JP4487512B2 - 電気機械共振器およびその動作方法 - Google Patents

電気機械共振器およびその動作方法 Download PDF

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Publication number
JP4487512B2
JP4487512B2 JP2003291004A JP2003291004A JP4487512B2 JP 4487512 B2 JP4487512 B2 JP 4487512B2 JP 2003291004 A JP2003291004 A JP 2003291004A JP 2003291004 A JP2003291004 A JP 2003291004A JP 4487512 B2 JP4487512 B2 JP 4487512B2
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vibrator
temperature
electrode
voltage
electromechanical resonator
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Japanese (ja)
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JP2005059128A5 (enExample
JP2005059128A (ja
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康治 難波田
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Sony Corp
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Sony Corp
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  • Micromachines (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2003291004A 2003-08-11 2003-08-11 電気機械共振器およびその動作方法 Expired - Fee Related JP4487512B2 (ja)

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JP2003291004A JP4487512B2 (ja) 2003-08-11 2003-08-11 電気機械共振器およびその動作方法

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JP2003291004A JP4487512B2 (ja) 2003-08-11 2003-08-11 電気機械共振器およびその動作方法

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JP2005059128A JP2005059128A (ja) 2005-03-10
JP2005059128A5 JP2005059128A5 (enExample) 2006-07-06
JP4487512B2 true JP4487512B2 (ja) 2010-06-23

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Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4945204B2 (ja) * 2006-09-08 2012-06-06 株式会社東芝 アクチュエータ
JP5105279B2 (ja) * 2007-10-12 2012-12-26 セイコーインスツル株式会社 発振子及び該発振子を有する発振器
JP5101410B2 (ja) * 2008-06-27 2012-12-19 セイコーインスツル株式会社 共振周波数可変ｍｅｍｓ振動子
JP5407765B2 (ja) * 2008-11-20 2014-02-05 富士通株式会社 発振器および半導体装置
JP5204354B1 (ja) 2011-06-09 2013-06-05 パナソニック株式会社 発振器

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