A5 (fr
Inventor
弘明 佐伯
繁 石沢
健弘 新藤
勤 廣木
弥 町山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP2004203778A priority Critical patent/JP4513435B2/ja
Publication of JP2005229087A publication Critical patent/JP2005229087A/ja
Publication of JP2005229087A5 publication Critical patent/JP2005229087A5/ja
Application granted granted Critical
Publication of JP4513435B2 publication Critical patent/JP4513435B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2004203778A 2003-07-16 2004-07-09 搬送装置 Expired - Lifetime JP4513435B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004203778A JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003197689 2003-07-16
JP2004009506 2004-01-16
JP2004203778A JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2010075041A Division JP5024411B2 (ja) 2003-07-16 2010-03-29 搬送装置

Publications (3)

Publication Number Publication Date
JP2005229087A JP2005229087A (ja) 2005-08-25
JP2005229087A5 JP2005229087A5 (fr) 2007-01-18
JP4513435B2 true JP4513435B2 (ja) 2010-07-28

Family

ID=35003511

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004203778A Expired - Lifetime JP4513435B2 (ja) 2003-07-16 2004-07-09 搬送装置

Country Status (1)

Country Link
JP (1) JP4513435B2 (fr)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7946800B2 (en) * 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
TWI660446B (zh) * 2007-05-08 2019-05-21 美商布魯克斯自動機械公司 具有使用機械轉換機構之複數可動臂的基板運送裝置
US8267636B2 (en) 2007-05-08 2012-09-18 Brooks Automation, Inc. Substrate transport apparatus
KR102223624B1 (ko) 2010-11-10 2021-03-05 브룩스 오토메이션 인코퍼레이티드 기판 처리 장치
TWI614831B (zh) 2011-03-11 2018-02-11 布魯克斯自動機械公司 基板處理裝置
US9149936B2 (en) 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
US10224232B2 (en) 2013-01-18 2019-03-05 Persimmon Technologies Corporation Robot having two arms with unequal link lengths
CN105026115B (zh) * 2013-01-18 2018-11-16 柿子技术公司 带有具有不等连接部长度的臂的机器人
JP6386704B2 (ja) * 2013-08-27 2018-09-05 川崎重工業株式会社 ワーク搬送装置
KR102567510B1 (ko) 2015-03-12 2023-08-17 퍼시몬 테크놀로지스 코포레이션 종속화된 엔드 이펙터 움직임을 가진 로봇
JP6838278B2 (ja) * 2016-03-28 2021-03-03 セイコーエプソン株式会社 ロボット
JP6809245B2 (ja) * 2017-01-20 2021-01-06 セイコーエプソン株式会社 ロボット
JP7312815B2 (ja) * 2019-04-05 2023-07-21 川崎重工業株式会社 液化ガスタンクおよび液化ガス運搬船
WO2021059341A1 (fr) * 2019-09-24 2021-04-01 株式会社Ｆｕｊｉ Dispositif de mesure d'erreur de transfert d'angle

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10156770A (ja) * 1996-12-04 1998-06-16 Komatsu Ltd ハンドリング用ロボット
JP2000042954A (ja) * 1998-07-25 2000-02-15 Daihen Corp 搬送用ロボット装置
JP2002361577A (ja) * 2001-04-05 2002-12-18 Teijin Seiki Co Ltd ロボットアームおよびロボット

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10156770A (ja) * 1996-12-04 1998-06-16 Komatsu Ltd ハンドリング用ロボット
JP2000042954A (ja) * 1998-07-25 2000-02-15 Daihen Corp 搬送用ロボット装置
JP2002361577A (ja) * 2001-04-05 2002-12-18 Teijin Seiki Co Ltd ロボットアームおよびロボット

Also Published As

Publication number Publication date
JP2005229087A (ja) 2005-08-25

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